High quality BaTiO3 thin films have been epitaxially grown on SrTiO3 (100) substrates by pulsed laser deposition (PLD) using a single crystal target. The BaTiO3/YBa2Cu3O7 bilayer structures have also been grown on LaAlO3(100) substrate by PLD for ferroelectric thin film devices. All the two kinds of thin films were analysed by x-ray diffraction, high resolution transmission electron microscopy and scanning electron microscopy.
