The paper presents a new technique for thermoplastic bending of glass. The technique makes it possible to produce cylindrical surfaces with a guide in the form of a parabola, ellipse, etc. for mirrors in the hard X-ray wavelength range (λ~0.1 nm). Three samples of the surface of an elliptical cylinder were prepared using this technique. The production time for each sample was two days. The deviation of the guide and its local angle from the calculated values for all samples does not exceed Δy = 0.5 µm and Δα = 7*10-5 rad, respectively. It is shown that when such surfaces are etched for two hours, their accuracy can be improved by more than two orders of magnitude (Δy = 5 nm, Δα = 5*10-7 rad).

The paper reports on the developed technique for polishing single-crystal silicon substrates using a mechanical lap. The effective substrate roughness was obtained in the spatial frequency range of 0.025–65 µm-1 at the level of 0.37 nm and 0.18 nm at a frame size on the surface of 2х2 µm2. The result obtained is comparable with the results of chemical-mechanical and dynamic polishing of single-crystal silicon wafers for microelectronics.

The paper describes the design of a microscope for studying a betatron radiation source based on the PEARL femtosecond laser complex in the SXR and EUV wavelength range. The main optical element of the microscope is a spherical Schwarzschild objective a x5 magnification. The device allows to study the size and spatial structure of the interaction area of laser radiation with matter, at a selected wavelength in the EUV or SXR range with a resolution of δx = 2.75 microns. The operation wavelength (=13.5 nm) is set by multilayer X-ray mirrors. Thin-film absorption filters are used to suppress the background component of the signal.

The method of manufacturing and the results of studies of a lens corrector that converts a spherical diverging front into a plane one and is intended for studying flat surfaces as part of an interferometer with a diffraction comparison wave is described. A feature of the corrector is the use of an aspherical convex surface with a maximum deviation of ∼200 μm from the nearest sphere. The first experimental results are presented, indicating the prospects for using ion-beam processing to improve the quality of the wavefront. After the procedure of ion-beam processing, the aberrations over the entire aperture of the corrector decreased by more than 4 times and amounted to the parameter of the height difference PV = 207 nm (∼λ/3) and RMS = 19.2 nm (∼λ /33). On an area with a diameter of 80%, the aberrations fell to the nanometer level: PV = 65 nm (∼λ/10) and RMS = 8.3 nm (∼λ/76).

The work is devoted to the development, fabrication and analysis of broadband W / Si multilayer mirrors for a broadband monochromator, calculated for the spectral range of 7–10 keV. The possibility of using the stacking approach to obtain multilayer mirrors with a reflection coefficient of about 30% and a spectral bandwidth ΔE / E of about 20% is shown. The results of measurements of the angular and spectral reflection curves of the mirror obtained on a laboratory diffractometer and on a synchrotron in Novosibirsk are presented.

Описаны методы исследований и первые результаты, полученные при изучении шероховатости подложек из монокристаллического кремния (111), обработанных на финальной стадии различными способами: традиционная полировка без использования химико-механической полировки (ХМП), с использованием ХМП и без ХМП, но с применением нанопорошков окиси церия. Продемонстрирована эффективность использования нанопорошков CeO2. Были получены следующие значения эффективной шероховатости: без ХМП --- 3.56 nm, с ХМП --- 0.54 nm и без ХМП, но с полировкой CeO2 --- 0.93 nm. Ключевые слова: поверхность, шероховатость, рентгеновская оптика, глубокая шлифовка-полировка.

Подробно описана методика получения высокоточных гладких сферических подложек с использованием механического притира и применяемая для этих целей метрология. Приведена модифицированная схема двухзондового интерферометра с дифракционной волной сравнения, обеспечивающая выравнивание интенсивности в плечах интерферометра и перестройку рабочей апертуры без перенастройки прибора. Представлены экспериментальные результаты, полученные при доводке с использованием этой методики вогнутой сферической подложки из плавленого кварца с числовой апертурой NA = 0.30, изготовленной традиционным методом глубокой шлифовки--полировки. Исходные характеристики подложки: точность формы по параметру СКО = 36 nm (~λ/20), эффективной шероховатостью в диапазоне пространственных частот 0.025-65 μm-1 sigmaeff=1.1 nm. После доводки подложки параметры поверхности улучшились до значений: СКО = 3.3 nm (~λ/200) и sigmaeff=0.26 nm. Исследовано влияние размера зерна в суспензии на шероховатость и форму подложки. Ключевые слова: притир, шлифовка--полировка, шероховатость, сферическая подложка.

The paper describes the experimental stand and the results of studies of aberrations of the sources of a reference spherical wave (SRSW) based on a single-mode optical fiber with a sub-wave output aperture using the optical part of the recording system (OPRS). SRSW and OPRS are being developed for a referenceless interferometer with a diffraction reference wave. The technique to minimize measurement errors is described. Developed SRSW and OPRS provide subnanometer optics measurement accuracy. The possibilities of improving the accuracy of interferometer measurements to the picometer level are discussed.

The manufacturing method is described and the results of the study of the X-ray optical properties of a concave spherical mirror made of crystalline quartz are presented. The radius of curvature was 1630 mm. The shape of the mirror surface was studied on an interferometer with a diffraction wave of comparison. It was shown that in the whole processing area the maximum deviation from the nearest sphere was about 0.2 μm, and the square root of rms is 34 nm, which ensures high quality of images with an angular error of 2” (angular seconds). The reflection coefficients (about 7%) and the lower estimate of the spectral selectivity (λ / delta λ = 1775) are determined in the vicinity of the wavelength λ = 0.834 nm, which is close to the working wavelengths of the MgXII doublet (λ = 0.8418 and 0.8423 nm). During the bending of the crystal mirror, no change in the position of the Bragg peak and spectral selectivity was found within the limits of the accuracy of measurements.

Экспериментально продемонстрирована возможность построения профилометра на основе низкокогерентного тандемного интерферометра. Предложена методика, позволяющая избежать ошибок, связанных с колебаниями сканирующего устройства.

Рассмотрены несколько оптических методов измерения формы зеркальной поверхности. Указаны их достоинства, недостатки и области применения. Приведены результаты измерений этими методами одного и того же сферического зеркала. Получено хорошее совпадение результатов измерений.