Understanding of the implantation process of the hydrogen ions into diamond is of great technological interest for the fabrication of the color centers required for quantum computing and sensing applications. Here, the hydrogen range and defect-depth distribution in (111) HPHT diamond irradiated with 10–350keV/proton H+ and H2+ ions in non channeling direction are experimentally measured by means of cross-section transmission electron microscopy (X-TEM) and secondary ion mass spectroscopy (SIMS). Surface morphology was studied by atomic force microscopy. It is found that the proton ranges at energies below 100keV are significantly (more than 50%) underestimated in TRIM simulations whereas measured profiles coincide well with simulated ones at ion energies above 100keV. The difference at low energies is due to approximations used in TRIM code. First is overestimation of electron energy losses. In addition, binary collision approximation and/or ZBL potential in this energy range are not suitable for proton stopping in diamond.

В настоящей работе предложена новая модель изменения структуры поверхностного слоя при эффекте дальнодействия, которая состоит в том, что изначально хаотическое распределение дислокационных петель в образце в результате эффекта дальнодействия становится ориентированным, т.е. появляется преимущественное направление. Это связано с напряжением в поверхностном слое образца. По-разному ориентированные кристаллографические плоскости, которые были в равных условиях при хаотической ориентации петель, оказываются в неравных условиях после выстраивания петель, и ширина соответствующих линий Кикучи изменяется по-разному.

Background/Objectives: The paper presents the experimental results of a study of the processes of grazing interaction of fast charged particles with structured surfaces. Methods/Statistical analysis: The experiments performed to study the radiation arising when the electrons pass along a structural surface are carried within a small angle region. According to the results presented in Figure 4 the maximum of electrons lifting can be observed at angles close to 1°-2°. So it will be necessary to use different grounding schemes to improve the yield efficiency. This can be achieved when both sides are grounded. Findings: The contribution of the structure of the target surface to the scattering of the incidence primary electrons was observed for different geometries for the interaction process of a 10keV electron beam with a diffraction grating. The experimental results demonstrate the possibility of increasing the total time of the interaction between the electron beam and the target, which opens the possibility to increase the effectiveness of radiation sources, based on diffraction mechanisms. Applications/Improvements: The effect of contactless transmission of electrons through dielectric channels causes great attention because of the potential use of simple and independent systems for electron beams formation. Keywords: Direction of Ions, Fast Electrons, KeV Electron Beam, Structured Surfaces

A set of experiments to study the guiding of 10keV electrons by tapered glass capillaries was performed. It is shown that the 10keV electron beam can be tightly focused by the tapered macrocapillaries. The charge/discharge processes of the capillary inlet are shown and discussed. The guiding effect was obtained for 10keV electrons by a tapered glass capillary of a simple shape. The electron beam transmission was measured for several angles.

In this work, a new model of a change in the structure of the surface layer under light exposure is proposed. The model is the orientation of initially randomly distributed dislocation loops due to long-range action. The preferred direction is associated with stress in the surface layer of a sample. Differently oriented crystallographic planes being equivalent at the random-loop orientation become nonequivalent after loop alignment. So, the width of corresponding Kikuchi lines changes in different ways.

The effect of guiding a 10-keV electron beam using dielectric plates is studied. It is shown that the electron beam after interaction with the insulator surface is deflected by this surface in different ways depending on a variety of grounding schemes of the front and back sides of plexiglass and aluminum-oxide plates. The dependence of the deflection of the beam from the plexiglass plates at different angle positions on the incident electron-beam current value is studied.

The grazing incidence interaction of a 10-keV electron beam with a planar surface of plexiglass is studied experimentally. Moreover, the electron passage through flat channels formed by such surfaces is investigated. The experiments reveal the presence of a guiding effect of the electron passage as in the case of a glass surface. However, there are some features, such as the existence of an initial elevation angle for the case of negative inclination angles of the plate. The formation of self-consistent charge on the surface of the plexiglass and its drain when the current is turned off occur more slowly than on the glass surface. This fact points to the difference in the surface conductivity of insulators.

The variation in Kikuchi line widths upon the illumination of a silicon plate is studied with the help of an electronograph. This work attempts to observe the changes in the defect structure of the subsurface layer of silicon crystal due to the effect of long-range action. The mechanism of this effect is discussed.

В настоящей работе предпринята попытка зафиксировать изменение дефектной структуры приповерхностного слоя кристалла кремния в результате эффекта дальнодействия, исследуя в электронографе ширину линий Кикуччи и ее изменение при освещении пластины кремния. Обсуждается механизм эффекта дальнодействия.

For the first time a classical model was developed to describe quantitatively the dynamics of charge distribution formation on a planar dielectric surface during its irradiation by fast electrons at a grazing incidence. The dynamic effects of the mutual influence of the beam and the dielectric surface charge predicted by the developed model are in a good agreement with the performed experiments. The proposed model can be used to describe time dependent processes of the electron beam–dielectric surface interaction, charging up and discharging for dielectric channels of more complex shapes.

Study of 10 keV electron beam reflection from a single planar dielectric surface was made. Guiding effect for some part of the beam was observed within grazing angles of incidence. Ionization, electron emission and drain of the surface charge were considered in the computer model to explain the results.

Experimental study of electron beam reflection from a single planar surface of Plexiglas was made. The distinct guiding effect for the part of the beam was observed for 10 keV electrons within angles of incidence from 0 to +3 degrees. The experiments using Poly plates showed a number of features of the process such as the dependence of the reflection on the plate surface quality and material of the surfaces, the divisions of the beam into two parts with different behaviour depend on tilt angle and the beam current value, the effect of an elevation angle of the beam in compare with initial beam trace at negative and zero tilt angles of the plate.

The change in the atomic density of silicon near an edge dislocation is calculated and the relation between changes in the density of the substance and the speed of sound upon tension a sample is obtained. The waveguide effect upon the transmission of energy to the reverse side of a sample is found to be several orders higher than earlier estimations.

Исследуется эффект бесконтактного прохождения (guiding) электронов с энергией 10 кэВ в диэлектрических цилиндрических каналах и плоских каналах, образованных стеклянными пластинами. В экспериментах с двумя пластинами наблюдались обычные в таких случаях захват и распространение электронного пучка вдоль оси канала. Исследование отражения пучка от одной пластины выявило отклонение угла отражения от зеркального и зависимость характера отражения от длины пластины и величины тока.

The effect of the contactless transmission (guiding) of 10 keV electrons through cylindrical dielectric channels and planar channels formed by glass plates is studied. The capture and propagation of an electron beam along the channel axis, usual in these cases, are observed in the experiments with two plates. The deviation of the reflection angle from the specular angle and its dependence on the plate length and beamcurrent value under beam reflection from a single plate are investigated.