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Muhammad Salman Al Farisi (Student Member, IEEE) received the B.E. degree in mechanical engineering and the M.E. degree in robotics from Tohoku University, in 2016 and 2018, respectively. He is currently a Graduate Student and a Research Fellow of Japan Society for the Promotion of Science (JSPS) with the Department of Robotics, Graduate School of Engineering, Tohoku University. He is also concurrently a Graduate Student with the Inter-Graduate School Doctoral Degree Program on Science for Global Safety, Leading Graduate School, Tohoku University. His research interests include the development of micro-electro mechanical system (MEMS) materials, heterogeneous device integration, and packaging technologies.
研究兴趣
论文共 31 篇作者统计合作学者相似作者
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IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERINGno. 5 (2024): 807-813
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERINGno. 5 (2024): 800-806
IEEJ Transactions on Sensors and Micromachinesno. 1 (2023): 6-12
IEEE Sensors Lettersno. 11 (2023): 1-4
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)pp.800-803, (2023)
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2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)pp.1888-1891, (2023)
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IEEE Sensors Journalno. 12 (2023): 12626-12633
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)pp.1872-1875, (2023)
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2023 8th International Conference on Instrumentation, Control, and Automation (ICA)pp.213-217, (2023)
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