Improved Contacts to Synthetic Monolayer MoS 2 – A Statistical Study

Aravindh Kumar,Alvin Tang,H.-S. Philip Wong,Krishna Saraswat

IITC2021: 2021 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE (IITC)（2021）

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摘要

Two-dimensional (2D) semiconductors are promising candidates for scaled transistors because they are immune to mobility degradation at the monolayer limit. However, sub-10 nm scaling of 2D semiconductors, such as MoS2, is limited by the contact resistance. In this work, we show for the first time a statistical study of Au contacts to chemical vapor deposited monolayer MoS2 us...

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关键词

Semiconductor device modeling,Encapsulation,Measurement,Gold,Power transmission lines,Two dimensional displays,Contact resistance

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