We perform readout of a quantum-dot hybrid qubit coupled to a superconducting resonator through a parametric, longitudinal interaction mechanism. Our experiments are performed with the qubit and resonator frequencies detuned by ~10 GHz, demonstrating that longitudinal coupling can facilitate semiconductor qubit operation in the ‘ultra-dispersive’ regime of circuit quantum electrodynamics.

This paper describes a novel multi-metal layered interconnect-based heterogeneous integration approach for developing a reworkable superconducting qubit package. Various microbump options, including gold, tin, indium, and tin indium, were used to achieve the desired flip-chip configurations. As a case study, we demonstrate a reworkable cryogenic superconducting qubit package capable of interconnecting up to 32 microwave lines. The flip-chip package configurations show low (below 30 dB @ RT) nearest-neighbor crosstalk up to 10 GHz. Initial qubit measurements at low temperatures (~10 mK) show qubit lifetime T 1 > 100 μs (Q > 2M), which is comparable to the planar versions measured in our standard Al wirebonded package. Keywords—qubit, heterogeneous integration, interconnect, flip-chip, crosstalk.

The large physical size of superconducting qubits and their associated on-chip control structures presents a practical challenge toward building a large-scale quantum computer. In particular, transmons require a high-quality-factor shunting capacitance that is typically achieved by using a large coplanar capacitor. Other components, such as superconducting microwave resonators used for qubit state readout, are typically constructed from coplanar waveguides, which are millimeters in length. Here, we use compact superconducting through-silicon vias to realize lumped-element capacitors in both qubits and readout resonators to significantly reduce the on-chip footprint of both of these circuit elements. We measure two types of devices to show that through-silicon vias are of sufficient quality to be used as capacitive circuit elements and provide a significant reduction in size over existing approaches.

Superconducting cavities have emerged as a key tool for measuring the spin states of quantum dots. So far, however, few experiments have explored longitudinal couplings between quantum dots and cavities, and no solid-state qubit experiments have explicitly probed the "adiabatic" regime, where the Purcell decay is strongly suppressed. Here we report measurements of a double-quantum-dot charge qubit coupled to a high-impedance resonator via a "flip-chip" design geometry. By applying an adiabatic ac drive to the qubit through two different channels, and studying the effects of qubit energy detuning, interdot tunneling, and driving strength, we are able to unequivocally confirm the presence of a longitudinal coupling between the qubit and the cavity, while the qubit remains in its ground state. Since this coupling is proportional to the driving amplitude, and is therefore switchable, it has the potential to become a powerful tool in qubit experiments.

Mechanical resonators can be used to mediate an effective interaction between microwave and optical photons [1], [2]. To create this interaction, the mechanical resonator must be simultaneously coupled to both an optical mode and an electrical microwave mode. One way of achieving sufficiently strong coupling between the mechanical and electrical microwave modes is to use the piezoelectric effect. In this work, we characterize laterally vibrating piezoelectric AlN MEMS resonators operating at 5 GHz. Extracted parameters are then used in a circuit analysis to determine the coupling rate that can be achieved with respect to a Josephson-junction-based tunable resonator. Future integration of these mechanical modes with optical cavities will form the basis for an efficient transducer for applications in quantum information systems.

As progress is made towards the first generation of error-corrected quantum computers, robust characterization and validation protocols are required to assess the noise environments of physical quantum processors. While standard coherence metrics and characterization protocols such as T1 and T2, process tomography, and randomized benchmarking are now ubiquitous, these techniques provide only partial information about the dynamic multi-qubit loss channels responsible for processor errors, which can be described more fully by a Lindblad operator in the master equation formalism. Here, we introduce and experimentally demonstrate Lindblad tomography, a hardware-agnostic characterization protocol for tomographically reconstructing the Hamiltonian and Lindblad operators of a quantum noise environment from an ensemble of time-domain measurements. Performing Lindblad tomography on a small superconducting quantum processor, we show that this technique characterizes and accounts for state-preparation and measurement (SPAM) errors and allows one to place bounds on the fit to a Markovian model. Comparing the results of single- and two-qubit measurements on a superconducting quantum processor, we demonstrate that Lindblad tomography can also be used to identify and quantify sources of crosstalk on quantum processors, such as the presence of always-on qubit-qubit interactions.

