Arrays of optically trapped neutral atoms are a promising architecture for the realization of quantum computers. In order to run increasingly complex algorithms, it is advantageous to demonstrate high-fidelity and flexible gates between long-lived and highly coherent qubit states. In this work, we demonstrate a universal high-fidelity gate set with individually controlled and parallel application of single-qubit gates and two-qubit gates operating on the ground-state nuclear-spin qubit in arrays of tweezer-trapped ^{171}Yb atoms. We utilize the long lifetime, flexible control, and high gate fidelity of our system to characterize native gates using single- and two-qubit Clifford and symmetric subspace randomized-benchmarking circuits with more than 200 controlled-Z (cz) gates applied to one or two pairs of atoms. We measure our two-qubit entangling gate fidelity to be 99.72(3)% (99.40(3)%) with (without) postselection. In addition, we introduce a simple and optimized method for calibration of multiparameter quantum gates. These results represent important milestones toward executing complex and general quantum computation with neutral atoms.

Assembling and maintaining large arrays of individually addressable atoms is a key requirement for continued scaling of neutral-atom-based quantum computers and simulators. In this work, we demonstrate a new paradigm for assembly of atomic arrays, based on a synergistic combination of optical tweezers and cavity-enhanced optical lattices, and the incremental filling of a target array from a repetitively filled reservoir. In this protocol, the tweezers provide microscopic rearrangement of atoms, while the cavity-enhanced lattices enable the creation of large numbers of optical traps with sufficient depth for rapid low-loss imaging of atoms. We apply this protocol to demonstrate near-deterministic filling (99% per-site occupancy) of 1225-site arrays of optical traps. Because the reservoir is repeatedly filled with fresh atoms, the array can be maintained in a filled state indefinitely. We anticipate that this protocol will be compatible with mid-circuit reloading of atoms into a quantum processor, which will be a key capability for running large-scale error-corrected quantum computations whose durations exceed the lifetime of a single atom in the system.

Measurement-based quantum error correction relies on the ability to determine the state of a subset of qubits (ancillae) within a processor without revealing or disturbing the state of the remaining qubits. Among neutral-atom based platforms, a scalable, high-fidelity approach to mid-circuit measurement that retains the ancilla qubits in a state suitable for future operations has not yet been demonstrated. In this work, we perform imaging using a narrow-linewidth transition in an array of tweezer-confined $^{171}$Yb atoms to demonstrate nondestructive state-selective and site-selective detection. By applying site-specific light shifts, selected atoms within the array can be hidden from imaging light, which allows a subset of qubits to be measured while causing only percent-level errors on the remaining qubits. As a proof-of-principle demonstration of conditional operations based on the results of the mid-circuit measurements, and of our ability to reuse ancilla qubits, we perform conditional refilling of ancilla sites to correct for occasional atom loss, while maintaining the coherence of data qubits. Looking towards true continuous operation, we demonstrate loading of a magneto-optical trap with a minimal degree of qubit decoherence.