The paper presents a physical description of the formation of a layer of positive charge around the body, during processing in a high-frequency capacitive (HF) discharge, due to which a directed flow of ions arises that bombard the surface of the body being processed. With the help of holographic measurements, the presence of a layer, which differs from the plasma of an RF discharge, is demonstrated around a body placed in an RF plasma. The theoretical substantiation of holographic measurements, plasma potentials, measurements of ion energy and ion current density on the surface of the treated body is presented.

Молекула СВМПЭ с насыщенными ковалентными химическими связями обладает низкой поверхностной энергией (≈ 33 мДж/м2). Этим объясняется инертность СВМПЭ-волокон к взаимодействию с полимерными матрицами при получении композитных материалов (КМ). В пучке нанокристаллических многофиламентных СВМПЭ-волокон содержится от ∼ 900 до 2000 и более филаментов (мононитей). Благодаря малому диаметру филаментов, волокно имеет огромную межфазную поверхность, основная часть которой находится внутри волокна [1, 2].

A two-dimensional axisymmetric plasma model of a radio frequency induction discharge of low pressure (13–133 Pa) with gas blowing is presented. The model includes the Navier−Stokes equations, the continuity equations for ions, electrons, and metastable atoms, the equations for the conservation of energy of electrons and atoms in the ground state, and the Maxwell equations with the corresponding boundary conditions. A feature of the model is that the initial approximation for the concentration of electrons is chosen by solving a one-dimensional eigenvalue problem. The results of numerical calculations of the characteristics of RF discharge with gas blowing are presented.

A self-consistent end-to-end model defining a radio-frequency inductive jet discharge of lowered pressure (13.3–133 Pa) in an undisturbed gas flow and in the presence of a solid body has been proposed. The model comprises three interrelated submodels defining the parts of such a discharge, participating in its interaction with the material treated: the plasma jet, the positive-charge layer formed in the neighborhood of the material, and the double electric layer directly near its surface. A peculiarity of the indicated discharge is that, in its plasma jet, a continuous-medium flow is changed to a free molecular flow, while the flow of charged particles in it satisfies the continuity hypothesis. Because of this, the gasdynamic parameters of the plasma jet are defined using the kinetic Boltzmann equation, the flow of charged particles in the jet and the positive-charge layer are considered in the hydrodynamic approximation, and the double electric layer formed near the surface of the material is defined using the model of a collisionless free molecular flow.

The calculations by mathematical model of the RF plasma flow at a pressure of 13.3–133 Pa at Knudsen Kn⩽ 0.1 is performed. The model is based on Navier–Stokes equations together with the continuum model for electron and metastable components of the RF plasma taking into account non-maxwellian EEDF. Results of plasma flow calculations for electrons density, distributions of electron temperature and calculations of parameters of electromagnetic field are presented.

The paper is dedicated to the numerical study of the dependence of plasma antenna resonance wavelengths on pressure. The study was carried out by simulating a RF capacitively coupled plasma with the Comsol Multiphysics software in one- dimensional formulation. Based on the calculated electric current in the plasma, the directional pattern and axial distribution of the electromagnetic field were found by solving Maxwell’s equations in a 2D formulation. The results showed that one of the advantages of plasma antennas is the transmission of waves at significantly longer wavelengths compared to metal antennas of similar geometry.

The enhancement of the biocompatibility of materials for orthopedics and traumatology was studied through plasma-phase condensation of coatings based on titanium-hafnium nitrides. Thin-film multilayer coatings made from nanoscale layers of hafnium and titanium nitrides are resistant to sterilization, prevent the release of toxic ions, have a corrosion rate of up to 5 × 10–15 mol/(cm2 h), and possess bacteriostatic properties. A coating condensation technology was developed in a nitrogen environment for leather material. The properties of the coating are formed by the impact of low-energy ions on the structure.

In this paper we developed a model of the ICRF plasma flow in a geometry of the two following regions: a plasma torch (narrow area) and a chamber (broad area). We used the numerical model developed in the COMSOL-multiphysics software with the given parameters of outlet pressure p = 133 Pa, drive power W = 1.3 kW, drive frequency f = 1.76 MHz and gas flow G = 0–0.4 g/s. We obtained the spatial dependencies of the electron density, electron temperature, pressure in the chamber, gas velocity and performed the analysis of effects in the broadening area. As a result, we noticed some features, which include an anomalous increase of the electron density in the broadening area.

The article presents the results of the development of molecular dynamics models of modifications of polypropylene (PP) material in the plasma of a radio-frequency (RF) discharge and a copper coating deposit by magnetron sputtering on the surface of a polyethylene (PE) material. The model of the RF plasma modification process describes changes in the surface layers of the PP material upon interaction with low-energy plasma ions: the nature of the breaking of covalent bonds in macromolecules, the chemical composition of sputtered particles, and changes in the ordering of the supramolecular structure. The model of the vacuum metallization process describes the processes of the introduction of metal atoms into the polymer structure, the change in the conformation of macromolecules, the formation of macroradicals with uncompensated chemical bonds, and the formation of an interfacial layer between the polymer and the metal coating.

