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排名必读论文期刊顶会热点AI 简史溯源树小脉星探人才迁徙塔尖人才国防情报追踪开源工具智慧手语
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论文共 19 篇作者统计合作学者相似作者

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Research on the oxidation behavior of Titanium nitride thin films and resistance simulation
Xiaotong Zhang,Zhaoqin Zeng,Yanpeng Cao, Yanyan Zhang,Yu Bao,Haifeng Zhou, Jingxun Fang, Yu Zhang
2022 China Semiconductor Technology International Conference (CSTIC)pp.1-4, (2022)
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Tungsten CMP Consumable Localization Study at 28NM Technology Node
Shaojia Zhu,Mingfei Yu, Hongming Pan,Yibin Li,Lei Zhang,Jian Zhang,Haifeng Zhou,Jingxun Fang,Yu Zhang
2022 China Semiconductor Technology International Conference (CSTIC)pp.1-3, (2022)
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Developing of CMP Head-to-Head Compensation Function for Gate Height Uniformity Control
Yurong Que, Xing Ma, Shuxiang Wang,Jian Zhang,Haifeng Zhou, Jingxu Fang,Yu Zhang
2022 China Semiconductor Technology International Conference (CSTIC)pp.1-4, (2022)
引用1浏览0EIWOS引用
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Improvement of Aluminum Diffusion in HKMG Process
Xiaoyang Xi,Zhaoqin Zeng,Yu Bao,Haifeng Zhou, Jingxun Fang,Yu Zhang
2022 China Semiconductor Technology International Conference (CSTIC)pp.1-4, (2022)
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Aluminum Gap Fill Improvement For 28 HKMG Process
Shihao Wang,Zhaoqin Zeng,Yu Bao, Shasha Wang,Haifeng Zhou, Jingxun Fang,Yu Zhang
2022 China Semiconductor Technology International Conference (CSTIC)pp.1-4, (2022)
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An Optimized Monitoring Method for 28HK ILDCMP
Jingjing Li, Hongming Pan,Mingfei Yu,Shaojia Zhu, Feng Shi,Jian Zhang,Haifeng Zhou, Jingxun Fang,Yu Zhang
2022 China Semiconductor Technology International Conference (CSTIC)pp.1-3, (2022)
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Improvement of CU-CMP EDP Curves for Different Pattern Density
Yi Xian,Yuanyuan Meng,Lei Zhang,Jian Zhang,Haifeng Zhou, Jingxun Fang
2022 China Semiconductor Technology International Conference (CSTIC)pp.1-2, (2022)
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Investigation of 14 NM Contact Tungsten Gap-Filling Performance
Xiaofang Wang, Jiazhang Xu, Zhiqi Yuan,Yingbo Cheng,Zhaoqin Zeng,Yu Bao,Haifeng Zhou, Jingxun Fang,Yu Zhang
2022 China Semiconductor Technology International Conference (CSTIC)pp.1-3, (2022)
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An Optimized Method for Cu CMP Dishing Improvement
Lei Zhang,Yuanyuan Meng,Yi Xian,Jian Zhang,Haifeng Zhou,Jingxun Fang,Yu Zhang
2022 China Semiconductor Technology International Conference (CSTIC)pp.1-3, (2022)
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Study on the Correlation Between CMP CU Loading and EDP Curve
Yuanyuan Meng, Yixian,Lei Zhang,Jian Zhang,Haifeng Zhou, Jingxun Fang
2022 China Semiconductor Technology International Conference (CSTIC)pp.1-3, (2022)
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