Geun-Young Yeoma关注立即认领分享关注立即认领分享基本信息浏览量:2职业迁徙个人简介暂无内容研究兴趣论文共 3 篇作者统计合作学者相似作者按年份排序按引用量排序主题筛选期刊级别筛选合作者筛选合作机构筛选时间引用量主题期刊级别合作者合作机构Etch characteristics of SrBi Ta O ( SBT ) thin films using magnetized 2 2 9 inductively coupled plasmasYoung-Joon Lee,Chang-Hyun Jeong,Jeong-Woon Bae, In-Kyu You,Jong-Wan Park,Geun-Young Yeomasemanticscholar(2001)引用0浏览0引用00Study of shallow silicon trench etch process using planar inductively coupled plasmasJu-Hoon Lee,Geun-Young Yeoma,Ju-Wook Lee,Jung-Yong LeeJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS(1997)引用30浏览0引用300Physical damage and contamination by magnetized inductively coupled plasmas and effects of various cleaning and annealing methodsWook-Jun Nam,Geun-Young Yeoma,Jung-Hun Kim,Ki-Woong Whang,Jong-Ku YoonJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS(1997)引用11浏览0引用110作者统计合作学者合作机构D-Core合作者学生导师暂无相似学者,你可以通过学者研究领域进行搜索筛选数据免责声明页面数据均来自互联网公开来源、合作出版商和通过AI技术自动分析结果,我们不对页面数据的有效性、准确性、正确性、可靠性、完整性和及时性做出任何承诺和保证。若有疑问,可以通过电子邮件方式联系我们:report@aminer.cn