A high-frequency discharge ( f = 13.56 MHz) generated between jet electrolytic (3% solution of ammonium sulfate in purified water) and metal (copper plates of the M1 grade) electrodes in the pressure range of p = 105–3 × 104 Pa is studied. The ignition of the high-frequency (HF) discharge was carried out by applying an electrolyte jet to the surface of a copper plate in the discharge chamber. The types and shapes of plasma structures generated in the interelectrode gap and their mutual transformations at the change in the voltage are considered. Hydrogasdynamic processes in the combustion zone of the HF discharge are described, including optically inhomogeneous gas flows, disturbances of the jet electrode, and the formation of droplets. The thermograms of the surface of the jet and metal electrodes under the conditions of the HF discharge combustion are considered. The composition of the plasma, the electron density, and the temperature of the heavy component are studied using emission spectroscopy.

A new approach for modeling steady state inductively coupled radio frequency discharges at low pressure is described. A simple one-dimensional model is considered, which includes Maxwell’s equations and the electron balance equation with boundary conditions of the third kind. It is shown that the system of boundary value problems is a two-parameter partial eigenvalue problem. The smallest eigenvalue of the problem is the boundary value of the magnetic field strength. The second parameter of the problem is the concentration of electrons at the center of the plasma bunch. The developed approach makes it possible to calculate the inductor current required to maintain a steady state of the discharge. The results of calculations of the dependence of the inductor current, electron density, electric and magnetic fields on pressure are presented.

The physical mechanism for the emergence of ring and semi-ring plasma structures around electrolyte jets in a high-frequency discharge with liquid jet electrodes. It is shown that the electric field strength in the jet flow decay region can reach values of 10 9 -10 10 V/m, at which autoelectronic emission is possible, leading to the appearance in the vicinity of the jet of primary electrons, which leads to ionization and excitation of the molecules of the surrounding gaseous medium. Keywords: Plasma-liquid systems, high-frequency discharge, electrolytes, numerical methods.

An installation for numerical and experimental studies of low-pressure radio frequency plasma for surface modification of functional materials with equipment for data synchronization are presented. The equipment for data synchronization as well as intermediate results for plasma generation are showed.

The physical mechanism for the emergence of ring and semi-ring plasma structures around electrolyte jets in a high-frequency discharge with liquid jet electrodes. It is shown that the electric field strength in the jet flow decay region can reach values of 10^9–10^10 V/m, at which autoelectronic emission is possible, leading to the appearance in the vicinity of the jet of primary electrons, which leads to ionization and excitation of the molecules of the surrounding gaseous medium.

The dependence of parameters of an inductively coupled radiofrequency plasma on the electromagnetic field frequency in range 0.25–40 MHz at reduced pressure (113 Pa) was studied. The study was carried out in a 2D axisymmetric time-dependent setting, implemented in the Comsol multiphysics software package using the Navier–Stokes equations, continuity equation for electron density, electron energy density equation, ion density equation, metastable atom density equation, heat transfer equation, Maxwell and Poisson equations for electromagnetic fields. The distributions of the plasma parameters at the output of the discharge tube in dependence on electromagnetic field frequency were obtained. It was found that the dependences of the electron density, electron temperature, and gas temperature on the field frequency are non-linear. The maximum value of these quantities were achieved at different frequencies depending on the discharge power. A mechanism relating the frequency and power to the shift in the positions of the maxima of these plasma parameters is proposed.

Results of the molecular dynamic simulation of the interaction of low-energy ions (from 10 to 100 eV) with the surface of polypropylene fibrous materials in low pressure radio-frequency (RF) argon plasma is presented. A full-atomic model using the LAMMPS classical molecular dynamics code was made. As a result of numerical calculations, it was found that argon ion bombardment initiates the breaking both of an intermolecular and intramolecular bond of polypropylene with sputtered particles being the hydrocarbon radicals and single atoms. The depth of implantation of the ion is determined, the change in the kinetic energy of the argon atom and the temperature of the simulated cell is obtained.

The article proposes a new approach to calculating the strength of the magnetic field on the inner wall of the discharge chamber, which is necessary to maintain a steady state of a low-pressure ICRF discharge. The model is treate as a nonlinear eigenproblem. The influence of the third type boundary conditions for electron density as well as and the nonlinear boundary conditions for electrical strength is considered. This approach makes it possible solving two problems of designing ICRF plasma torches: for a given electron density in the discharge find the magnetic field strength that ensures the maintenance of the discharge, or, conversely, at a given magnetic field strength, determine the value of the electron density that can be created in the discharge. In addition, the radial distributions of the electric and magnetic fields and the electron concentration can be determined.

It is established that radio frequency plasma treatment of a finished fur semi-finished sheepskins in an inert gas medium does not lead to chemical changes, but it provides conformational changes in the structure of the fur material, thereby allowing to regulate its sorption characteristics (from the most hydrophobic to the most hydrophilic) by varying the parameters of plasma treatment.