Enhancement-Mode Single-Layer Cvd Mos2 Fet Technology For Digital Electronics

2015 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM)(2015)

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摘要
2D nanoelectronics based on single-layer (SL) MoS2 offers great advantages for ubiquitous electronics. With new device technology, highly uniform E-mode FETs using SL CVD MoS2 with positive V-T, large mobility, excellent subthreshold swing are achieved. The integrated inverter shows excellent voltage transfer characteristic, close to rail-to-rail operation, high noise margin, large voltage gain (similar to 45) and small static power. The combinational and sequential digital circuits shown here serve as a toolbox of building blocks for realizing wide range of digital circuitry.
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