We report the first formal verification of a lock-free list, skiplist, and a skiplist-based priority queue against a strong specification in relaxed memory consistency (RMC). RMC allows relaxed behaviors in which memory accesses may be reordered with other operations, posing two significant challenges for the verification of lock-free traversals. (1) Specification challenge : formulating a specification that is flexible enough to capture relaxed behaviors, yet simple enough to be easily understood and used. We address this challenge by proposing the per-key linearizable history specification that enforces a total order of operations for each key that respects causality, rather than a total order of all operations. (2) Verification challenge : devising verification techniques for reasoning about the reachability of edges for traversing threads, which can read stale edges due to relaxed behaviors. We address this challenge by introducing the shadowed-by relation that formalizes the notion of outdated edges. This relation enables us to establish a total order of edges and thus their associated operations for each key, required to satisfy the strong specification. All our proofs are mechanized on the iRC11 relaxed memory separation logic, built on the Iris framework in Rocq.

The recent advances in super-resolution fluorescence microscopy, including single-molecule localization microscopy (SMLM), has enabled the study of previously inaccessible details, such as the organization of proteins within cellular compartments and even nanostructures in nonbiological nanomaterials, such as the polymers and semiconductors. With such developments, the need for the development of various computational nanostructure analysis methods for SMLM images is also increasing; however, this has been limited to protein cluster analysis. In this study, we developed an edge structure analysis method for pointillistic SMLM images based on the line edge roughness and power spectral density analyses. By investigating the effect of point properties in SMLM images, such as the size, density, and localization precision on the roughness measurement, we successfully demonstrated this analysis method for experimental SMLM images of actual samples, including the semiconductor line patterns, cytoskeletal elements, and cell membranes. This systematic investigation of the effect of each localization rendering parameter on edge roughness measurement provides a range for the optimal rendering parameters that preserve the relevant nanoscale structure of interest. These new methods are expected to expand our understanding of the targets by providing valuable insights into edge nanoscale structures that have not been previously obtained quantitatively.

Blind deblurring is an ill-posed inverse problem involving the retrieval of a clear image and blur kernel from a single blurry image. The challenge arises considerably when strong noise, where its level remains unknown, is introduced. Existing blind deblurring methods are highly susceptible to noise due to overfitting and disturbances in the solution space. Here, we propose a blind deblurring method based on a noiserobust kernel estimation function and deep image prior (DIP). Specifically, the proposed kernel estimation function effectively estimates the blur kernel even for strongly noisy blurry images given a clear image and optimal condition. Therefore, DIP is adopted for the generation of a clear image to leverage its natural image prior. Additionally, the multiple kernel estimation scheme is designed to address a wide range of unknown noise levels. Extensive experimental studies, including simulated images and real-world examples, demonstrate the superior deblurring performance of the proposed method. The official code is uploaded in https:// github.com/csleemooo/BD noise robust kernel estimation.

Memory management for optimistic concurrency in unmanaged programming languages is challenging. Safe memory reclamation (SMR) algorithms help address this, but they are difficult to use correctly. Automatic reference counting provides a simpler interface, but it has been less efficient than SMR algorithms. Recently, there has been a push to apply the optimizations used in garbage collectors for managed languages to elide reference count updates from local references. Notably, Fast Reference Counter, OrcGC, and Concurrent Deferred Reference Counting use SMR algorithms to protect local references by deferring decrements or reclamation. While they show a significant performance improvement, their use of deferral may result in growing memory usage due to slow reclamation of linked structures, and suboptimal performance in update-heavy workloads. We present Concurrent Immediate Reference Counting (CIRC), a new combination of SMR algorithms with reference counting. CIRC employs deferral like other modern methods, but it avoids their problems with novel algorithms for (1) immediately reclaiming linked structures recursively by tracking the reachability of each object, and (2) applying decrements immediately and deferring only the reclamation. Our experiments show that CIRC’s memory usage does not grow over time and is only slightly higher than the underlying SMR. Moreover, CIRC further narrows the performance gap between the underlying SMR, positioning it as a promising solution to safe automatic memory management for highly concurrent data structures in unmanaged languages.

