Materials and technologies to enable high temperature stable MEMS and electronics for smart systems used in harsh environments
2016 China Semiconductor Technology International Conference (CSTIC)(2016)
摘要
This paper gives an overview of technologies and materials for microsystems and electronics in harsh environmental applications including the fabrication of a multifunctional MEMS with platinum metallization, high-temperature stable CMOS circuits and trench capacitors, ceramic-based packaging technologies as well as analysis of material parameters, simulation and reliability testing.
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关键词
high temperature stable MEMS,smart systems,harsh environments,microsystems,harsh environmental applications,multifunctional MEMS,platinum metallization,high-temperature stable CMOS circuits,trench capacitors,ceramic-based packaging,reliability testing,Pt
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