PECVD and PEALD on Polymer Substrates (part II): Understanding and Tuning of Barrier and Membrane Properties of Thin Films
Plasma Processes and Polymers(2023)
关键词
diffusion barrier coating,gas membranes,modeling,PEALD,PECVD,polymer substrates,porosity
AI 理解论文
溯源树
样例

生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要