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Microstructure analysis for thick AlN films grown on AlN templates with cone-type nano patterned sapphire substrates

Yudai Nakanishi,Nozomi Yamamoto,Takeaki Hamachi,Yusuke Hayashi,Tetsuya Tohei,Kazushi Sumitani,Yasuhiko Imai,Shigeru Kimura,Shiyu Xiao,Hideto Miyake,Akira Sakai

The Japan Society of Applied Physics（2021）

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关键词
thick aln films,aln templates,sapphire,cone-type
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