The effect of the condensation temperature and ion-beam treatment alternating with high-frequency magnetron sputtering on the structure and optical properties of thin titanium-oxide films is studied. The films have homogeneous compositions and granular structures; ion-beam treatment changes the grain shape from elongated to rounded. The X-ray diffraction studies show that the phase composition of the films is represented by two modifications of titanium oxide: rutile and anatase. It is found that the increase in the condensation temperature and the intensity of ion-beam treatment influences the film phase composition and their refractive indices. At a low condensation temperature, the dominant phase is rutile; as the condensation temperature increases, the anatase phase forms. An increase in the current density of ion-beam treatment leads to a decrease in the anatase fraction. The decrease in the refractive index of the titanium-oxide films with an increase in the condensation temperature is related to the formation of the anatase phase. Ion-beam treatment also decreases the band-gap width from 3.40 to 3.30 eV.

The effect of accompanying ion-beam treatment on the structure and properties of SnO 2 films synthesized by the method of high-frequency magnetron sputtering at room temperature and at 200°C is investigated. It is established that ion-beam processing does not affect the transparency and the band gap of the obtained tin-oxide films. The refractive index and resistivity change. At room temperature, the films are X‑ray amorphous, and at 200°C they are polycrystalline. X-ray diffraction and electron diffraction studies show the presence of a single phase of SnO 2 . Ion-beam treatment leads to a change in the preferred orientation of the crystallites. With increasing current of ion-beam processing, the grain sizes decrease.

The effect of ion-beam processing alternating with magnetron sputtering on the properties of zinc-oxide thin films is investigated. It is shown that ion-beam processing reduces the growth rate, coherent-scattering-region sizes, and the resistivity. The stoichiometric index, band gap, and refractive index increase. The transparency of the films in the weak absorption region remains unchanged.

The effect of ion-beam treatment, alternating with the magnetron sputtering process, on the properties zinc oxide of thin films is considered. Ion-beam treatment causes a decrease in the growth rate, the size of the coherent scattering regions and resistivity. The stoichiometric index, the band gap and the refractive index increase. The transparency of the films in the area of weak absorption does not change.

Исследование свойств наноструктур ZnSe

Experimental data for the synthesis of ZnSe/Al2O3 nanostructures utilizing a technology widely used in integrated circuit (IC) production are reported. It has been shown that the refractive index and size of the coherent scattering domains grow, whereas the energy bandgap decreases, with an increase in ZnSe width. It has been supposed that samples with a ZnSe width of 9 Å contain a ZnSeO3 compound and/or ZnSe ⋅ Al2O3 complex compound. Multilayer heterostructures with a ZnSe width more than 9 Å contain cubic ZnSe nanocrystallites.

Получение и исследование слоистых нанокомпозитов сульфид (селенид) цинка/диэлектрик

The effect of the condensation temperature on the growth rate, structure, and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering is studied. As the deposition temperature is increased, the film thickness decreases. Polycrystalline zinc-selenide films consist of a mixture of cubic and hexagonal phases, of which the cubic phase is dominant. A correlation between the refractive index and the crystallite size is shown.

Исследовано влияние температуры конденсации на скорость роста, структуру и оптические свойства полученных ВЧ магнетронным распылением пленок селенида цинка. С увеличением температуры осаждения толщина пленок уменьшается. Поликристаллические пленки селенида цинка состоят из смеси кубической и гексагональной фаз с преобладанием кубической фазы. Показана корреляция величины показателя преломления и размеров кристаллитов. DOI: 10.21883/FTP.2017.06.44567.8455

Layered ZnS/SiO2, ZnS/Al2O3, and ZnSe/SiO2 nanocomposites have been studied. It has been shown that the use of the Maxwell–Garnett and Bruggeman models, as well as the Luyengi formula, in the low dispersion region makes it possible to predict the production of films with a given effective refractive index. Calculated values of the refractive index correlate well with experimental data. The maximal discrepancy between the theoretical and experimental values of the refractive index and the maximal value of the depolarization factor depend on the structure and microstrains.

