In this work, a hybrid n-diamond-carbon nanowalls structure was synthesized on a 100 mm diameter silicon wafer using RF-PECVD (CCP type). This structure was analyzed by transmission microscopy, electron microscopy and X-ray diffraction. It was found that the addition of carbon monoxide (CO) to a gas mixture of methane (CH4), argon (Ar), and hydrogen (H2) leads to the formation of n-diamond nanocrystals in the basal layer. Using plasma surface treatment techniques, the carbon nanowalls were fully removed and the lower layer consisting of n-diamond was studied separately, for which X-ray diffraction results of a separate n-diamond phase were obtained for the first time.

Hydromechanical impact on an array of horizontally aligned carbon nanotubes during the creation of a functional layer of future devices is studied. The carbon-nanotube layer is formed by the spray-coating technique. A method for controlling the surface resistance of the nanotube layer deposited onto the substrate surface before and after hydromechanical treatment is demonstrated. The wafer surface with carbon nanotubes is examined by scanning electron microscopy and Raman spectroscopy. An original technique for the uniform deposition of a carbon-nanotube layer with desired properties is proposed. The results obtained show that this technique makes it possible to obtain a carbon-nanotube layer with a specified surface resistance, which depends on the concentration of the suspension used and subsequent processing of the resulting layers, on the substrate surface.

The use of diamond photocathodes and electron flow multipliers in high-frequency vacuum micro- and nanoelectronics is discussed. Vacuum microtriode (microtube) and electron gun for integrated travelling-wave tube amplifiers are considered as the main devices of this kind.

The use of diamond photocathodes and electron flow amplifiers in high-frequency vacuum micro and nanoelectronics is analyzed. The main devices are a vacuum microtriode and an electron gun for an integral traveling wave tube.

A multiple-beam X-ray tube on the basis of field emitters has been designed and developed. The Xray tube is powered by 140 kV anode supply. Each beam is driven by I kV cathode to grid supply. Electron trajectories calculation and experimental measurement of I-V characteristics are presented.

Boron doped polycrystalline diamond films were grown using MW PE CVD method. Optical emission spectra (OES) of MW-plasma in the region from 200 nm to 800 nm during boron doped polycrystalline diamond films growth were in situ investigated. Raman spectroscopy method was used for morphology investigation of grown polycrystalline diamond films. Also, absorption spectroscopy method was used for optical properties investigation of all grown films.