Sigray's axially symmetric x-ray optics enable advanced microanalytical capabilities for focusing x-rays to microns-scale to submicron spot sizes, which can potentially unlock many avenues for laboratory micro-analysis. The design of these optics allows submicron spot sizes even at low x-ray energies, enabling research into low atomic number elements and allows increased sensitivity of grazing incidence measurements and surface analysis. We will discuss advances made in the fabrication of these double paraboloidal mirror lenses designed for use in laboratory x-ray applications. We will additionally present results from as-built paraboloids, including surface figure error and focal spot size achieved to-date.

Journal Article A New Approach to Microns-Resolution Trace Element and Mineralogy Mapping at PPM Sensitivity for Digital Rock and Geological Research Get access Sylvia JY Lewis, Sylvia JY Lewis Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar SH Lau, SH Lau Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Wenbing Yun, Wenbing Yun Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Benjamin Stripe, Benjamin Stripe Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Alan Lyon, Alan Lyon Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar David Reynolds, David Reynolds Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Sharon Chen, Sharon Chen Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Richard Ian Spink Richard Ian Spink Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 23, Issue S1, 1 July 2017, Pages 2176–2177, https://doi.org/10.1017/S1431927617011540 Published: 04 August 2017

The limitations to achievable x-ray brightness within the laboratory1 for x-ray spectra is a well-known problem for improving the throughput, sensitivity, and resolution of a wide variety of x-ray techniques. Specific examples of such challenges include: throughput in Talbot-Lau interferometry for medical applications, limits to sensitivity in micro x-ray fluorescence (microXRF), and resolution in x-ray microscopy. We will present our patented x-ray source technology and recent developments. The major innovations in our x-ray source are the x-ray anodes, which are comprised of arrays of microstructured metal x-ray emitters embedded within a diamond substrate. The diamond substrate enables highly localized large thermal gradients that passively and rapidly cool the metal microstructures as heat is generated under the bombardment of electrons. Electron power densities, 4X higher than conventional solid metal targets can be achieved on the target even greater for metals of lower thermal conductivity. The thermal advantages of the anode design enables the use of many elements that were previously unsuitable as x-ray source materials, and will enable access to new x-ray characteristic lines to optimize performance in monochromatic x-ray analysis. In addition, we will review practical benefits of our patented FAASTTM (fine array anode source technology) x-ray source over both conventional x-ray sources and newer schemes such as liquid metal anodes2. Advantages include the ability to produce a patterned microbeam optimized for Talbot-Lau interferometry (phase contrast imaging) and the ability to produce various characteristic lines through the incorporation of novel materials (e.g. Au, Pt, Cr) for dual energy capabilities.

and results its application to various research applications. Applications of the system include: distribution analysis of nanoparticles down to 50 nm, trace elemental mapping of metals in biological tissue in the biomedical field of metallomics, geochemical mapping, and advanced materials analysis.

Journal Article Standardless Quantification at Trace Elemental (PPM) Levels Using a Novel Attachment within an Electron Microscope and Microprobe Get access Wenbing Yun, Wenbing Yun Sigray, Inc. Imhoff Drive, Suite I, Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar SH Lau, SH Lau Sigray, Inc. Imhoff Drive, Suite I, Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Benjamin Stripe, Benjamin Stripe Sigray, Inc. Imhoff Drive, Suite I, Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Alan Lyon, Alan Lyon Sigray, Inc. Imhoff Drive, Suite I, Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar David Reynolds, David Reynolds Sigray, Inc. Imhoff Drive, Suite I, Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Sharon Chen, Sharon Chen Sigray, Inc. Imhoff Drive, Suite I, Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Richard Ian Spink, Richard Ian Spink Sigray, Inc. Imhoff Drive, Suite I, Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Sylvia JY Lewis Sylvia JY Lewis Sigray, Inc. Imhoff Drive, Suite I, Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 22, Issue S3, 1 July 2016, Pages 436–437, https://doi.org/10.1017/S1431927616003032 Published: 25 July 2016

Journal Article Novel, High Brightness X-ray Source and High Efficiency X-ray Optic for Development of X-ray Instrumentation Get access Wenbing Yun, Wenbing Yun Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar SH Lau, SH Lau Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Benjamin Stripe, Benjamin Stripe Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Alan Lyon, Alan Lyon Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar David Reynolds, David Reynolds Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Sylvia JY Lewis, Sylvia JY Lewis Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Sharon Chen, Sharon Chen Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Vladimir Semenov, Vladimir Semenov Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Richard Ian Spink Richard Ian Spink Sigray, Inc. Concord, CA USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 22, Issue S3, 1 July 2016, Pages 118–119, https://doi.org/10.1017/S1431927616001446 Published: 25 July 2016

We describe a technique for mapping the distribution and concentrations of trace elements, most notably with capabilities of achieving 1-10 parts per million sensitivities within 1 second and at <8 mu m resolution. The technique features an innovative, high flux microstructured x-ray source and a new approach to x-ray optics comprising a high efficiency twin paraboloidal x-ray mirror lens. The resulting ability to acquire dramatically higher sensitivities and resolution than conventional x-ray fluorescence approaches, and at substantially higher throughput enables powerful compositional mapping for failure analysis, process development, and process monitoring.

Despite significant advances in major advances in laboratory x-ray analysis equipment [1], the major limitation to improving resolution and throughput to levels comparable to that achieved at the synchrotron has been the low brightness of laboratory x-ray sources [2] and poor focusing property of commonly used polycapillary x-ray optics [3]. We present an x-ray excitation beam system enabling flux comparable to second generation bending magnet synchrotrons that incorporates two major innovations: (1) A new type of super bright laboratory source that is designed to be more than 10X brighter than the brightest rotating anode x-ray source currently available. The performance of the source is achieved through use of a novel microstructured anode that incorporates the outstanding thermal and material properties of diamond to create large thermal gradients within target and enables an optimized electron energy deposition profile. Moreover, the target is designed as a linear accumulating x-ray source, such that the x-rays generated by the microstructures are emitted as a single, high brightness x-ray beam. (2) A high efficiency, large solid angle, axially symmetric x-ray mirror lens with a full width half maximum of point spread function down to a 5-10 μm diameter spot at a large (>1 cm) working distance, which is much better than currently achievable with optics such as polycapillaries and tapered monocapillaries. Additionally, the transmission efficiency of the mirror lens is upward of >90% for a wide range of x-rays (compared to 20-40% for the polycapillary x-ray optics commonly used in x-ray analysis equipment) [3].

We are developing a patent-pending x-ray microprobe with substantially unprecedented performance attributes: <5 μm micrometer spot (with 1 μm targeted) on the sample, large working distances of >2 cm, narrow spectral bandwidth, and large x-ray flux. The outstanding performance is enabled by: (1) a revolutionary, patent-pending new type of high flux x-ray source designed to be >10X brighter than the brightest rotating anode x-ray source currently available; (2) a large NA x-ray mirror lens with high spatial resolution, large solid angle collection, and high focusing efficiency; and (3) a detector configuration that enables the collection of 10X more x-rays than current commercially available microXRF designs [1]. The system, shown in Fig. 1, is optimized for mapping composition and contamination in geological samples for oil and gas (e.g. digital rock), mining, semiconductor, and materials samples, including dopant distribution along functional glass and SiC fibers. The sensitivity will be ppm-scale, far surpassing what is possible using charged particle (e.g. EPMA and SEM-EDS) analysis, and up to 1000X throughput over the leading state-of-the-art micro-XRF systems.