Ni,Zn-ferrite (NZF) thin films are of interest for high frequency applications because of their high saturation magnetization compared to garnet films and their low eddy current losses compared to metal alloy films. Therefore there is an increasing need for methods to deposit single crystal ferrite thin films for incorporation into next generation microwave devices. Epitaxial thin films of NZF have been deposited by liquid delivery metal-organic chemical vapor deposition onto (100) oriented MgO substrates. The morphology, orientation and magnetic properties of the as-deposited films were investigated as a function of deposition temperature and pressure. X-ray diffraction (XRD) reveals highly oriented films with a film strain of 1.01% compared to bulk lattice parameters. Films with well saturated magnetic hysteresis were obtained under a number of conditions with values of saturation magnetization up to 270 emu/cc (3400 gauss) with relatively low coercive fields ~100 Oe. The influence of metal cation ratio on magnetic properties is discussed.

An automated dual ion beam sputter deposition system has been developed, in which individual targets of Y, Cu, and BaF2 are sequentially sputtered to produce Y-Ba-Cu-O films with controlled composition. The dwell time of the ion beam on each target is determined by a computer controlled feedback loop using the signal of a quartz crystal resonator. Each individual target is exposed to the ion beam at the same spatial location, which optimizes compositional and thickness homogeneity across the substrate surface. As deposited superconducting Y-Ba-Cu-O films have been successfully grown at temperatures in the range 700–720°C using either an oxygen ion beam or an ozone jet directed at the substrate. Oxygenation effects by the two sources on film stoichiometry and microstructure are discussed.