Novel focusing optics composed of twin paraboloidal capillaries coated with Pt, for laboratory X-ray sources are presented and characterized. The optics are designed to focus the X-rays, resulting in an achromatic focused beam with photon energies up to 40 keV. The performance of the optics under different operational conditions is studied by comparing the energy-photon count spectra of the direct and focused beams. Based on these analyses, the optics gain and efficiency as a function of photon energy are determined. A focal spot of 8.5 µm with a divergence angle of 0.59° is observed. The obtained characteristics are discussed and related to theoretical considerations. Moreover, the suitability and advantages of the present optics for X-ray microdiffraction is demonstrated using polycrystalline aluminium. Finally, possibilities for further developments are suggested.

The focusing property of an ellipsoidal monocapillary has been characterized using the ptychography method with a 405 nm laser beam. The recovered wavefront gives a 12.5×10.4μm2 focus. The reconstructed phase profile of the focused beam can be used to estimate the height error of the capillary surface. The obtained height error shows a Gaussian distribution with a standard deviation of 1.3 μm. This approach can be used as a quantitative tool for evaluating the inner functional surfaces of reflective optics, complementary to conventional metrology methods.

Focusing soft X-ray beams to small spots enables many powerful X-ray analysis techniques for small spot analysis and/or imaging. At the MAESTRO beamline [1], located at the Advanced Light Source in...

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Sigray's axially symmetric x-ray optics enable advanced microanalytical capabilities for focusing x-rays to microns-scale to submicron spot sizes, which can potentially unlock many avenues for laboratory micro-analysis. The design of these optics allows submicron spot sizes even at low x-ray energies, enabling research into low atomic number elements and allows increased sensitivity of grazing incidence measurements and surface analysis. We will discuss advances made in the fabrication of these double paraboloidal mirror lenses designed for use in laboratory x-ray applications. We will additionally present results from as-built paraboloids, including surface figure error and focal spot size achieved to-date.

In last year's report [1], we discussed the design and requirements of the optical projection module (Projection Optics Box [POB]) for the 0.5-NA Micro-field Exposure Tool (MET5) and the resulting challenges. Over the course of this past year, we have completed and fully qualified the metrology of individual mirrors. All surface figure errors have been measured over seven orders of magnitude with spatial periods ranging from the full clear aperture down to 10 nm. The reproducibility of the full aperture tests measures 16 pm RMS for the M1 test and 17 pm for the M2 test with a target of 30 pm for both tests. Furthermore, we achieved excellent results on scatter and flare: For scatter, both mirrors perform about a factor of two below specification. For flare, the larger M2 mirror performs well within and the smaller M1 mirror about a factor of two below specification. In addition, we have developed processes for correcting surface figure errors for both mirrors and have successfully demonstrated high-reflectivity coatings on pathfinder mirrors. Further, we have achieved significant goals with respect to the design, assembly, metrology and alignment of the projection module. This paper reviews this progress and describes the next step in the ambitious MET5 POB development program.