A modified version of x-ray photoelectron spectroscopy (XPS) is proposed for analysis of the phase chemical composition of substances. In contrast to the well-known XPS method of Siegbahn, the proposed version is standardless and permits determination of the chemical composition of complex multiphase compounds with high accuracy and reliability. In addition to the chemical composition, the method yields the core-level binding energies of atoms in the chemical phases of a studied compound, which have had to be determined in separate experiments on reference samples. The main idea underlying the proposed approach consists in self-consistent unfolding of photoelectron lines of two or more elements. The binding energies act as fitting parameters in this decomposition. The requirement that the contents of like chemical phases derived from the decomposition of spectra of two or more elements be identical makes the solution of the problem unique. This method was used to study the chemical composition of nanofilms of the InP plasma oxide containing several chemical phases. It is shown that, in order to improve the quality of a film and of the interface, the oxidizable surface should be enriched by phosphorus.

Chlorine-induced restructuring processes on Cu/Si(111) ``5\ifmmode\times\else\texttimes\fi{}5'' surfaces were studied with Auger electron spectroscopy and scanning tunneling microscopy techniques. The copper Auger signal intensities from these surfaces (each with different chlorine exposures and subsequent 450 \ifmmode^\circ\else\textdegree\fi{}C annealing), decreased with increasing initial chlorine exposures. At a Cl-coverage equal to \ensuremath{\sim}1 ML (after annealing) the Cu signal decreased below the detection limit. The associated restructuring processes were also explored. Initially homogeneous Cu/Si(111) ``5\ifmmode\times\else\texttimes\fi{}5'' surfaces, with Cl-exposures and annealing, separate into coexisting areas of Cu-free Cl/Si(111) 1\ifmmode\times\else\texttimes\fi{}1 and nearly chlorine-free areas of Cu/Si(111) ``5\ifmmode\times\else\texttimes\fi{}5.'' The original copper density is conserved by formation of three-dimensional ${\mathrm{Cu}}_{3}\mathrm{Si}$ crystallites on the surface. The restructuring is completely reversible; upon desorption of all chlorine at \ensuremath{\sim}600 \ifmmode^\circ\else\textdegree\fi{}C the surface resumes its original Cu/Si(111) ``5\ifmmode\times\else\texttimes\fi{}5'' structure. Possible implications for the atomic scale mechanisms in the direct synthesis of methylchlorosilanes from Cu/Si surfaces are discussed.

The chemical composition of thin copper oxide films was studied by X-ray photoelectron spectroscopy (XPS). The films were obtained by magnetron sputtering of copper metal, which was simultaneously oxidized by atomic oxygen. It was demonstrated that a high rate of oxidation in molecular oxygen is achieved only under relatively low rates of film growth ( v <100 Å/min). However, the growth rate of cupric oxide can be drastically increased to v >750 Å/min in a flow of accelerated oxygen atoms. High growth rates are necessary to substantially cut the thermal budget and reduce the diffuseness of heterofunctions in fabricating layered structures containing copper oxide.

a continuous compactly supported function u £ Co(i!) we set (Pu)(x,y) = / u(£,r7)ds = J-,(x,y) g(x,y), where ds is the Euclidean element of length on the curve 7. It is required to recover the function u from the function Pu, defined in Ω. In [1] there is a proof that the solution of the equation Pu = g is unique in the class of continuous functions with support in the upper half-plane. By continuity we extend the operator Ρ to the space Li(Cl) of functions integrable in the strip Ω. Following the method presented in [2], we prove the following theorem.

The concentration and chemical state of copper in the subsurface region of Cu/SiO 2 composite films obtained by simultaneous magnetron sputtering from two sources (Cu and SiO 2 ) are determined by x-ray photoelectron spectroscopy (XPS). It is established that copper in the as-grown film is primarily in the form of unoxidized atoms dispersed in a SiO 2 matrix. Annealing of the film results in practically no oxidation, but about 70% of the copper atoms condense into metallic clusters with sizes below 10 Å in the subsurface region and about 50 Å in the bulk of the film. The changes in the binding energy of core electrons, and especially in the energies of Auger electrons, are so large in this situation that photoelectron and Auger spectroscopy are efficient methods for monitoring the chemical state of this composite material.

where 0 £ S 7 1 " 1 is the directing vector of the line along which the integration is performed, Eox = χ — (χ,θ)θ is the projection of a point χ £ IR on the orthogonal complement of θ ((x,y) denotes the inner product of vectors χ and y), and the absorption coefficient μ = μ(β) depends only on the direction and is a continuous function o n S " " 1 . Transforms of this type are encountered in problems of computerized emission tomography [1]. Methods have been proposed for inverting the exponential ray transform in the case of constant absorption μ Ξ const ([l]-[6]). The exponential ray transform with absorption coefficient dependent on the direction was considered on the plane in [7], and an inversion formula was obtained. In all these papers it is assumed that the function Qμf is known on the manifold Λ of all lines in R. Included in the problem of inversion from incomplete data is the problem of recovering / from values of Qμf known only for a certain η-dimensional submanifold of Λ called a complex of lines. V. P. Palamodov has conjectured that there is a formula for inverting Qμf for the complex of lines intersecting at infinity a fixed infinitely distant curve L C R P n ~ l that intersects each hyperplane Η C M. He solved this problem in three-dimensional space. Let C C S n 1 be a centrally symmetric curve, and let 0 = 0(s), 0 < s < 2S, be a parametrization of it with s the natural parameter. Then 0(s) = -0(5 + s) for s £ [0,5], and 0(0) = 0(25). We assume that μ £ C 1 (S n ~ 1 ) , μ(0) = μ(—0), and the transform Qμf is known only for 0 £ C. We consider the problem of recovering a function / £ C£°(IR) from these data. Let

where θ = (0i,02) e S , θ = (-Θ2,θι) eS 1 is a vector orthogonal to 8 , i e l , and the absorption coefficient μ Ξ const > 0. Transforms of this type can be found in problems of computerized emission tomography [1]. The inversion formula for the exponential radial transformation was obtained in [2], [3]. The publications [1] and [4] also considered questions connected with the inversion of this transformation. In [5] a description of the image of ζ)μ is given on the space of smooth functions of compact support. As a rule, in applications the function ζ)μ/ is known only for θ belonging to some subset of S. In this case we speak of an incomplete angular range. In this paper we consider the problem of reconstructing the original function even in such a situation. The publications [6], [7] contain a solution of the problem of inversion of the classical Radon transformation (μ = 0) from data incomplete in an angular range, based on application of an interpolation formula for entire functions of exponential type, and it is shown there that the method applied to the solution of the problem in question possesses optimal stability in relation to the amplification of random errors in the data. In the following theorem we obtain a formula for interpolating values of an entire function of exponential type, given on a curve Γ c C, to the whole of C (see [6]). Let Γ be the union of two unbounded curves Γ ' and Γ" with the initial points at the points λ\ and λ2, respectively. We define the orientation of Γ by motion on each of its components from the initial point to the point at infinity. We denote by h the Fourier transform of h.

Ellipsometry and XPS investigations of RF plasma grown native oxide and C-V measurements of its interface were performed. Strong dependence of the composition of the plasma grown native oxides and electric properties of MIS structures on the time of plasma treatment has been observed. The greater the content of stable polyphosphate phase of [InxPyOz] is in the native oxide composition, the better parameters of its interface with InP (Nss<1011 cm−2 eV−1 and the hysteresis of C-V characteristics<0.2 V) and the lesser C-V drift after treatment may be achieved. Plasma oxidation results in creating a negative effective oxide charge density.