Reclamation schemes for concurrent data structures tackle the challenge of synchronizing memory accesses and reclamation. Early schemes faced a tradeoff between robustness and efficiency : hazard pointers (HP) bounds the number of unreclaimed nodes, but it is inefficient due to per-node protection; and RCU sacrifices robustness for efficiency as a single thread may block the entire reclamation. Recent schemes attempt to break the tradeoff by sending signals to blocking threads to abort their operations. However, they are (1)inefficient due to starvation in long-running operations and frequent signals, and (2)inapplicable to a wide class of data structures. We design a novel reclamation scheme that overcomes the above limitations. To address the long-running operations and applicability, we propose HP-RCU, integrating RCU-expedited traversal that alternates between HP and RCU phases. To additionally ensure robustness against stalled threads, we develop HP-BRCU by modularly replacing RCU with bounded RCU (BRCU) that efficiently bounds the duration of RCU phases by rarely sending signals. We show that HP-BRCU is robust, widely applicable, and as efficient as RCU, outperforming robust schemes across various workloads.

Linearizability is the de facto standard for correctness of concurrent objects—it essentially says that all the object’s operations behave as if they were atomic. There have been a number of recent advances in developing increasingly strong linearizability specifications for relaxed memory consistency (RMC), but scalable proof methods for these specifications do not exist due to the challenges arising from out-of-order executions (requiring event reordering) and selected synchronization (requiring tracking of view transfers). We propose a proof recipe for the linearizable history specifications by Dang et al. in the Iris-based iRC11 concurrent separation logic in Coq. Key to our proof recipe is the notion of object modification order (OMO) , which generalizes the modification order of the C11 memory model to an object-local setting. Using OMO we minimize the conditions that need to be proved for event reordering. To enable proof reuse for concurrent libraries that are built on top of others, OMO provides the novel notion of a commit-with relation that connects the linearization points of the lower and upper libraries. Using our recipe, we verify the linearizability of the Michael–Scott queue, the elimination stack, and Folly’s MPMC queue in RMC for the first time; and verify stronger specifications of a spinlock and atomic reference counting in RMC than prior work.

An innovative metrology technique has been devised to address current limitations of optical critical dimension (OCD) in advanced semiconductor metrology. This technique is based on multiple self-interferometric pupil imaging, called Mueller matrix self-interferometric pupil ellipsometry (M-SIPE). The system integrates an innovatively designed interference generator in both illuminating and imaging optics, allowing for the massive acquisition of full polarization information across entire angles around the device. The vast amount of information can offer fully comprehensive structural analysis, accomplishing enhanced sensitivity and the ability to break the well-known parameter correlation issues. The system employs a single-shot holographic measurement technique on the pupil plane, enabling rapid acquisition of threedimensional spectral information, such as wavelengths, incidence angles, and azimuth angles. Thus, unlike conventional OCD tools, M-SIPE can obtain multi-angular and full polarization information without any mechanical movements. We verified the performance of M-SIPE by the experiment of non-patterned wafers of various conditions using an optical testbed. Our results confirmed good agreement between the experiment and theoretical simulations across all angular ranges. Furthermore, the actual device simulation was conducted to show sensitivity enhancement and ability for breaking the parameter correlation issues. The results confirmed that the large amount of angular information from M-SIPE technique could overcome current metrological challenges.

Hazard pointers is a popular semi-manual memory reclamation scheme for concurrent data structures, where each accessing thread announces protection of each object to access and validates that the pointer is not already freed. Validation is typically done by over-approximating unreachability: if an object seems to be unreachable from the root of the data structure, the protecting thread decides not to access the object as it might have been freed. However, many efficient data structures are incompatible with validation by over-approximation as their optimistic traversal strategy intentionally ignores the warning of unreachability to achieve better performance. We design HP++, an extension to hazard pointers that supports optimistic traversal. The key idea is under-approximating unreachability during validation and patching up the potentially unsafe accesses arising from false-negatives. Thanks to optimistic traversal, data structures with HP++ outperform the same-purpose data structures with HP under contention, while consuming a similar amount of memory.

To achieve high accuracy and precision in optical metrology for advanced semiconductors, it is crucial to identify and compensate for errors from optical components and environmental perturbations. In this study, we investigated the sources of the errors in the interferometric ellipsometer developed for next-generation OCD. The objective lens and beam splitters, the critical optical components of the system, are intensively investigated. The system errors induced by temperature fluctuation, wavelength inaccuracy, and defocus were quantitatively examined. We also proposed methods for compensating individual errors and analyzed the effect of the compensation. As a result of error compensation, the accuracy and precision of the system is improved by 6.9 times and 2.3 times, respectively. Although the investigation was conducted based on our interferometric ellipsometry system, the finding is not limited to this system, as these errors are commonly found in most optical metrology systems. The proposed method for error compensation will be essential strategies for various ellipsometry systems suffering from a low level of accuracy and precision.

