In this work, we present recent improvements on the stress-optic actuator on the silicon nitride-based waveguide platform (TriPleX) in the telecommunication C-band. In our stress-optic phase modulator the refractive index of the waveguiding materials is controlled by the stress-optic effect induced by actuating a 2 μm thick PZT (lead zirconate titanate) layer on top of the TriPleX waveguide geometry. The efficiency of the modulator is optimized by, amongst others, focusing the applied stress in the waveguide core region through a local increase of the top cladding. Using a Mach-Zehnder interferometer, we measured a phase shift of π, i.e. the half-wave voltage, Vπ, at 12 V and even a phase shift of 2 π at 25 V at a wavelength of 1550 nm using a modulator with a total length of 15 mm. Even smaller voltages were measured for devices using a reduced top cladding. The measured static power consumption of our stress-optic modulator is well below 1 μW as it is only determined by small leakage currents (< 0.1 μA) and, therefore, more than 5 order of magnitude lower than that of conventional thermo-optic phase actuators. The total footprint of the stress-optic actuator is similar to that of thermo-optic actuators due to lower cross-talk to neighboring actuator. These specifications along with minimal excess losses make stress-optic actuator an excellent choice for next generation integrated photonic circuits that require a large number of actuators in silicon photonics in general and in the TriPleX platform in particular.

Optical Coherence Tomography (OCT) has made it into the clinic in the last decade with systems based on bulk optical components. The next disruptive step will be the introduction of handheld OCT systems. Photonic Integrated Circuit (PIC) technology is the key enabler for this further miniaturization. PIC technology allows signal processing on a stable platform and the implementation of a common path interferometer in that same platform creates a robust fully integrated OCT system with a flexible fiber probe. In this work the first PIC based handheld and integrated common path based spectral domain OCT system is described and demonstrated. The spectrometer in the system is based on an Arrayed Waveguide Grating (AWG) and fully integrated with the CCD and a fiber probe into a system operating at 850 nm. The AWG on the PIC creates a 512 channel spectrometer with a resolution of 0.22 nm enabling a high speed analysis of the full A-scan. The silicon nitride based proprietary waveguide technology (TriPleXTM) enables low loss complex photonic structures from the visible (405 nm) to IR (2350 nm) range, making it a unique candidate for OCT applications. Broadband AWG operation from visible to 1700 nm has been shown in the platform and Photonic Design Kits (PDK) are available enabling custom made designs in a system level design environment. This allows a low threshold entry for designing new (OCT) designs for a broad wavelength range.

An overview of the most recent developments and improvements to the low-loss TriPleX Si3N4 waveguide technology is presented in this paper. The TriPleX platform provides a suite of waveguide geometries (box, double stripe, symmetric single stripe, and asymmetric double stripe) that can be combined to design complex functional circuits, but more important are manufactured in a single monolithic process flow to create a compact photonic integrated circuit. All functionalities of the integrated circuit are constructed using standard basic building blocks, namely straight and bent waveguides, splitters/combiners and couplers, spot size converters, and phase tuning elements. The basic functionalities that have been realized are: ring resonators and Mach–Zehnder interferometer filters, tunable delay elements, and waveguide switches. Combination of these basic functionalities evolves into more complex functions such as higher order filters, beamforming networks, and fully programmable architectures. Introduction of the active InP chip platform in a combination with the TriPleX will introduce light generation, modulation, and detection to the low-loss platform. This hybrid integration strategy enables fabrication of tunable lasers, fully integrated filters, and optical beamforming networks.

The next generation of applications in integrated microwave photonics[1], such as optical beam forming networks or programmable photonic processors[2], requires complex chip designs with hundreds or even thousands of actuators and low propagation losses. While passive material platforms such as silicon nitride possess ultra-low losses in the telecommunication C-Band, today their on-chip phase actuation, however, is solely based on thermo-optic tuners and, hence, suffering from huge power dissipation.

In this work, we demonstrate the first stress-optic modulator in a silicon nitride-based waveguide platform (TriPleX) in the telecommunication C-band. In our stress-optic phase modulator the refractive index of the waveguiding materials is controlled by the stress-optic effect induced by actuating a 2 mu m thick PZT layer on top of the TriPleX waveguide geometry. The efficiency of the modulator is optimized by, amongst others, focusing the applied stress in the waveguide core region through a local increase of the top cladding. Using a Mach-Zehnder interferometer, we measured a half-wave voltage, V-pi, at 34 V at a wavelength of 1550 nm using a modulator with a total length of 14.8 mm. The measured static power consumption of our stress-optic modulator is in the mu W-region as it is only determined by small leakage currents (< 0.1 mu A), while the dynamic power consumption at a rise time of 1 ms (1 kHz excitation) is less than 4 mW per modulator. The stress optical modulator goes with an excess loss of 0.01 dB per modulator only. This is in line with the typical low loss characteristics of TriPleX waveguides, being < 0.1 dB/cm at a wavelength of 1550 nm. These specifications make stress-optic modulators an excellent choice for next generation optical beam forming networks with a large number of actuators in silicon photonics in general and in the TriPleX platform in particular.