Although they enabled several advances in the field of optomechanics, optomechanical disk resonators have not yet been qualified for operation in the quantum regime of motion. We present the experimental demonstration of an optomechanical disk resonator prepared in the quantum ground state. With a gigahertz frequency, the mechanical breathing mode of the investigated semiconductor disk reaches a level of excitation below a single phonon when cooled in a dilution refrigerator. We quantify the phonon occupancy by performing sideband thermometry: a conical optical fiber is evanescently coupled to the disk optical whispering-gallery mode, and Stokes and anti-Stokes photons scattered by phonon emission and absorption are counted on a single-photon detector. We measure a suppression of the absorption process corresponding to a mean phonon occupancy of 0.66±0.20. Beyond ground-state cooling, we experimentally investigate the mechanisms ruling laser-induced heating, which ultimately limits the lowest measurable phonon occupancy, and witness both intracavity and extracavity heating.

We present an optomechanical device platform for characterization of rheological, optical and thermal properties of fluids on the micron scale. A suspended silicon microdisk resonator with a vibrating mass of 100 pg and an effective probing volume of less than a pL is used to monitor properties of different fluids at rest. By employing analytical models for fluid-structure interactions, thermo-optical effects and thermal diffusion, our platform determines the viscosity, density, compressibility, refractive index and thermal conductivity of the fluid, in a compact measurement setup. A single measurement takes as short as 70 μs, and the employed power can be less than 100 μW, guaranteeing measurement at rest and in thermal equilibrium.

We discuss our approach to atomic force microscopy using optomechanical probes targeting frequencies above 100 MHz. This platform could provide access to a new operational regime, with potential applications in bridging conventional and ultrafast nanomechanical sensing techniques.

Merging optomechanics and polaritonics opens stimulating perspectives like the giant enhancement of optomechanical interaction and the enrichment of optomechanics with effective nonlinear photons. The experimental implementation of these concepts has however remained elusive. Here we report on the resonant optical control of polaritonic optomechanical resonators constituted of semiconductor disks embedding quantum wells. Whispering gallery photons and quantum well excitons strongly couple, leading to the emergence of polaritons that couple to the mechanical vibrations of the disk. We perform resonant optomechanical frequency response experiments on these resonators, modeled introducing a minimal set of constitutive equations, from which we extract the polariton-modified optomechanical coupling g_0 and the polariton nonlinearities. We observe a boost of g_0 by more than a decade compared to bare photons, reaching to a record g_0 for whispering gallery resonators of 22 MHz, and analyze experimentally and theoretically its evolution as function of the polariton's composition. We also measure a clear hierarchy of three polaritonic nonlinearities, again analyzed as function of polariton composition, establishing a bridge between past unconciliated reports in polaritonics. Grounded on experimental and theoretical foundations, resonant polaritonic optomechanics is set ready for an optomechanical exploration of quantum fluids of polaritons.

La science de l’optomécanique, qui étudie le couplage de la lumière au mouvement de systèmes mécaniques, a connu un essor inattendu depuis 20 ans. À présent miniaturisés, les résonateurs optomécaniques mesurent des signaux physiques avec une sensibilité et une bande-passante remarquables. Ces technologies de capteurs optomécaniques impactent aujourd’hui la science de la matière, qu’elle soit solide, liquide ou vivante.

Despite appealing high-symmetry properties that enable high quality factor and strong confinement, whispering gallery modes of spherical and circular resonators have been absent from the field of quantum-well exciton polaritons. Here we observe whispering gallery exciton polaritons in a Gallium Arsenide microdisk cavity filled with Indium Gallium Arsenide quantum wells, the testbed materials of polaritonics. Strong coupling is evidenced in photoluminescence and resonant spectroscopy, accessed through concomitant confocal microscopy and near-field optical techniques. Excitonic and optical resonances are tuned by varying temperature and disk radius, revealing Rabi splittings between 5 and 10 meV. A dedicated analytical quantum model for such circular polaritons is developed, which reproduces the measured values. At high power, lasing is observed and accompanied by a blueshift of the emission that points to the regime of polariton lasing.

