Acoustic droplet ejection (ADE) has become the preferred method for liquid transfer in a variety of applications including synthetic biology, genotyping and drug discovery. Comparing with traditional pipetting techniques, the accuracy and data reproducibility of ADE based liquid transfer are improved, waste and cost are reduced, and cross-contamination is eliminated. The key component in the ADE system is the ultrasound transducer, which is responsible for generating focused ultrasound beam for droplet ejection. However, current ADE systems commonly utilize a single-element focused transducer with a fixed focal length that require mechanical movement to focus on the liquid surface, resulting in reduced liquid transfer efficiency. In this study, we first present a high-frequency annular array transducer for the ADE technology, which enables rapid and dynamic axial focusing to the liquid surface without mechanically moving the transducer, thereby accelerating liquid transfer. Experimental results show that the proposed 10 MHz, 5-element annular array transducer has good dynamic axial focusing ability, and can achieve accurate and stable droplet ejection of nanoliter volume at the designed focal length of 26-32 mm. Our results highlight the potential of the annular array transducer in advancing ADE system for rapid liquid transfer. This technology is expected to be useful in a variety of applications where precise and high-throughput liquid transfer is crucial.

A quasi-static multi-degree-of-freedom piezoelectric MEMS micromirror with large mirror plate and high fill factor based on AlScN is presented. It consists of two individual components, namely the mirror plate and the actuator. They are fabricated separately and vertically assembled together to form the final combination. In current case, a square mirror plate with side length of 5 mm is used. The actuator is designed into a gimbal-less structure, which involves a central connection platform with a mounting hole and four groups of piezoelectric actuators that are connected to the platform's corners via serpentine springs. This configuration provides multi-degree-of-freedom driving capabilities, allowing tip-tilt-piston mirror movement. The piezoelectric actuator is composed of three-stage cantilever-type actuation units that are connected in series, and they are intentionally arranged into S-shape so as to be completely hidden beneath the mirror plate. Moreover, the driving performance is further improved by optimizing the electrode coverage region on each actuation unit. As a result, not only large displacement but also nearly 100 % fill factor as well as high optical utilization efficiency can be achieved. From experimental results, the as-fabricated MEMS micromirror demonstrates static mechanical tilt angles of approximately +/- 2.2 degrees about two orthogonal axes and piston vertical movement of +/- 54.9 mu m within +/- 50 V-DC driving voltage range with excellent linearity. Given the large mirror size, high fill factor and multi-degree-of-freedom motion advantages, the proposed micromirror could be found application perspective in light field shaping, free space optical communication and projection lithography areas.

To improve the performance of the Piezoelectric Micromachined Ultrasonic Transducer (PMUT) based rangefinder and decrease its stress sensitivity, a novel design with quasi-closed structure is proposed. It adopts a circular piezoelectric composite diaphragm structure with clamped boundary, in which all the deposited stack layers in its central region are intentionally removed and additional cross-slits are created into the remaining silicon device layer. Due to the reduced mass and the enhanced thermal-viscous damping at slits, a 35.2 % decrease in quality factor Q has been achieved in the proposed PMUT when compared with the conventional design, resulting in a distinctly reduced blind area from 231.3 mm to 170.7 mm. At the same time, the proposed quasi-closed PMUT facilitates the release of accumulated stress in the device structure during fabrication and operation. As a result, an approximate 50 % reduction in frequency deviation between different as-fabricated PMUTs across the same wafer has been successfully obtained. Moreover, due to the increased linear operation range, the developed bare PMUT chip demonstrates a maximum detection distance of 3 m at the operation frequency of 71.5 kHz under 40 V pp driving voltage. Given the advantages of lower Q , insensitivity to stress, good fabrication consistency and large linear operation range, the proposed quasi-closed PMUT design can well address the requirements on small blind area and large detection range for distance sensing applications.

