The combination of a pn‐junction charge‐coupled device‐based pixel detector with a poly‐capillary X‐ray optics was installed and examined at the Helmholtz‐Zentrum Dresden‐Rossendorf. The set‐up is intended for particle‐induced X‐ray emission imaging to survey the trace elemental composition of flat/polished geological samples. In the standard configuration, a straight X‐ray optics (20 μm capillary diameter) is used to guide the emitted photons from the sample towards the detector with nearly 70 000 pixels. Their dimensions of 48 × 48 μm2 are the main limitation of the lateral resolution. This limitation can be bypassed by applying a dedicated subpixel algorithm to recalculate the footprint of the photon's electron cloud in the detector. The lateral resolution is then mainly determined by the capillary's diameter. Nevertheless, images are still superimposed by the X‐ray optics pattern. The optics' capillaries are grouped in hexagonal bundles resulting in a reduced transmission of X‐rays in the boundary regions. This influence can be largely suppressed by combining a series of short measurements at slightly shifted positions using a precision stage and correcting the image data for this shifting. The use of a subpixel grid for the image reconstruction allows a further increase of the spatial resolution. This approach of image‐stacking and multiframe super‐resolution in combination with the subpixel correction algorithm is presented and illustrated with experimental data. Additionally, a flat‐field correction is shown to remove the remaining imaging inhomogeneity caused by non‐uniform X‐ray transmission. The described techniques can be used for all X‐ray spectrometry methods using an X‐ray camera to obtain high‐quality elemental images.

A new cluster tool for in situ real-time processing and depth-resolved compositional, structural and optical characterization of thin films at temperatures from -100 to 800 °C is described. The implemented techniques comprise magnetron sputtering, ion irradiation, Rutherford backscattering spectrometry, Raman spectroscopy, and spectroscopic ellipsometry. The capability of the cluster tool is demonstrated for a layer stack MgO/amorphous Si (∼60 nm)/Ag (∼30 nm), deposited at room temperature and crystallized with partial layer exchange by heating up to 650 °C. Its initial and final composition, stacking order, and structure were monitored in situ in real time and a reaction progress was defined as a function of time and temperature.

The recently installed and unique PIXE (particle-induced X-ray emission) set-up at the Helmholtz-Zentrum Dresden-Rossendorf (HZDR) is mainly dedicated to applications for a detailed overview of elemental composition over large sample areas within a short time even at trace level. The so-called High-Speed-PIXE (HS-PIXE), a combination of a pnCCD-based pixel-detector with polycapillary X-ray optics, offers simultaneous imaging of sample areas up to 12×12mm2 with a lateral resolution better than 100μm. Each of the 264×264 individual pixels detects X-ray photons in an energy range from 2keV to 20keV with an energy resolution of 152eV (@Mn-Kα). A high precision sample manipulator offers the inspection of areas up to 250×250mm2. During first experiments the determined resolution is (76±23)μm using a sample of well-known sharp-edged chromium patterns. Trace element analysis has been performed using a geological sample, a tin ore, with an average Ta-concentration below 0.1at.%. Fine-zoned structures became visible in the Ta-Lα intensity map within only 45min. The High-Speed-PIXE closes a gap in the analytical process flow chain especially for geoanalytical characterisations. It is a unique and fast detection system to identify areas of interest in comparably short time at large-area scale for further analysis.

Analytical codes dedicated to the analysis of Ion Beam Analysis data rely on the accuracy of both the calculations and of basic data such as scattering cross sections and stopping powers. So far, the effect of the beam charge state of the incoming beam has been disregard by general purpose analytical codes such as NDF. In fact, the codes implicitly assume that the beam always has the equilibrium charge state distribution, by using tabulated stopping power values e.g. from SRIM, which are in principle valid for the effective charge state. The dependence of the stopping power with the changing charge state distribution is ignored. This assumption is reasonable in most cases, but for high resolution studies the actual change of the charge state distribution from the initial beam charge state towards equilibrium as it enters and traverses the sample must be taken into account, as it influences the shape of the observed data. In this work, we present an analytical calculation, implemented in NDF, that takes this effect into account. For elastic recoil detection analysis (ERDA), the changing charge state distribution of the recoils can also be taken into account. We apply the calculation to the analysis of experimental high depth resolution ERDA data for various oxide layers collected using a magnetic spectrometer.

A High-depth Resolution Elastic Recoil Detection (HR-ERD) set-up using a magnetic spectrometer has been taken into operation at the Helmholtz-Zentrum Dresden-Rossendorf for the first time. This instrument allows the investigation of light elements in ultra-thin layers and their interfaces with a depth resolution of less than 1nm near the surface. As the depth resolution is highly influenced by the experimental measurement parameters, sophisticated optimisation procedures have been implemented. Effects of surface roughness and sample damage caused by high fluences need to be quantified for each kind of material. Also corrections are essential for non-equilibrium charge state distributions that exist very close to the surface. Using the example of a high-k multilayer SiO2/Si3N4Ox/SiO2/Si it is demonstrated that oxygen in ultra-thin films of a few nanometres thickness can be investigated by HR-ERD.

A new 6 MV electrostatic tandem accelerator has been put into operation at Helmholtz-Zentrum Dresden-Rossendorf (HZDR). The system is equipped for accelerator mass spectrometry and opens a new research field at HZDR and the Helmholtz Association. It will be also used for ion beam analysis as well as for material modification via high-energy ion implantation. The research activity at the DREsden Accelerator Mass Spectrometry facility (DREAMS) based on a 6 MV Tandetron is primarily dedicated to the long-lived radioisotopes of Be-10, Al-26, Cl-36, Ca-41, and I-129. DREAMS background levels have been found to be at 4.5 x 10(-16) for Be-10/Be-9, 8 x 10(-16) for Al-26/Al-27, 3 x 10(-15) for Cl-36/Cl-35 and 8 x 10(-15) for Ca-41/Ca-40, respectively. The observed background of 2 x 10(-13) for I-129/I-127 originates from intrinsic I-129 from AgI produced from commercial KI. The introduction of quality assurance approaches for AMS, such as the use of traceable calibration materials and taking part in interlaboratory comparisons, guarantees high accuracy data for future DREAMS users. During first experiments an energy calibration of the accelerator has been carried out using the nuclear reaction H-1(N-15,gamma alpha)C-12 yielding an energy correction factor of 1.019. (c) 2012 Elsevier B.V. All rights reserved.

High intensity laser driven proton beams are at present receiving much attention. The reasons for this are many but high on the list is the potential to produce compact accelerators. However two of the limitations of this technology is that unlike conventional nuclear RF accelerators lasers produce diverging beams with an exponential energy distribution. A number of different approaches have been attempted to monochromise these beams but it has become obvious that magnetic spectrometer technology developed over many years by nuclear physicists to transport and focus proton beams could play an important role for this purpose. This paper deals with the design and characterisation of a magnetic quadrupole system which will attempt to focus and transport laser-accelerated proton beams.