Using conical optical fibers, we explore new methods for coupling light to nanophotonic structures operated in constrained environments. With a single-sided conical fiber taper, we demonstrate efficient coupling to an on-chip nanophotonic bus waveguide immersed in a liquid. In the aim of coupling light into a target whispering gallery disk resonator, we then replace such on-chip nanophotonic bus waveguide with two conical fibers joined face to face. This latter approach leads to highly efficient coupling superior to 90% and is shown to be stable within a vibrating pulse tube cryostat operating at low temperatures. It is demonstrated in the telecom band and in the near infrared close to 900 nm of wavelength. Conical fiber methods hence enable reaching the coupling performances required in quantum optics or sensing experiments, even in stringent environments where signal-to-noise had remained a challenge.

We explore new methods for coupling light to on-chip gallium arsenide nanophotonic structures using etched conical optical fibers. With a single-sided conical fiber taper, we demonstrate efficient coupling to an on-chip photonic bus waveguide in a liquid environment. We then show that it is possible to replace such on-chip bus waveguide by two joined conical fibers in order to directly couple light into a target whispering gallery disk resonator. This latter approach proves compliant with demanding environments, such as a vibrating pulse tube cryostat operating at low temperature, and it is demonstrated both in the telecom band and in the near infrared close to 900 nm of wavelength. The versatility, stability, and high coupling efficiency of this method are promising for quantum optics and sensing experiments in constrained environments, where obtaining high signal-to-noise ratio remains a challenge.

Optical and mechanical resonators have each been abundantly employed in sensing applications, albeit following separate development. Here we show that bringing together optical and mechanical resonances in a unique sensing device significantly improves the sensor performance. To that purpose, we employ nanoscale optomechanical disk resonators that simultaneously support high quality optical and mechanical modes localized in tiny volumes, which provide extraordinary sensitivities. We perform environmental sensing, but the conclusions of our work extend to other sensing applications. First, we determine optical and mechanical responsivities to temperature and relative humidity changes. Second, by characterizing mechanical and optical frequency stabilities, we determine the corresponding limits of detection. Mechanical modes appear more sensitive to relative humidity changes, while optical modes appear more sensitive to temperature ones, reaching, respectively, 0.05% and 0.6 mK of independent resolution. We then prove that simultaneous optical and mechanical monitoring enables disentangling both effects and demonstrates 0.1% and 1 mK resolution, even considering that both parameters may change at the same time. Finally, we highlight the importance of actively tracking the optical mode when optomechanical sensor devices. Not doing so enforces tedious independent calibration, influences the device sensitivity during the experiment, and shortens the sensing range. The present work hence clarifies the requirements for the optimal operation of optomechanical sensors, which will be of importance for chemical and biological sensing.

Radial mechanical modes of miniature disk-shaped resonators are promising candidates for probing the ultra-high-frequency rheological properties of liquids. However, the lack of an analytical fluid–structure model hinders the inference of liquid properties from the experimental measurement of such radial vibrations. Here, we develop analytical models for the case of a disk vibrating in a compressible viscous liquid. Closed-form expressions for the mechanical quality factor and resonant frequency shift upon immersion are obtained and compared with the results of numerical modeling for a few significant cases. At frequencies above 1 GHz, our model points out the significance of compressibility effects.

Nanomechanical mass spectrometry allows characterization of analytes with broad mass range, from small proteins to bacterial cells, and with unprecedented mass sensitivity. In this work, we show a novel multifrequency nanomechanical mass spectrometer prototype designed for focusing, guiding and soft-landing of nanoparticles and viral particles on a nanomechanical resonator surface placed in vacuum. The system is compatible with optomechanical disk resonators, with an integrated optomechanical transduction method, and with the laser beam deflection technique for the measurement of the vibrations of microcantilever resonators. The prototype allows the in-vacuum alignment of resonators thanks to a dedicated visualization system. Finally, in this work, we have demonstrated the detection of gold nanoparticles, polystyrene nanoparticles and phage G viruses with optomechanical disks and microcantilever resonators.

An ultra-sensitive optomechanical nano-sensor is employed to measure the mass, the volume, and the elastic response of a single virus-like nanoparticle in ambient conditions. In a second set of experiments, the nanoparticle is replaced by a nanodroplet, whose evaporation is tracked in real-time with millisecond resolution, down to a residual precursor film. These results demonstrate the potential of optomechanical devices to analyze the physical properties of a single nano-object with high-precision and temporal resolution.