The recent development of super-resolution fluorescencemicroscopy(SRM) has drastically improved the resolution of light microscopyto the order of tens of nanometers. However, the application of SRMto semiconductor materials remains challenging because fluorophorelabeling on inorganic materials with a high labeling density requiredfor nanoimaging has been limited with conventional surface functionalizationmethods. Here, a novel approach for highly dense material-specificfluorophore labeling methods on silicon-based materials has been developedand demonstrated for SRM imaging of semiconductor line patterns. Thisapproach is shown to selectively and sensitively probe different-sizedsilicon and silica line patterned arrays including edge structureson a wafer in three dimension, which has not been resolved by a conventionalmetrology system. Furthermore, we successfully demonstrate that thisnew method can detect nanoparticle defects with high sensitivity,suggesting its capability as an inspection tool for semiconductordefects. This new nanomaterial imaging approach is expected to drivefurther innovations in metrology tools and applications.

We present advanced application of novel ellipsometry technique, referred to as self-interference pupil ellipsometry (SIPE), integrating self-interference and pupil microscopy to overcome the sensitivity limitations raised from the conventional spectroscopic ellipsometry. We investigated various samples including a SiO2 monolayer, grating patterned wafers, and DRAM wafers to demonstrate outstanding capability of SIPE for metrology. The angular range corresponds to approximately 5,000 acquisition of conventional ellipsometry tools with 2º angular step scanning. From the experimental results and simulation, we expect the sensitivity of SIPE for structure metrology is at least 0.15 nm at a single wavelength and even better for multispectral measurements.

We present an innovative ellipsometry technique called self-interferometric pupil ellipsometry (SIPE), which integrates self-interference and pupil microscopy techniques to provide the high metrology sensitivity required for metrology applications of advanced semiconductor devices. Due to its unique configuration, rich angle-resolved ellipsometric information from a single-shot hologram can be extracted, where the full spectral information corresponding to incident angles from 0° to 70° with azimuthal angles from 0° to 360° is obtained, simultaneously. The performance and capability of the SIPE system were fully validated for various samples including thin-film layers, complicated 3D structures, and on-cell overlay samples on the actual semiconductor wafers. The results show that the proposed SIPE system can achieve metrology sensitivity up to 0.123 nm. In addition, it provides small spot metrology capability by minimizing the illumination spot diameter up to 1 µm, while the typical spot diameter of the industry standard ellipsometry is around 30 µm. As a result of collecting a huge amount of angular spectral data, undesirable multiple parameter correlation can be significantly reduced, making SIPE ideally suited for solving several critical metrology challenges we are currently facing.

Several functional correctness criteria have been proposed for relaxed-memory consistency libraries, but most lack support for modular client reasoning. Mével and Jourdan recently showed that logical atomicity can be used to give strong modular Hoare-style specifications for relaxed libraries, but only for a limited instance in the Multicore OCaml memory model. It has remained unclear if their approach scales to weaker implementations in weaker memory models. In this work, we combine logical atomicity together with richer partial orders (inspired by prior relaxed-memory correctness criteria) to develop stronger specifications in the weaker memory model of Repaired C11 (RC11). We show their applicability by proving them for multiple implementations of stacks, queues, and exchangers, and we demonstrate their strength by performing multiple client verifications on top of them. Our proofs are mechanized in Compass, a new framework extending the iRC11 separation logic, built atop Iris, in Coq. We report the first mechanized verifications of relaxed-memory implementations for the exchanger, the elimination stack, and the Herlihy-Wing queue.

A recently introduced novel concept ellipsometry, characterized by its unique derivation process of directly extracting the polarization information from the hologram image on pupil plane, has been evaluated experimentally targeting for the application to OCD and overlay tools. With an improvement of splitting the hologram on the pupil, this self-interferometric pupil ellipsometry (SIPE) has gained the capability of measuring all of Stokes parameters (S0-S3) throughout the incident angle of 0 to 72 degrees with omnidirectional orientation. A prototype system incorporating SIPE technology has been fabricated to conduct the performance test with patterned test samples for overlay and CD evaluation, the result of which exhibits the sufficient sensitivity to dimension variation and superior repeatability for practical use. The measurement of thousands of ellipsometric data on pupil only takes tens of milliseconds at the most, realized by leveraging the advantages of self-interferometry that does not have any rotating elements in optics. The experimental result demonstrates the consistency with the simulation results based on TEM data within entire pupil. In the front-line of advanced semiconductor manufacturing, the main obstacles to OCD application, low sensitivity and parameter coupling, have been evaluated, which indicates good prospects with SIPE technology.

