Dislocations introduced by the scratching or by the indentation of the basal and prismatic surfaces of low-ohmic unintentionally n-type doped GaN crystals were investigated by means of cathodoluminescence and transmission electron microscopy (TEM). A strong luminescence of straight segments of a-screw dislocations was observed in the temperature range of 70–420 K. The spectrum of dislocation related luminescence (DRL) consisted of a doublet of narrow lines red shifted by about 0.3 eV with respect to the band gap. TEM revealed dissociated character of the screw dislocations and the formation of extended nodes at their intersection. From the analysis of the DRL spectral doublet temperature, power and strain dependences DRL was ascribed to direct and indirect excitons bound by 1D quantum wells formed by partials and stacking fault (SF) ribbon of dissociated screw dislocation.
We analyzed multi quantum well light emitting diodes, consisting of ten alternating GeSn/Ge-layers, were grown by molecular beam epitaxy on Si. The Ge barriers were 10 nm thick and the GeSn wells were grown with 7% Sn and thicknesses between 6 and 12 nm. Despite the high threading dislocation density of 10 9 to 10 10 cm −2 the electroluminescence spectra measured at 300 and 80 K yield a broad and intensive luminescence band. Deconvolution revealed three major lines produced by the GeSn wells that can be interpreted in terms of quantum confinement. Biaxial compressive strain causes a splitting of light and heavy holes in the GeSn wells. We interpret the three lines to represent two direct lines, formed by transitions with the light and heavy hole band, respectively, andan indirect line.
This paper investigates the influence of different number of laser pulses on contact behavior and conductivity of the surface layer of femtosecond laser microstructured, sulfur-doped silicon. Single shot laser processed silicon (Pink Silicon) is characterized by low surface roughness, whereas five shot laser processed silicon (Grey Silicon) has an elevated sulfur content with a surface roughness low enough to maintain good contacting. To laterally confine the laser induced pn-junction part of the Grey Silicon sample surface is etched off. The etching depth is confirmed to be sufficient to completely remove the active n-type sulfur layer. While Pink Silicon shows little or no lateral conductivity within the laser processed layer, Grey Silicon offers acceptable conductivity, just as expected by the fact of having incorporated a higher sulfur dopant content. Recombination dominates the irradiated regions of Pink Silicon and suppresses excess charge carrier collection. Grey Silicon, while showing sufficient lateral conductivity, still shows regions of lower conductivity, most likely dominated by the laser irradiation-induced formation of dislocations. According to our results, the optimum laser pulse number for electrical and structural properties is expected to be in the range between one and five laser pulses.
Samples of crystalline silicon for use as solar cell material are structured and hyperdoped with sulfur by irradiation with femtosecond laser pulses under a sulfur hexafluoride atmosphere. The sulfur creates energy levels in the silicon band gap, allowing light absorption in the infrared wavelength regime, which offers the potential of a significant efficiency increase. This Black Silicon is a potential candidate for impurity or intermediate band photovoltaics. In this paper we determine the laser processed sulfur energy levels by deep-level transient spectroscopy (DLTS). We present how the number of laser pulses per sample spot influence the sulfur energy levels and hence the DLTS spectra. Further we show that changing the laser pulse by splitting it with a Michelson interferometer setup results in altered absorption which is most likely due to altered sulfur energy levels. This contribution focuses on the possibility of controlling the sulfur in Black Silicon through manipulating the laser pulse shape. As a first step samples of microstructured silicon are fabricated with doubled laser pulses at two different laser pulse distances and the absorption spectra by integrating sphere measurements are compared.
This contribution summarizes recent efforts to apply transmission electron microscopy (TEM) techniques to recombination-active extended defects present in a low density. In order to locate individual defects, electron beam induced current (EBIC) is applied in situ in a focused ion beam (FIB) machine combined with a scanning electron microscope. Using this approach defect densities down to about 10cm-2 are accessible while a target accuracy of better than 50nm is achieved. First applications described here include metal impurity related defects in multicrystalline silicon, recombination and charge collection at NiSi2 platelets, internal gettering of copper by NiSi2 precipitates and site-determination of copper atoms in NiSi2.
