铂(Pt)薄膜电阻具有体积小、结构简单、电阻温度系数(TCR)高和响应速度快的优点,结合MEMS技术可以实现发动机叶片温度的检测,但纯Pt与衬底之间的结合力较差,易导致薄膜失效.采用磁控溅射分别制备了氧化铂(PtxOy)和钛(Ti)过渡层的Pt薄膜电阻,分析了不同过渡层在不同温度(800,900,1000℃)下退火的微观形貌和电学性能,并分别测试了2种Pt电阻在900℃和1000℃下的稳定性.结果表明:1000℃退火的Pt/PtxOy薄膜电阻的TCR值最大,达到了3434×10-6/℃,Pt/PtxOy薄膜电阻的电学性能优于Pt/Ti薄膜电阻,综合分析,900℃退火的Pt/PtxOy薄膜电阻性能最优.

The ability to monitor the accurate heat flux distribution on turbine blade could allow better running status and fault diagnosis for aero engines. However, the heat flux sensors currently can not endure the extreme high temperature with low sensitivity. A novel thin film heat flux sensor (TFHFS) with the sandwich structure was designed and fabricated in this work. The sensor was calibrated with heat flux up to 110 kW/ $\text{m}^{{2}}$ . The sensor contained 19 pairs of Pt/Pt-13Rh thermocouples sandwiched between two thermal resistance layers. The sandwich structure can improve the temperature gradients between hot and cold junctions, and the sensitivity of the sensor is $1.15\times 10^{-{5}}$ V/(kW/ $\text{m}^{{2}}$ ). The sensor survived after a prolonged thermal cycling for 3 h at 1000 °C. It turns out that the TFHFS with sandwich structure shows high sensitivity and can operate up to 1000 °C, proving that the sensor can measure heat flux at high temperature.

The complex internal structure of the aero-engine and the high-temperature, high-pressure, and high-speed airflow make it difficult to measure the internal temperature. Indium tin oxide (ITO) and In2O3 films have been studied for their application in high-temperature thermocouples and strain gauges. Due to their large Seebeck coefficient and high-temperature stability, ceramic thin-film thermocouples are expected to be used at high-temperature measure. In this paper, ITO-In2O3 thermocouples were fabricated by magnetron sputtering. Besides, the electrical properties of the air-annealed and two-step nitrogen-annealed thermocouples were compared, including the repeatability of thermoelectric response after multiple thermal cycles and the drift rate during the high-temperature duration. The microstructure and electrical conductivity of both the as-deposited and post-annealed ceramic thin films were tested respectively. The result shows that the resitivity and See-beck coefficient of the thin films annealed in nitrogen is reduced, but the stability at high temperature is greatly improved.

Influences of annealing temperature on microstructure, electrical properties, stability, and film adhesion of Pt thin film resistors with Ti interlayer and Pt x O y interlayer were investigated and compared. Pt thin films were deposited on Al 2 O 3 substrates with Ti interlayer and Pt x O y interlayer, respectively. Two resistors showed different microstructures after annealing. Pt/Pt x O y film resistor owed more stable resistance value and larger temperature coefficient of resistance (TCR) than those of Pt/Ti film resistor. Annealed Pt/Ti film resistor exhibited poor stability than Pt/Pt x O y film resistor and the stability became worse with increasing annealing temperature. In addition, the film adhesion of two resistors was discussed.

The working principle of the triboelectric nanogenerator (TENG), contact electrification and electrostatic induction, has been used to harvest raindrop energy in recent years. However, the existing research is mainly concentrated on solid-liquid electrification, and adopts traditional electrostatic induction (TEI) for output. As a result, the efficiency of droplet electricity generators (DEGs) is severely constrained. Therefore, previous studies deem that the DEG output is limited by interfacial effects. This study reveals that this view is inappropriate and, in reality, the output strategy is the key bottleneck restricting the DEG performance. Here, a switch effect based on an electric-double-layer capacitor (EDLC) is introduced, and an equivalent circuit model is established to understand its working mechanism. Without pre-charging, a single droplet can generate high voltage over 100 V and the output is directly improved by two-orders of magnitude compared with TEI, which is precisely utilizing the interfacial effect. This work provides insightful perspective and lays solid foundation for DEG applications in large scale.