An innovative self-interferometric pupil ellipsometry (SIPE) technique has been demonstrated to overcome the accuracy and throughput limitations raised from the conventional spectroscopic ellipsometry (SE) tools to precisely measure the optical critical dimensions (OCD) in the advanced semiconductor devices. The proposed SIPE technique will be extremely powerful, because key ellipsometric parameters, Ψ and Δ, from all possible incident angles can be obtained simultaneously from the single measurement, while the conventional SE technique needs to collect several hundreds of measurements to get the identical information. By employing a Nomarski prism, one can angularly separate the reflected light from the wafer into two orthogonally polarized lights. Then, the self-interference pupil ellipsometer could interfere those two beams without an additional reference beam path. The interfered fringe includes rich ellipsometric information at incident angles from -70º to 70º with 0-360º azimuthal directions, where those Ψ and Δ information can be extracted by the novel holographic algorithm we proposed. To verify the usefulness of SIPE system and the algorithms, both experimental and theoretical validation have been performed for the patterned wafers. In short, the proposed system and algorithms, which are completely new concept, show a capability to overcome current metrology challenges by breaking multiple parameter correlations between various structural parameters, eventually resulting in the improved metrology sensitivity and precision. Based on the results presented here, we strongly believe the SIPE is a promising metrology solution that can be eventually replacing the traditional OCD tools.

Polyhydroxyalkanoates (PHAs) are biodegradable polyesters that are intracellularly accumulated as distinct insoluble granules by various microorganisms. PHAs have attracted much attention as sustainable substitutes for petroleum-based plastics. However, the formation of PHA granules and their characteristics, such as localization, volume, weight, and density of granules, in an individual live bacterial cell are not well understood. Here, we report the results of three-dimensional (3D) quantitative label-free analysis of PHA granules in individual live bacterial cells through measuring the refractive index distributions by optical diffraction tomography (ODT). The formation and growth of PHA granules in the cells of Cupriavidus necator, the best-studied native PHA producer, and recombinant Escherichia coli harboring C. necator poly(3-hydroxybutyrate) (PHB) biosynthesis pathway are comparatively examined. Through the statistical ODT analyses of the bacterial cells, the distinctive characteristics for density and localization of PHB granules in vivo could be observed. The PHB granules in recombinant E. coli show higher density and localization polarity compared with those of C. necator, indicating that polymer chains are more densely packed and granules tend to be located at the cell poles, respectively. The cells were investigated in more detail through real-time 3D analyses, showing how differently PHA granules are processed in relation to the cell division process in native and nonnative PHA-producing strains. We also show that PHA granule-associated protein PhaM of C. necator plays a key role in making these differences between C. necator and recombinant E. coli strains. This study provides spatiotemporal insights into PHA accumulation inside the native and recombinant bacterial cells.

Measuring alterations in bacteria upon antibiotic application is important for basic studies in microbiology, drug discovery, clinical diagnosis, and disease treatment. However, imaging and 3D time-lapse response analysis of individual bacteria upon antibiotic application remain largely unexplored mainly due to limitations in imaging techniques. Here, we present a method to systematically investigate the alterations in individual bacteria in 3D and quantitatively analyze the effects of antibiotics. Using optical diffraction tomography, in-situ responses of Escherichia coli and Bacillus subtilis to various concentrations of ampicillin were investigated in a label-free and quantitative manner. The presented method reconstructs the dynamic changes in the 3D refractive-index distributions of living bacteria in response to antibiotics at sub-micrometer spatial resolution.

We demonstrate a high resolution lens-free holographic microscopy in reflection geometry based on a pixel super resolution (SR) method. The lens-free microscopy uses a novel Michelson geometry suitable to image reflective samples with the large field of view, while the Fourier domain SR technique is applied to obtain the high resolution hologram, achieving the sub-pixel resolution of 1.2 μm in the USAF reflection target by utilizing the randomly shifted low resolution images. The proposed compact microscopy technique enables to provide high resolution amplitude and phase imaging, those are suitable for biology and semiconductor imaging applications.