Multicrystalline silicon materials for photovoltaic applications inherently contain extended defects like grain boundaries, dislocations, microdefects and in some cases also second phase precipitates due to high concentrations of light elements (carbon, nitrogen or oxygen) and transition metal impurities. The latter are known to reduce the minority carrier lifetime and hence should be removed by gettering during solar cell processing. This paper discusses the influence of extended defects on the spatial distribution of copper- and nickel-related silicide precipitates for a model system containing a small angle grain boundary and in one part silicon oxide pecipitates partly associated with punched-out dislocations. Phosphorus-diffusion gettering under conditions of mostly precipitated metal impurities is discussed in terms of quantitative simulations. It is shown that two regimes can be distinguished where gettering kinetics are either limited by precipitate dissolution or phosphorus in-diffusion. Finally, binding of metal impurities to dislocations is considered and its effect on gettering kinetics is illustrated in terms of gettering simulations.
The electronic properties of present-day multicrystalline silicon (mc-Si) materials for photovoltaic applications are strongly influenced by point defects, their mutual interaction and their interaction with dislocations and grain boundaries. This paper presents results from fundamental investigations of metal impurity interaction with extended defects, namely a small-angle grain boundary and bulk microdefects. It is shown that the distribution of copper suicide precipitates closely follows the density of bulk microdefects indicating the underlying physics of 'good' and 'bad' grains frequently observed in mc-Si. Co-precipitation of copper and nickel in the same samples leads to virtually the same distribution of multi-metal silicide precipitates which according to light-beam induced current measurements show the same recombination activity as single-metal suicide particles. Transmission electron microscopy is used to show that for copper-rich and nickel-rich conditions two types of silicides co-exist, i.e. Cu3Si precipitates containing a small amount of nickel and NiSi2 precipitates containing some copper. Finally, phosphorus-diffusion gettering (PDG) is discussed as the main gettering process used in present-day silicon photovoltaics. Special emphasis is put on the effect of extended defects and their interaction with metal impurities on PDG kinetics. It is shown that different limiting processes will be simultaneously operative in mc-Si as a result of inhomogeneous bulk defect distributions. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
This paper reports on the localisation of extended defects related to the co-precipitation of transition metal impurities in silicon and their preparation for subsequent analysis using techniques of transmission electron microscopy (TEM). Two approaches are described, i.e. (i) localisation of recombination-active defects by light-beam induced current followed by preferential chemical etching and TEM sample preparation using focused-ion beam (FIB), and (ii) the replacement of the chemical etching by in situ Ga+ irradiation in the FIB system. The former technique is successfully applied to copper-rich precipitate colonies in silicon whereas the latter proofs to be the superior approach for nickel-rich particles. Structural and chemical analyses using TEM techniques are described for both cases. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
We report on a light-beam-induced current (LBIC)-analysis of metal silicide defects arising from co-precipitation of copper and nickel in Cz-silicon-bicrystals produced by wafer direct bonding. Large colonies of silicide precipitates in the one wafer emerging from undisturbed growth from few nucleation sites were observed in different orientations with respect to the surface which correspond to Si {110} planes. From this, the colonies formed during copper-nickel co-precipitation reveal the same attributes as those colonies typical for copper precipitation in the absence of nickel. Oxygen related defects associated with a higher defect distribution in the other wafer were characterized by means of high resolution Transmission Electron Microscopy (TEM) and their temperature dependent LBIC signal.
Co-precipitation of copper and nickel in silicon bicrystals produced by wafer-bonding has been investigated. Transmission electron microscopy and energy-dispersive X-ray analysis show two types of precipitates: copper-rich silicide particles that contain a small partial mole fraction of 5% of nickel and nickel-rich particles containing a partial mole fraction between 15% and 25% of copper. Both types of precipitates are found inside large precipitate colonies typical for copper precipitation in silicon in the absence of nickel co-doping. Thermodynamically these precipitates can be assigned to the known binary metal silicide phases Cu3Si and NiSi2 and a solid solution of a second metal species therein.
We report temperature-dependent LBIC-measurements on copper–nickel co-diffused Czochralski-silicon bicrystals focussing on the distribution and the recombination properties of the metal-precipitated defects. The samples had been hydrophobically wafer-bonded from two n-type materials with slightly different doping concentration and thermal history. LBIC analyses in cross-section geometry reveal substantially different spatial distributions of metal-related precipitates between the two crystals. This behaviour is explained by oxygen-related microdefects present in one wafer, acting as efficient nucleation sites. A precipitate-free zone was found below the surface but not beneath the bonding interface. At isolated colonies LBIC contrasts in the range of 50% have been observed indicating strong carrier recombination at such defects.