Heteroepitaxial films of aluminum bicrystals grown on silicon provide a model system in which to study plasticity in polycrystalline metal thin films. For the bicrystal films, dislocations are confined to move on two different slip plane orientations because of the orientation of the crystals on the substrate. In-situ transmission electron microscopy (TEM) observations during thermal cycling have shown two threshold temperatures for dislocation motion on cooling. A simple model uses the resolved shear stress on the possible slip planes to explain the TEM observations. Mechanisms responsible for the dislocation behavior are studied in-situ during thermal cycling between room temperature and 450°C with x-ray diffraction. The strains are determined using a sin 2 (Ψ) analysis at each temperature. Direct comparisons are made between the TEM observations, the model and x-ray diffraction results.

A new diffractometer system was designed and built for the G2 experimental station at the Cornell High Energy Synchrotron Source (CHESS). A six-circle κ goniometer, which provides better access to reciprocal space compared to Eulerian cradles, was chosen primarily to perform large angle Bragg diffraction on samples with preferred crystallographic orientations, and can access both horizontal and vertical diffraction planes. A new atmosphere- and temperature-controlled sample stage was designed for thin film thermomechanical experiments. The stage can be operated in ultrahigh vacuum and uses a Be dome x-ray window to provide access to all scattering vectors above a sample’s horizon. A novel design minimizes sample displacements during thermal cycling to less than 160μm over 900°C and the stage is motorized for easy height adjustments, which can be used to compensate for displacements from thermal expansion. A new area detector was built and a new line detector was purchased. Both detectors cover a large region in reciprocal space, providing the ability to measure time-resolved phenomena. A detailed description of the design and technical characteristics is given. Some capabilities of the diffractometer system are illustrated by a strain analysis on a thin metal film and characterization of organic thin films with grazing incidence diffraction. The G2 experimental station, as part of CHESS, is a national user facility and is available to external users by application.

Synchrotron x-ray diffraction experiments were used to study the thermomechanical behavior of individual texture components in passivated Cu thin fdms. Films were deposited to a thickness of 500 nm on SiNx barrier layers on Si substrates and then passivated with SiNx. The fdms were highly textured with grains having (111) or (100) planes parallel to the plane of the film. In-plane film stresses were determined separately in the two texture components as a function of temperature during thermal cycles and also during isothermal holds at 140°C. The results are compared to models of yield behavior and anelastic recovery.