The quality of the coating of the photoresist impacts the quality of lithography directly.The spin coating and spray coating method and their development process were presented,as well as the electrodeposition(ED),vapor deposition methods.Advantage and disadvantages of the spin coating,spray coating and ED were outlined,and the applications of the different coating methods were summarized.
In order to study the dynamic and deformation characteristics and the stability of CFRD through earthquake,the seismic response of Pankou CFRD is studied by using finite element method,focusing on the acceleration response characteristics,the post-earthquake residual deformation and panel deformation,and the seismic safety of dam elements and downstream slope.The results show that the overall seismic performance of the dam is good enough to meet the seismic stability requirements under the given earthquake,and meanwhile,the crest and the downstream slope near the crest has a larger acceleration response and the relative large permanent deformation occurs there.