High-performance silicon photonics process platform for low-power photonic integrated circuits

Tohru Mogami,Suguru Akiyama,Takeshi Baba,Shigekazu Okumura,Junichi Fujikata,Tsuyoshi Horikawa,Keizo Kinoshita

2016 IEEE Silicon Nanoelectronics Workshop (SNW)（2016）

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摘要

An advanced silicon photonics process platform has been developed for low-power photonic IC's. Key techniques are highly reproducible optical devices using the advanced CMOS process and high-quality selective epitaxial growth Ge for photodetectors. Fin-type PIN-diode-based Si modulators were also demonstrated at 25Gbps operation in the O-band.

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关键词

silicon photonics process,low power photonic integrated circuits,optical devices,CMOS process,high-quality selective epitaxial growth,photodetectors,fin-type PIN diode based Si modulators,Ge,Si

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