A sensitive non-contact sensing system based on the CoFeNiSiB amorphous ribbon giant magnetoimpedance (GMI) effect is proposed for current testing. The sensing system consists of a GMI probe, a sinusoidal current generator, a voltage follower, a preamplifier, a low-pass filter, and a peak detector. Four different GMI probes derived from amorphous ribbon meanders are designed and fabricated through MEMS processes. GMI probes were driven by a 10 MHz, 5 mA AC current. A permanent magnet was used to provide a bias magnetic field for the probe. The effect of the bias magnetic field on the output DC voltage was investigated. This non-contact current sensing system exhibits good sensitivity and linearity at a bias magnetic field Hbias = 15 Oe. The sensitivity can reach up to 24.2 mV/A in the ±1.5 A range.
In this work, micro-ribbon strips and meanders based on CoFeNiSiB amorphous ribbons were fabricated by using the lithography technique and chemical etching. Flat and curved holders with different radius of curvature were obtained via 3D printing techniques for GMI testing. Longitudinal and transverse GMI (LGMI and TGMI) behaviors of micro-ribbon sensors in different bending directions and degrees were systematically investigated. The results show the LGMI and TGMI effects of micro-ribbon meanders with one turn is most sensitive to bending. It can be used in the development of deformation sensors. In addition, there is a linear range of field in the LGMI and TGMI curves of micro ribbons under different bending conditions, and the sensitivity of micro-ribbon sensors shows no significant change in the range. In particular, the micro-ribbon meanders with three turns are the least sensitive to bending deformation and can be used to develop stable and flexible GMI sensors for wearable electronics devices.
Purpose Microribbon with meander type based on giant magnetoimpedance (GMI) effect has become a research hot spot due to their higher sensitivity and spatial resolution. The purpose of this paper is to further optimize the line spacing to improve the performance of meanders for sensor application. Design/methodology/approach The model of GMI effect of microribbon with meander type is established. The effect of line spacing (Ls) on GMI behavior in meanders is analyzed systematically. Findings Comparison of theory and experiment indicates that decreasing the line spacing increases the negative mutual inductance and a consequent increase in the GMI effect. The maximum value of the GMI ratio increases from 69% to 91.8% (simulation results) and 16.9% to 51.4% (experimental results) when the line spacing is reduced from 400 to 50 µm. The contribution of line spacing versus line width to the GMI ratio of microribbon with meander type was contrasted. This behavior of the GMI ratio is dominated by the overall negative contribution of the mutual inductance. Originality/value This paper explores the effect of line spacing on the GMI ratio of meander type by comparing the simulation results with the experimental results. The superior line spacing is found in the identical sensing area. The findings will contribute to the design of high-performance micropatterned ribbon with meander-type GMI sensors and the establishment of a ribbon-based magnetic-sensitive biosensing system.
Quenched Co-based ribbon strips are widely used in the fields of magnetic amplifier, magnetic head material, magnetic shield, electric reactor, inductance core, sensor core, anti-theft system label, and so on. In this study, Co-based composite CoFeNiSiB ribbon strips with a micron width were fabricated by micro-electro-mechanical systems (MEMS) technology. The carbon and FeCoGa nanofilms were deposited for surface modification. The effect of carbon and FeCoGa nanofilm coatings on the crystal structure, surface morphology, magnetic properties, and magnetoimpedance (MI) effect of composite ribbon strips were systematically investigated. The results show that the surface roughness and coercivity of the composite ribbon strips are minimum at a thickness of the carbon coating of 60 nm. The maximum value of MI effect is 41% at 2 MHz, which is approximately 2.4 times greater than plain ribbon and 1.6 times greater than FeCoGa-coated composite ribbon strip. The addition of a carbon layer provides a conductive path for high frequency currents, which effectively reduces the characteristic frequency of the composite ribbon strip. The FeCoGa coating is able to close the flux path and reduce the coercivity, which, in turn, increases the transverse permeability and improves the MI effect. The findings indicate that a successful combination of carbon layer and magnetostrictive FeCoGa nanofilm layer can improve the MI effect and magnetic field sensitivity of the ribbon strips, demonstrating the potential of the composite strips for local and micro area field sensing applications.
The giant magnetoimpedance effect of multilayered thin films under stress has great application prospects in magnetic sensing, but related studies are rarely reported. Therefore, the giant magnetoimpedance effects in multilayered thin film meanders under different stresses were thoroughly investigated. Firstly, multilayered FeNi/Cu/FeNi thin film meanders with the same thickness were manufactured on polyimide (PI) and polyester (PET) substrates by DC magnetron sputtering and MEMS technology. The characterization of meanders was analyzed by SEM, AFM, XRD, and VSM. The results show that multilayered thin film meanders on flexible substrates also have the advantages of good density, high crystallinity, and excellent soft magnetic properties. Then, we observed the giant magnetoimpedance effect under tensile and compressive stresses. The results show that the application of longitudinal compressive stress increases the transverse anisotropy and enhances the GMI effect of multilayered thin film meanders, while the application of longitudinal tensile stress yields the opposite result. The results provide novel solutions for the fabrication of more stable and flexible giant magnetoimpedance sensors, as well as for the development of stress sensors.
对磁性传感器件的微电子机械系统(MEMS)加工技术以及在生物医学检测方面的应用进行了简单阐述,分析了磁性生物传感技术的工作原理,重点介绍了巨磁阻抗(GMI)、巨磁阻(GMR)和微磁通门传感器的MEMS制备工艺,其中详述了磁性传感器的材料、几何尺寸、结构以及基底对其性能的影响,总结了磁性生物传感器在生物检测中的研究进展,重点阐述了磁性生物传感器在磁性标签、癌症标志物、食源性细菌、病毒以及细胞检测方面的应用.最后,对当前磁性生物传感器在生物医学检测领域面临的问题进行了简要分析,并对磁性生物传感器未来的应用前景进行了展望,以期为研发新一代可用于临床检测磁性生物检测系统打下良好的基础.
Micropatterned Co-based amorphous ribbon meanders were prepared by MEMS technology on the flexible PET substrate. Different holders with varying arch heights were fabricated through 3D printing technology and used for carrying out tensile stresses. The giant magnetoimpedance (GMI) ratio was investigated under different tensile stress inductions (0~88 MPa). The results indicate that the GMI ratio of the flexible ribbon meanders is significantly impacted due to presence of tensile stress. As tensile stress increases, the GMI ratio first increases and then decreases. The maximum GMI ratio of 28.38% is achieved at a tensile stress level of 11 MPa. Additionally, the peak field gradually approaches zero as stress increases. When tensile stress increases from 0 MPa to 88 MPa, the peak field is shifted by 10.59 Oe.