Atomic force microscopy (AFM) has been constantly supporting nanosciences and nanotechnologies for over 30 years, being present in many fields from condensed matter physics to biology. It enables measuring very weak forces at the nanoscale, thus elucidating interactions at play in fundamental processes. Here we leverage the combined benefits of micro/nanoelectromechanical systems and cavity optomechanics to fabricate a sensor for dynamic mode AFM at a frequency above 100 MHz. This is two decades above the fastest commercial AFM probes, suggesting opportunity for measuring forces at timescales unexplored so far. The fabrication is achieved using very-large scale integration technologies inherited from photonic silicon circuits. The probe's ring optomechanical cavity is coupled to a 1.55 um laser light and features a 130 MHz mechanical resonance mode with a quality factor of 900 in air. A limit of detection in displacement of 3.10-16 m/sqrt(Hz) is obtained, enabling the detection of the Brownian motion of the probe and paving the way for force sensing experiments in the dynamic mode with a working vibration amplitude in the picometer range. Inserted in a custom AFM instrument embodiment, this optomechanical sensor demonstrates the capacity to perform force-distance measurements and to maintain a constant interaction strength between tip and sample, an essential requirement for AFM applications. Experiments show indeed a stable closed-loop operation with a setpoint of 4 nN/nm for an unprecedented sub-picometer vibration amplitude, where the tip-sample interaction is mediated by a stretched water meniscus.

We demonstrate multimode optomechanical sensing of individual nanoparticles with a radius between 75 and 150 nm. A semiconductor optomechanical disk resonator is optically driven and detected under ambient conditions, as nebulized nanoparticles land on it. Multiple mechanical and optical resonant signals of the disk are tracked simultaneously, providing access to several pieces of physical information about the landing analyte in real time. Thanks to a fast camera registering the time and position of landing, these signals can be employed to weight each nanoparticle with precision. Sources of error and deviation are discussed and modeled, indicating a path to evaluate the elasticity of the nanoparticles on top of their mere mass. The device is optimized for the future investigation of biological particles in the high megadalton range, such as large viruses.

We demonstrate polarization, phase, and amplitude control of second harmonic generation in diffractive all-dielectric nonlinear metasurfaces.

Semiconductor microresonators embedding quantum wells can host tightly confined and mutually interacting excitonic, optical, and mechanical modes at once. We theoretically investigate the case where the system operates in the strong exciton-photon coupling regime, while the optical and excitonic resonances are parametrically modulated by the interaction with a mechanical mode. Owing to the large exciton-phonon coupling at play in semiconductors, we predict an enhancement of polariton-phonon interactions by 2 orders of magnitude with respect to mere optomechanical coupling: a near-unity single-polariton quantum cooperativity is within reach for current semiconductor resonator platforms. We further analyze how polariton nonlinearities affect dynamical backaction, modifying the capability to cool or amplify the mechanical motion.

Nanoelectromechanical resonators have been successfully used for a variety of sensing applications. Their extreme resolution comes from their small size, which strongly limits their capture area. This leads to a long analysis time and the requirement for large sample quantity. Moreover, the efficiency of the electrical transductions commonly used for silicon resonators degrades with increasing frequency, limiting the achievable mechanical bandwidth and throughput. Multiplexing a large number of high-frequency resonators appears to be a solution, but this is complex with electrical transductions. We propose here a route to solve these issues, with a multiplexing scheme for very high-frequency optomechanical resonators. We demonstrate the simultaneous frequency measurement of three silicon microdisks fabricated with a 200 mm wafer large-scale process. The readout architecture is simple and does not degrade the sensing resolutions. This paves the way toward the realization of sensors for multiparametric analysis with an extremely low limit of detection and response time.

Tracking the evolution of an individual nanodroplet of liquid in real-time remains an outstanding challenge. Here a miniature optomechanical resonator detects a single nanodroplet landing on a surface and measures its subsequent evaporation down to a volume of twenty attoliters. The ultra-high mechanical frequency and sensitivity of the device enable a time resolution below the millisecond, sufficient to resolve the fast evaporation dynamics under ambient conditions. Using the device dual optical and mechanical capability, we determine the evaporation in the first ten milliseconds to occur at constant contact radius with a dynamics ruled by the mere Kelvin effect, producing evaporation despite a saturated surrounding gas. Over the following hundred of milliseconds, the droplet further shrinks while being accompanied by the spreading of an underlying puddle. In the final steady-state after evaporation, an extended thin liquid film is stabilized on the surface. Our optomechanical technique opens the unique possibility of monitoring all these stages in real-time.