Ошибки Измерений Интерферометров С Дифракционной Волной Сравнения

The paper describes the experimental stand and the results of studies of aberrations of the sources of a reference spherical wave (SRSW) based on a single-mode optical fiber with a sub-wave output aperture using the optical part of the recording system (OPRS). SRSW and OPRS are being developed for a referenceless interferometer with a diffraction reference wave. The technique to minimize measurement errors is described. Developed SRSW and OPRS provide subnanometer optics measurement accuracy. The possibilities of improving the accuracy of interferometer measurements to the picometer level are discussed.