To address the serious acoustic performance deterioration induced by air leakage in the low-frequency range and the asynchronous vibration in electroacoustic transduction structures near the resonant frequency, a novel sealing strategy is proposed that targets one of the most widely reported piezoelectric MEMS speaker designs. This design consists of multiple cantilever beams, in which the air gaps between cantilevers are automatically and selectively filled with liquid polydimethylsiloxane (PDMS) via the capillary effect, followed by curing. In the proof-of-concept demonstration, the sound pressure level (SPL) within the frequency range lower than 100 Hz markedly increased after sealing in an experiment using an IEC ear simulator. Specifically, the SPL is increased by 4.9 dB at 20 Hz for a 40 Vpp driving voltage. Moreover, the deteriorated SPL response near the resonant frequencies of the cantilever beams (18 kHz–19 kHz) caused by their asynchronous vibration induced by the fabrication process nonuniformity also significantly improved, which successfully increased the SPL to approximately 17.5 dB. Moreover, sealed devices feature nearly the same SPL response as the initial counterpart in the frequency band from 100 Hz to 16 kHz and a total harmonic distortion (THD) of 0.728% at 1 kHz for a 40 Vpp driving voltage. Compared with existing sealing methods, the current approach offers easy operation, low damage risk, excellent repeatability/reliability and excellent robustness advantages and provides a promising technical solution for MEMS acoustic devices.

All-optical ultrasound probes with fully integrated ultrasound generation and detection functions demonstrate some unique advantages over traditional electroacoustic counterparts. However, due to the lack of an effective solution, the most commonly used method is to assemble two separate functional optical fibers together for ultrasound generation and detection, respectively. In this Letter, an innovative strategy, to the best of our knowledge, is developed to integrate the photoacoustic effect based ultrasound generation and the Fabry-Pérot (FP) interference based ultrasound detection structures together at the end of a single double clad optical fiber (DCF), so as to make a compact forward-viewing ultrasound self-transceiving probe (1-mm diameter). From the experiment results, the as-fabricated probe can generate an ultrasound signal with an amplitude of 2.36 MPa at 2.25 mm in the transmitting mode, and its peak frequency and -6-dB bandwidth are measured to be 10.64 MHz and 22.93 MHz, respectively. When being operated under the receiving mode, the probe has a detection sensitivity of 208.4 mV/MPa for ultrasound signals with the peak frequency of 8.24 MHz, and the noise equivalent pressure (NEP) is 76.8 kPa. In addition, the forward-viewing format ultrasound self-transceiving experiment is also performed and the pulse-echo signal varying with the transmission distance is successfully captured for the first time.

Laser-generated focused ultrasound (LGFU) has been attracting great interest due to its great potential in high-resolution ultrasound imaging and high-precision therapy. However, the existing methods suffer from distinct issues such as complicated film coating control, difficult technical transfer toward device miniaturization, and limited output acoustic pressure as well as operation condition. In order to explore an effective solution for LGFU working under more universal excitation conditions with a single nanosecond pulsed laser, a new strategy based on directly patterning the flat photoacoustic (PA) source is developed in this paper. For proof of concept demonstration, a planar PA transmitter is constructed using a chromium mask with transparent rings as the substrate. Considering the broadband nature of the generated PA signal, the effects of the ring structure on focusing characteristics are explored experimentally for the first time. Besides, its capability to provide a X-wave like focused acoustic field with output pressure at MPa level and a small lateral size of several hundred micrometers yet large focal depth of a few centimeters has been successfully demonstrated, which would benefit applications requiring large ultrasound working distance. Based on the same concept, various methods can also be involved to increase its adaptability and applicability further.

An AlN-based piezoelectric micro-electromechanical system (MEMS) continuous membrane deformable mirror (DM) prototype is presented for the first time. Its effective aperture diameter is 5 mm and it is equipped with 25 independently controlled actuators. Owing to the advantages associated with the AlN piezoelectric thin-film technology, attractive characteristics including CMOS compatible fabrication, bidirectional linear and negligible hysteresis actuation, and excellent linear superposition control capability have been successfully demonstrated. Moreover, good optical aberration correction performance is also validated via the surface contour fitting experiment to the Zernike polynomials up to the first 14 orders despite the non-optimized device structure design, representing great application perspective.

