Two Liquid crystal-based reflectarrays that operate at 100 GHz and 125 GHz are presented. The first pro totype (100 GHz) is used to validate the modeling and the design procedure proposed for this class of antenna. Experimental validation of the beam scanning is carried out by measuring the received power in a quasi-optical test bench, which is able to rotate the receiver in the horizontal plane. These results are used to des ign a second prototype antenna (125 GHz) which exhibits 2D beam scanning capabilities with a large bandwidth and scanning range that is sufficient for radar and communications applications.

We have demonstrated a self-aligned process to fabricate organized iron nanowires on a planarized surface with wire dimensions down to 50 nm. Polishing was used to expose an alternating silicon silicon dioxide edge and a dual selective metal deposition process produced the nanowires. The initial selective deposition produced a tungsten layer on the exposed polysilicon regions. The discovery that selective chemical vapor deposition of iron from Fe(CO)(5) precursor on dielectric surfaces over tungsten surfaces is the key factor that enables the self-alignment of the iron nanowires. Dimensions of the wires are determined by the thickness of the thermal oxide. (c) 2007 The Electrochemical Society.

We have demonstrated the ability to fabricate and self-align sub-100 nm iron wires using a combination of silicon nitride spacer technology and selective deposition of iron and tungsten by chemical vapor deposition (CVD). The discovery of selective deposition of CVD iron, from pentacarbonyl [Fe(CO)(5)] precursor, on silicon nitride surfaces over tungsten surfaces is the key factor that allows the self-alignment of iron wires. The density and conductivity of the CVD iron layers improved as the deposition temperature increased. Deposition time of 1 min was sufficient to deposit a perfectly aligned, continuous iron wire. The deposited iron layer shows 100% selectivity. (c) 2006 The Electrochemical Society.