A Process-Tolerant Ring Modulator Based on Multi-Mode Waveguides

We present a novel 3.3-μm radius ring modulator design with dramatically reduced resonance wavelength variations. By implementing a multi-mode waveguide design for the ring waveguides, phase errors from processing non-idealities in waveguide width and etching depth are significantly reduced. Measured resonance wavelengths from four 200-mm wafers fabricated in a commercial 130-nm CMOS foundry showe...