The EELS spectrum provides a wealth of information regarding the elemental, chemical and physical state of the material under investigation with typically nanometre resolution. When coupled with the STEM Spectrum-Imaging mode of acquisition, this information can be spatially resolved allowing properties to be calculated as two dimensional maps [1]. The ability to do this in a fast, automated manner has resulted in the EELS STEM-SI technique to become the method of choice for high resolution microanalysis in the transmission electron microscope. However, information acquired in this way is always projected in the direction parallel to the electron beam.
Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008