Structure and optical properties of ZnSe/SiO2 layered nanocomposites obtained using microwave magnetron sputtering have been studied. The nanocomposites are X-ray amorphous at relatively small thicknesses of the zinc selenide layers. When the thickness of the zinc selenide layers exceeds 20 Å, ZnSe/SiO2 films contain SiO2 amorphous phase and zinc selenide cubic nanocrystallites. It has been demonstrated that the thickness of zinc selenide layers affects the microstresses, refractive index, and band gap.

The ZnSe/Al2O3 nanocomposite films synthesized by laser evaporation followed by heat treatment are studied. X-ray diffraction and electron-microscopic investigations of the as-deposited films demonstrate the presence of ZnSe crystallites in an Al2O3 amorphous matrix. Annealing changes the structures of ZnSe and Al2O3, increases the ZnSe crystallite size, and causes the appearance of the ZnSeO4 phase. The presence of aluminum oxide layers decreases the phase transformation temperature of zinc selenide.

The results of studying the growth of a ZnS–SiO 2 nanocomposite film by discrete thermal evaporation at lowered condensation temperatures using an ultrahigh-vacuum setup are presented. It is shown that ZnS–SiO 2 nanocomposite films contain an amorphous SiO 2 matrix and zinc-sulfide ZnS nanocrystals. The nanocrystallite shape and sizes depend on the condensation temperature.

Transparent conductive tin-doped indium-oxide films are produced by alternate processes of reactive high-frequency magnetron sputtering and ion treatment. The stressed states of the indium-tinoxide (ITO) films are studied by X-ray diffraction analysis. The effect of the technological conditions on changes in mactostresses in the ITO films is shown.

Исследовалось влияние температуры конденсации на структуру и оптические свойства пленок ZnS и ZnSe. Выявлено наличие гексагональной фазы наряду с кубической в пленках, осажденных на сколы поваренной соли. Появление гексагональной фазы объясняется механическими напряжениями, возникающими на границе раздела пленка–подложка.

Variations in the properties of Indium-Tin-Oxide (ITO) films grown by reactive HF (high-frequency) magnetron deposition with simultaneous ion treatment are studied depending on the ion-treatment current and substrate temperature. Ion treatment of the growing film during deposition insignificantly changes the relative content of tin and indium, but significantly increases the conductivity. Films obtained at a temperature below 50°C without ion treatment are X-ray amorphous. Ion treatment and an increase in the condensation temperature lead to film crystallization and a shift of the optical absorption edge to short wave-lengths. An increase in the ion-treatment current causes texture formation.

A variation in the properties of indium-tin-oxide (ITO) films obtained by the method of reactive magnetron sputtering with simultaneous ion treatment is reported. The ITO films feature the following parameters in the optical range of 450–1100 nm: a transmission coefficient of 80%, band gap of 3.50–3.60 eV, and a refractive index of 1.97–2.06. All characteristics of the films depend on the ion-treatment current. The latter, during the course of deposition, reduces the resistivity of the ITO films with the smallest value of the resistivity being equal to 2 × 10 −3 Ω cm. The degradation of films with a high resistivity when kept in air is observed.

The influence of the condensation temperature on the structure and optical properties of ZnS and ZnSe films is studied. The presence of the hexagonal phase, along with the cubic, is revealed in films deposited on the cleaved NaCl facet. The appearance of the hexagonal phase is explained by the mechanical stress produced at the film-substrate interface.

Transparent conductive films of indium oxide doped with tin have been obtained by the reactive RF-magnetron sputtering method with ion treatment of the specimen during film condensation. Ion treatment of the oxide surface during the sputtering process leads to the formation of a preferred crystallite orientation, a decrease in the size of the coherent reflection areas and an increase in the optical transparency window.