Process Technology Optimization Using an Integrated Process and Device Simulation Sequencing System

In this paper, we discuss a system for performing process optimization, and its application to the optimization of a 0.5μm CMOS process. The approach includes an initial Target-Oriented experimental design strategy, elimination of ineffective parameters, a second set of experiments to determine a set of approximating models for each response, detection of appropriate transformations of input factors which improve the accuracy of the models, and optimization with respect to a set of constraints.