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Chun-Wen Cheng received the M.S. degree in mechanical engineering from National Chiao Tung University in 1993 and the Ph.D. degree in mechanical engineering from National Tsing Hua University. After experiences on different semi-conductor technologies, including DRAM, embedded memory, and 90/65-nm CMOS platform, he has been with the MEMS industry as the Fab Director of MEMS Foundry since 2005. With understanding on the gap between MEMS design and manufacturing, he joined the Taiwan Semiconductor Manufacturing Company MEMS Team in 2008 to facilitate CMOS-MEMS integration. He successfully delivered various MEMS products. As the Deputy Director of the Taiwan Semiconductor Manufacturing Company MEMS Department, he has been granted over 45 patents and spends effort on plan and execution for new MEMS manufacturing technology.
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论文共 17 篇作者统计合作学者相似作者
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mag(2015)
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Carlos Duarte-Guevara, Fei-Lung Lai,Chun-Wen Cheng,Bobby Reddy,Eric Salm,Vikhram Swaminathan, Ying-Kit Tsui,Hsiao Chin Tuan,Alex Kalnitsky,Yi-Shao Liu,Rashid Bashir
ANALYTICAL CHEMISTRYno. 16 (2014): 8359-8367
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