This paper describes the study carried out in order to characterize the influence of the main fabrication steps of the silicon nano-gauge on their l/f noise. Geometry of the nano-gauge, doping level, thinning process of gauges, doping before or after gauges patterning, release process and treatments for trap curing have been studied. Gauges release has a great impact on the l/f noise: it increases the noise by a factor of up to 100 for the smallest gauges. N2H2 annealing and O 2 plasma treatment reduce the noise generated by the release of the gauge. We assume that the origin behind the noise increase is the trapping-detrapping of carriers in surface traps of the nano-gauge.

This paper reports for the first time the experimental pressure response of an ultra-compact and highly linear absolute pressure sensor based on suspended piezoresistive nano-gauges with mechanical amplification and embedded low voltage self-test. Nano-gauges being suspended and structurally protected from the external environment, it can be used in high temperature and harsh environments. Unidirectional and amplified stress on the nano-gauges allows drastic miniaturization (0.12mm 2 footprint for a 1 bar structure). In addition, the M&NEMS technology used for the manufacturing enables its direct cointegration with inertial sensors.