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论文共 14 篇作者统计合作学者相似作者

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Metal Pitch 18nm Semi-Damascene Spacer-is-Dielectric SADP Process Integration for Beyond A10 Technology Node
Chen Wu, Vincent Renaud,Stephane Lariviere,Stefan Decoster, Yannick Hermans,Quoc Toan Le, Hanne DeCoster,Bart Kenens, Diana Tsvetanova, Alfonso Sepulveda Marquez,Gayle Murdoch,Seongho Park,Zsolt Tokei
Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials (2023)
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18Nm Pitch EUVL Line/Space Double-Patterning Exploration for N3 BEOL
Stéphane Larivière, S. Decoster,Sara Paolillo, Vincent Renaud, D. Tsvetanova,Bart Kenens, H. De Coster, Quoc Toan Le, Yusuke Oniki, Alfonso Sepúlveda Márquez, Karen Stiers, F. C. Seidel, Martin G. O’Toole, Mircea Dusa,Kurt Ronse,Chris Wilson
openalex（2022）
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Electrical Validation of Massive E-beam Defect Metrology in EUV-patterned Interconnects
Etienne De Poortere, Nicola Kissoon,David Hellin,Stefan Decoster,Gayle Murdoch,Stephane Lariviere,Elisabeth Camerotto,Sandip Halder,Philippe Leray, Malgorzata Jurczak,Guillaume Schelcher
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV (2021)
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UV Nanosecond Laser Annealing for Ru Interconnects
Nicolas Jourdan,Fabien Roze,Toshiyuki Tabata,Stephane Lariviere, Antonito Contino,Fulvio Mazzamuto,Tokei Zsolt
2020 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE (IITC)pp.163-165, (2020)
引用4浏览0EIWOS引用
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Front Matter: Volume 10959
Eran Amit, Jason Arjavac, P.R. Atkins, Angela Brett,Brian M. Barnes, Norman Birnstein, Sergey M. Borisov,Sascha Brose, V. Brouzet, Stefan Buhl,Benjamin Bunday,Sven Burger, Hsien-Hung Chang, Jun‐Dong Chang, Nick Chang, Alon Chen, Kai-Hsiung Chen, Cheng Zhang, Chu-Han Chiu,Kevin Chou, Hung‐Kuo Chu,James Clarke, Avi J. Cohen, Andrew Cross, Den Boef, S Desmoulins, Christophe Dezauzier, Alain C. Diebold, Hideto Dohi, J. Ducotè, Albrecht Eberle,Martin Ebert, Mark G. Eller, Fang Wei, Hans Fritz,Andreas Frommhold, L. I. Gershteǐn, Eva Giannatou,Sven Glabisch, Anna Golotsvan, V Gredy, Charles Hagen, Reza Hajiahmadi, S. Hayashi, Mark-Alexander Henn,Jan Hermans, Akiko Hirai, Katsumi Hirose, Ho‐Han Hsu, Kwang-Young Hu, Guo Cai Huang, Shang‐Yu Huang, T.J. Huisman, Joey Hunsche, Jisung Hwang, Ishikawa Masayoshi, Izawa Masayuki, J. Simon Tony, Kai Kal, Nora N. Kammer, Angela Karvtsov, N Kaufmann, Hideyuki Kazumi, Anne Kenslea, Robert S. Kern, Mehdi Kessar, Sasan Keyvani, T Kiers, Jin‐Hoi Kim, Wansoo Kim, Young‐Seok Kim, Grigory Klebanov, Dana Klein, Sung-Woo Ko, Richard Kris, P. Kruit, Stefan Kuiper,Stéphane Larivière, Le Lazzarino, Delphine Le Cunff, L Lecarpentier, Brian Lee, D. A. Lee,D.S. Lee, Ho-Se Lee, Julie Lee, Jun Lei, Bertrand Le-Gratiet, Patrick Lemaire, Shimon Levi, Susan R. Levy, John C. Lin, Yu‐Ju Lin, Rex Liu, Gian F. Lorusso, Hsiang-Lan Lung, Lu‐Fang Ma, Ruben Maas,Chris A. Mack, Jan Willem Maes, Antonio Mani,Ming Mao, Gino Marcuccilli, Melvin Mathew, T. McDaniel, Olivier Mermet, Robert Michels, A Mili,Matthieu Milléquant, Milo Renan, Hiroshi Miroku, A. Moussa, Ingrid Müller, Victoria Naipak, Dan Nelson, Duyen Thi Cam Nguyen, Nishihata Noifeld, Ondřej Novák, Ankush Oberai, Nang-Lyeom Oh, Bryan Orf, Jason W. Osborne, Alain Ostrovsky, Shyh-Shii Pai, Chan-Ha Park, Chris Park,Shin-Woong Park, Anne Pastol, Svetlana Pastur, Oliver D. Patterson, Carlos A. Pereira, Jeffrey L. Peters, C. R. M. Prentice, Jie Zhang,Ivo W. Rangelow, Ao Ren,Christoph Reuter,John Robinson, Justin Roller, Vito Rutigliani, E. A. Schweikert, Shahrjerdy Mir, Yoshiki Shiba,Yong Kong Siew,Richard T. Silver, Aileen Soco, Ewa Sommer, Hyung-Sub Son, Hans-Jürgen Stock, Su Sufrin, Weiqiang Sun, Pei Tang, Wim Tel, David Tien, Ashley Tilson, Ian Tolle, J.H. Tortai, Li-Shiuan Tsai, Stephen Tseng, Dieter Van den Heuvel, Maarten van Es,Luc van Kessel, Van Roey, Stanislav V. Verkhoturov, Alon Volfman, F Wang, Y. Wang, Wei Weintraub, R Willekers
openalex（2019）
引用0浏览0引用
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作者统计

#Papers: 14

#Citation: 38

H-Index: 4

G-Index: 6

Sociability: 6

Diversity: 0

Activity: 0

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