Detecteurs sans fil concus pour enregistrer et transmettre des donnees et detecter, et eventuellement se declencher pour controler, des proprietes physiques d’un milieu, et eventuellement provoquer des changements dans ce milieu. Selon un aspect, un detecteur sans fil peut comprendre un module collecteur d’energie; un module regulateur de tension; un module oscillateur transducteur; et une bobine de transmission. Le module regulateur de tension est relie electriquement au module collecteur d’energie et est concu pour se declencher a un niveau de tension minimal. Le module oscillateur transducteur est relie electriquement au module regulateur de tension et est concu pour convertir une propriete physique detectee en un signal electrique. La bobine de transmission est en outre concue pour recevoir le signal electrique et le transmettre a une antenne externe.

This paper presents the realization of a magnetic induction machine. The development of this machine is part of an ongoing project to create high-power density electric microgenerators for use in portable-power applications. The results reported here focus on testing a first-generation nonlaminated electromagnetic actuator, a metrology device designed for exploring and characterizing the fabrication process and the operating behavior of the magnetic induction micromachine. Achieving high power density requires large electrical currents and magnetic fluxes, which necessitate thick, multilayered microstructures that are difficult to fabricate. The batch-fabrication schemes developed as part of this work are based on low-temperature micromolding that makes extensive use of various ultra-thick photoresists and electroplating of electrical conductors (Cu) and ferromagnetic materials (Ni-Fe 80%-20%), resulting in the successful fabrication of a multilayer two-phase planar stator and a planar rotor. To evaluate the performance of the complete machine (stator plus rotor), a 4-mm-diameter, 500-/spl mu/m-thick electroplated Ni-Fe rotor is tethered to a series of flexible structures that prevent it from making a complete revolution, but allow accurate torque performance extraction. The tethered induction micromotor studied here exhibits torque production as high as 4.8 /spl mu/N/spl middot/m.

This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density, silicon-based microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni/sub 80/Fe/sub 20/, Co/sub 65/Fe/sub 18/Ni/sub 17/) within bulk-micromachined and fusion-bonded silicon to form the machine structures. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 /spl mu/N/spl middot/m.

Fabrication methods for integrating thick (tens or hundreds of micrometers) electroplated metallic microstructures inside fusion-bonded silicon wafers are proposed and validated. Cu and Ni/sub 80/Fe/sub 20/ (permalloy) test structures were embedded inside of cavities in silicon wafers, which were fusion-bonded at 500/spl deg/C for 4h with nearly 100% yield. Resistance tests validated the electrical integrity of the metals after annealing, and magnetic measurements indicated the Ni-Fe maintained its magnetic performance after annealing. Additional mechanical tests verified a strong, uniform bond, and that the presence of the metals does not degrade the bond strength. These results demonstrate the ability to integrate conductive and magnetic materials in wafer-bonded silicon, a method useful for a variety of multiwafer, MEMS devices.