Density matrix exponentiation (DME) is a general technique for using a quantum state rho to enact the quantum operation e-(i rho theta) on a target system. It was first proposed in the context of quantum machine learning, but has since been shown to have broad applications in quantum metrology and computation. No experimental demonstration of DME has been performed thus far due to its demanding circuit depths and the need to efficiently generate multiple identical copies of rho during the finite lifetime of the target system. In this work, we describe the first demonstration of the DME algorithm, which we accomplish using a superconducting quantum processor. Our demonstration relies on a 99.7% fidelity controlled-phase gate implemented using two tunable superconducting transmon qubits. We achieve a fidelity surpassing 90% at circuit depths exceeding 70 when comparing the output of the circuit executed on our quantum processor to a simulation assuming perfect operations and measurements.

Superconducting cavities have emerged as a key tool for measuring the spin states of quantum dots. So far however, few experiments have explored longitudinal couplings between dots and cavities, and no solid-state qubit experiments have explicitly probed the"adiabatic"regime, where the Purcell decay is strongly suppressed. Here, we report measurements of a double-quantum-dot charge qubit coupled to a high-impedance resonator via a"flip-chip"design geometry. By applying an adiabatic ac drive to the qubit through two different channels, and studying the effects of qubit energy detuning, interdot tunneling, and driving strength, we are able to unequivocally confirm the presence of a longitudinal coupling between the qubit and cavity, while the qubit remains in its ground state. Since this coupling is proportional to the driving amplitude, and is therefore switchable, it has the potential to become a powerful new tool in qubit experiments.

Nonpairwise multiqubit interactions present a useful resource for quantum information processors. Their implementation would facilitate more efficient quantum simulations of molecules and combinatorial optimization problems, and they could simplify error suppression and error correction schemes. Here, we present a superconducting circuit architecture in which a coupling module mediates two-local and three-local interactions between three flux qubits by design. The system Hamiltonian is estimated via multiqubit pulse sequences that implement Ramsey-type interferometry between all neighboring excitation manifolds in the system. The three-local interaction is coherently tunable over several MHz via the coupler flux biases and can be turned off, which is important for applications in quantum annealing, analog quantum simulation, and gate-model quantum computation.

Superconducting cavities have emerged as a key tool for measuring the spin states of quantum dots. So far however, few experiments have explored longitudinal couplings between dots and cavities, and no solid-state qubit experiments have explicitly probed the "adiabatic" regime, where the Purcell decay is strongly suppressed. Here, we report measurements of a double-quantum-dot charge qubit coupled to a high-impedance resonator via a "flip-chip" design geometry. By applying an adiabatic ac drive to the qubit through two different channels, and studying the effects of qubit energy detuning, interdot tunneling, and driving strength, we are able to unequivocally confirm the presence of a longitudinal coupling between the qubit and cavity, while the qubit remains in its ground state. Since this coupling is proportional to the driving amplitude, and is therefore switchable, it has the potential to become a powerful new tool in qubit experiments.

One major challenge to scaling quantum dot qubits is the dense wiring requirements, making it difficult to envision fabricating large 2D arrays of nearest-neighbor-coupled qubits necessary for error correction. We describe a method to ameliorate this issue by spacing out the qubits using superconducting resonators facilitated by 3D integration. To prove the viability of this approach, we use integration to couple an off-chip high-impedance TiN resonator to a double quantum dot in a Si/SiGe heterostructure. Using the resonator as a dispersive gate sensor, we tune the device down to the single electron regime with an SNR = 5.36. Characterizing the individual systems shows 3D integration can be done while maintaining low-charge noise for the quantum dots and high-quality factors for the superconducting resonator (single photon Q L = 2.14 × 10 4 with Q i ≈ 3 × 10 5 ), necessary for readout and high-fidelity two-qubit gates.

Increasing circuit complexity within quantum systems based on superconducting qubits necessitates high connectivity while retaining qubit coherence. Classical micro-electronic systems have addressed interconnect density challenges by using 3D integration with interposers containing through-silicon vias (TSVs), but extending these integration techniques to superconducting quantum systems is challenging. Here, we discuss our approach for realizing high-aspect-ratio superconducting TSVs—10 μm wide by 20 μm long by 200 μm deep—with densities of 100 electrically isolated TSVs per square millimeter. We characterize the DC and microwave performance of superconducting TSVs at cryogenic temperatures and demonstrate superconducting critical currents greater than 20 mA. These high-aspect-ratio, high critical current superconducting TSVs will enable high-density vertical signal routing within superconducting quantum processors.