In this paper, a new tuning strategy is proposed by incorporating a pneumatically actuated metamaterial to achieve on-demand polarization manipulation at THz frequencies. Through controlling the actuation pressure, the device function can be flexibly switched among three types of polarization conversion capabilities within the same operation frequency band, from 1.3 THz to 1.5 THz, in which the mutual conversion between linear polarization and circular polarization, such as a quarter-wave plate, and handedness inversion between circular polarizations as a helicity inverter as well as a helicity keeper, have been successfully achieved between the incidence and reflection. Moreover, the intrinsic tuning mechanism for the polarization manipulation is also discussed.

Photoacoustic (PA) transducers are an attractive method of producing high-amplitude, high-frequency, broad-bandwidth ultrasound signals with excellent immunity to electromagnetic interference, when compared with their traditional electroacoustic counterparts. However, the lack of effective control over the spatial sound field prohibits PA transducer technology from further widespread application. This paper presents the first, to the best of our knowledge, experimental study on the dynamic spatial ultrasound modulation strategy for the use of PA transducers, in which a novel PA transducer element is designed. This consists of a suspended compound PA conversion film, whose backing condition can be switched between air and glass through pneumatic actuation to create destructive and constructive acoustic wave interference, respectively. As a result, nearly an order of magnitude contrast in the output acoustic amplitude can be obtained by switching the device’s backing condition given the same laser excitation, thus achieving a binary amplitude tuning. Furthermore, a linear PA transducer array consisting of three independently controllable elements is used for a proof-of-concept demonstration of the dynamic spatial sound field manipulation. To the best of the authors’ knowledge, this is the first time that such a unique capability has been successfully applied to PA transducer technology.

Aiming to provide dynamically adjustable acoustic field for in vivo ultrasound application scenarios, a miniaturized optical fiber photoacoustic (PA) transmitter is presented. Different from the existing laser generated focused ultrasound probes with fixed acoustic focal length, its focus can be continuously adjusted from infinity to 2.166 mm by deforming the PA conversion film using pneumatic actuation method. The PA film is designed into a circular suspending elastic membrane structure with clamped boundary, which consists of a PDMS/candle soot nanoparticles (CSNPs) mixture layer sandwiched between two pure poly-dimethylsiloxane (PDMS) layers. Using soft lithography strategy, the PA film together with a structured PDMS substrate and a multimode fiber (MMF) are assembled together to construct the final PA probe with 2.68 mm aperture. For a proof-of-concept demonstration, three different focusing statuses (with 5.196 mm, 3.246 mm and 2.166 mm focal lengths) are provided and their axial acoustic field distributions are characterized as well. Under the excitation condition with the laser fluence of 13.26 mJ/cm(2), acoustic signal with 9 MHz center frequency, 92.91% fractional bandwidth at - 6 dB and peak negative pressure (PNP) amplitude up to 8.91 MPa at the 2.166 mm focal point can be achieved, resulting in mechanical index (MI) of 2.97. Referring to the reported data, the current PA transmitter probe demonstrates excellent application potential. (C) 2021 Elsevier B.V. All rights reserved.

Aiming to pursue an ultrasound signal with a significantly improved negative acoustic pressure level, which is one of the critical characteristics for exciting the ultrasound cavitation effect, a real applicable air-backed photoacoustic transmitter is presented. Different from the conventional solution of relying on a complicated focusing structure design, it works based on an acoustic signal phase reversal and amplitude superposition strategy. By using an innovative sandwich-like suspending photoacoustic layer with optimized structure design, the initial backward-propagating positive sound pressure can be converted into the forward-propagating negative one efficiently. For proof-of-concept demonstration, photoacoustic transmitter prototypes adopting a polydimethylsiloxane (PDMS)/candle soot nanoparticle/PDMS-PDMS composite as a photoacoustic conversion layer were fabricated and characterized. From experiment results, an acoustic signal with a remarkable ratio of negative pressure level to a positive one of 1.3 was successfully realized, which is the largest value ever reported, to the best of our knowledge. Moreover, when compared to the commonly used glass and PDMS-backing conditions in the photoacoustic area, nearly 200% and 400% enhancements in negative pressure output were achieved, respectively.