Fractal nature of non-spherical silica particles via facile synthesis for the abrasive particles in chemical mechanical polishing

Chenliang Liang,Weili Liu,Yonghui Zheng,Xinglong Ji,Shasha Li,Weijun Yin,Xiaohui Guo,Zhitang Song

Colloids and Surfaces A: Physicochemical and Engineering Aspects（2016）

引用 8|浏览13

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摘要

•Studied the effect of di-valent ions on the Stober system and obtained peanuts shaped non-spherical silica particles.•Used electron scattering originally to study the fractal nature of amorphous silica particles. The results are the same as SAXS and Monte Carlo simulations.•Applied this kind of non-spherical silica particles to CMP and got good results.

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关键词

Non-spherical,Stober,Fractal,CMP

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