Firstly,the concept of POL equipment product family( PF) and product family design( PFD) are illustrated in this paper. Evaluation index system for POL equipment PFD is put forward based on the analysis of difference between traditional design and PFD,and on considering characters of technical and military of POL equipment. According to qualitative and quantitative characteristics of index,evaluation method for POL equipment PFD based on combining analytic hierarchy process( AHP) and cloud model is put forward in this paper,avoiding the lack of fuzzy-evaluation. Finally, the effectiveness of this method is proved through the example of POL equipment PFD.

The photoresist is widely used in integrated circuit and micro electro-mechanical manufacturing systems processes,but traditional spin coating process will loss 95% of photoresist and cause negative environment impact for its high toxicity,which need higher disposing cost.Improving the utilization rate of the photoresist is one of the main objects of the coating process.Based on the self-developed 100 kHz ultrasonic nozzle,the film uniformity problem during the photoresist saving-oriented ultrasonic atomizing spraying process is studied.After analyzing the flow field distribution of carrier gas,a force and collision model is built to study behavioral characteristics of atomized droplets in rotating and symmetrical airflow field and then proposed a numerical simulation procedure to study transport processes of atomized droplets,which could analyze the impact of gas flow,fluid flow and spray cone cross-section height on atomized droplet’s particle size and concentration distribution effectively.The actual ultrasonic atomizing spraying experiment was carried out on 304.8 mm wafer using photoresist AZ4999.The results shows that the ultrasonic atomizing spraying nozzle can achieve high film uniformity and save about 80% photoresist when compared with spin coating process.

When large damage, such as rupture and leakage, occurs in buried pipeline, a steel pipeline extrusion throttle device is applied to crush the pipeline and block the oil flow quickly in a short time. An extrusion model under uniformly distributed radial load is established based on the theory of plastic deformation and the principle of virtual work. The pipeline plastic deformation is analyzed and computed and the pipeline extruding load is obtained. The extrusion of X60 steel tube of 325 mm diameter and 6 mm thickness loaded by indenter of 18 mm width is examined. The load-deformation curve of pipeline extrusion is obtained. The results of the comparison between experimental data and theoretical data show that the model is in good agreement with the experiment. This model can be used to calculate the extruding load of pipelines of different sizes and provide the theoretical and practical reference for urgent repair of pipeline leakage.

The traditional Monte Carlo method needs a large number of samples to obtain simulation results consistent with the system macro-state since the method is less focused on the system macro-state when simulating the system micro-event. This feature makes the computations very expensive, especially when simulating large spaces with numerous elements. A macro-state self-consistent Monte Carlo method is given here that can rapidly and economically simulate the system evolution at macro-scale with a macro-analysis method and obtain statistical information and the random distribution parameters of the system elements. The parameters can be defined at any time and any location on the microscopic scale to reduce the complexity of the micro-simulation while ensuring a certain degree of simulation accuracy and the amount of information. This Monte Carlo method is used to simulate the micro phenomenon of fluorine radical transiting from two different stepped profiles of showerhead holes in the plasma enhanced chemical vapor deposition (PECVD) cleaning etching process to evaluate its sticking rate on each wall and its survival rate at the outlet. The results qualitatively show that a stepped up hole design is conducive to the fluorine radical transition to the showerhead.

Because of its small average droplet size, low carrier gas flow rate and the droplets not easy to splash etc, the ultrasonic atomizing spray technology is particularly suitable for making photoresist films. In order to get a reasonable spray scan interval, the parabolic deposition model was used to study the relationship between the spray overlap width and the photoresist film thickness and uniformity, and it can be concluded that the thickness of the film increases and the thickness variance of the film decreases oscillatorily along with the increasing of the spray overlap width.To obtain good uniformity of the photoresist film, the dimensionless overlap width should be at least greater than 0.15.

The quality of the coating of the photoresist impacts the quality of lithography directly.The spin coating and spray coating method and their development process were presented,as well as the electrodeposition（ED）,vapor deposition methods.Advantage and disadvantages of the spin coating,spray coating and ED were outlined,and the applications of the different coating methods were summarized.

In order to solve the problem of the design of the ultrasonic atomizing nozzle’s vibration system composed of certain elements of thin rod without simple analytic solutions,a piecewise approximate simulation method is proposed,and based on the method,an ultrasonic atomizing nozzle’s vibration system is designed.Using mechanic-electric analogy method,based on the four terminal network of the common longitudinal vibration of thin rod with variable cross-section,the thin rod without simple analytic solutions is divided into many parts to simulate the whole rod,then the overall transmission matrix of the vibration system is built up,and as a result,the design and analysis of the vibration system is achieved.Using different simulation accuracy values,calculates three kinds of half wavelength solid and hollow single horns with the shape like exponent,cone and catenary are calculated,then the simulation calculation results and the theoretical results are compared and analyzed.At the same time,three kinds of half wavelength solid and hollow compound horns with the shape like exponent-cylinder,cone-cylinder and catenary-cylinder are calculated and the simulation calculation results and the theoretical results are compared and analyzed.Compared with the simulation results and the theoretical value,it can conclude that simulation results are very close to the theoretical calculation value and piecewise approximation simulation calculation method can solve the problem of the thin rod’s longitudinal vibration’ design which variable cross section without simple analytic solutions.Based on the four terminal network transmission matrixes piecewise approximate simulation method,the nozzle’s vibration system is designed and analyzed,and the manufactured nozzle can work well.

The recent development in advanced packaging and MEMS applications has created a need for high aspect ratio lithography processes, ultrasonic spray coating is a very appropriate method to meet this requirement, the parameters of atomization are greatly affected the spray quality. By using a laser-phase Doppler analyzer (PDA), an experimental study was conducted of the atomization characteristics of the ultrasonic spray nozzle, water was used as the liquid to be atomized instead of photoresist and air was used as the auxiliary gas instead of nitrogen, the parameters of atomization characteristics under different operating conditions were measured, such as mean diameter D10 and diameter distribution of atomized droplet particles etc. The experimental measurement results indicate that the flow rate of atomized liquid and auxiliary gas have a significant impact on the spray characteristics, the nozzle can achieve a comparatively good atomization state under the condition of a relatively small flow rate of atomized liquid or a relatively high flow rate of auxiliary gas, the mean diameter D10 of droplets can be 18.39μm. The research findings can provide an underlying basis for the application of the ultrasonic spray nozzle.