As the feature size of integrated circuits is reduced to nodes of 7 nm and below, the bulk CMP process of cobalt interconnect requires a very high removal rate of cobalt, while requiring a lower removal rate of TiN as a barrier layer. This paper studies the influence of glycine on the removal rates of Co and TiN and the rate selectivity of both. The results show that with the increase of glycine concentration, the removal rate of Co increases, while the removal rate of TiN decreases, and the selection ratio of the two removal rates increases accordingly. The influence mechanism was explored by static corrosion experiments, electrochemical and surface morphology tests.

Single-crystalline nickel-rich cathode materials (SC-NCM) have emerged as highly promising candidates for lithium-ion batteries, due to their exceptional energy density, elevated operating voltage, and cost-effectiveness. However, these materials are plagued by irreversible phase transformations and lattice oxygen release, which significantly impair their cycling performance. To address the challenges, we propose a straightforward yet highly effective blending modification approach, combined with a high-voltage activation strategy. In this study, SC-NCM materials are mechanically blended with a tailored proportion of lithium-rich materials (LR). The resultant composite cathode materials are subjected to an activation process at 4.5 V exceeding the normal operating voltage of 4.25 V for NCM materials, during the initial three charge-discharge cycles. This high-voltage activation triggers the Li2MnO3 phase transition in the LR material, generating reactive oxygen species vacancies on its surface while releasing a substantial quantity of Li+ ions. The introduction of oxygen vacancies in the LR material fosters robust interfacial interactions with the SC-NCM material, effectively mitigating lattice oxygen release and phase transitions in the latter during cycling. Moreover, the liberated Li+ ions facilitate the formation of stable cathode-electrolyte interphase (CEI) and solid-electrolyte interphase (SEI) films on the surfaces of the cathode and anode materials respectively, thereby enhancing Coulombic efficiency and extending battery lifespan. The optimized LR-NCM/SiOx-Graphite pouch cell exhibits a high Coulombic efficiency of 85.0% and impressive specific capacities of 221.1 mAh g- 1 (0.33C) and 207.2 mAh g- 1 (0.5C). Furthermore, the 3 Ah pouch cell with an energy density of 280 Wh kg- 1 achieves remarkable capacity retention of 83.5% after 500 cycles, demonstrating the efficacy of this facile approach in advancing the performance of nickel-rich cathode materials.

This study showcases the performance of Fe3O4 (S600) derived from the decomposition of siderite in activating peroxymonosulfate (PMS) for the 2,4-dichlorophenol (2,4-DCP) degradation, as well as the enhancement of visible light in the S600/PMS system. With the involvement of visible light, 2 g/L Fe3O4 and 0.5 mM PMS achieved 100 % degradation of 2,4-DCP within 70 min. Singlet oxygen (1O2) and hydroxyl radicals (center dot OH) were the primary reactive species responsible for 2,4-DCP degradation under visible light irradiation based on the scavenging experiments and electron paramagnetic resonance (EPR) analysis. Importantly, compared to the absence of visible light, the visible light boosted 1O2 production and accelerated 2,4-DCP degradation. The effects of various operating parameters on the degradation efficiency were also examined, and the intermediates and possible degradation pathways of 2,4-DCP were identified. This study proves that the integrated utilization of natural siderite derivatives to activate oxidants for pollutant degradation is a promising approach.

This study introduces a novel hydrophobic additive (HSA) to bolster the resistance of cement mortar against sulfate attack in dry-wet cycling environment, achieved by modifying mica powder with stearic acid through high-temperature stirring. Initially, the study examined the impact of HSA contents on water absorption and desorption in modified mortar. Concurrently, a series of tests on modified mortar with varying HSA contents explored sulfate resistance in dry-wet cycling environment, encompassing weight loss rate, relative dynamic elastic modulus (RDME), compressive strength, axial compression and sulfate concentration. Analytical findings unveiled a remarkable reduction of 36.24 % in water absorption and 10.09 % in desorption for HSA modified mortar, resulting in substantial decreases in sulfate concentration and convective zone area. Moreover, the HSA modified mortar exhibited minor damage, with an 8.69 % decrease in RDME and a 14.23 % increase in compressive strength under dry-wet cycling sulfate attack. Lastly, the study elucidated the hydrophobic mechanism of HSA modified mortar and established a damage model considering the effects of the erosion time and HSA contents for dry-wet cycling sulfate attack.

Strain-hardening cementitious composites (SHCC) have been widely studied due to their high toughness and durability. The high cement content increases a huge burden on the cost and CO2 emissions of SHCC. To reduce the environmental impacts of SHCC, this study first develops low-carbon and lightweight SHCC by using high-volume recycled concrete powder (RCP) as supplementary cementitious materials and cenosphere waste as lightweight aggregate. The influence of RCP content (0%, 15%, 30%, and 45% by mass) on the hydration mechanism, mechanical properties, and sustainability of low-carbon and lightweight SHCC was investigated. The results showed that the incorporation of RCP in the SHCC matrix resulted in a decrease in hydration heat with increasing RCP content. The filling and pozzolanic effects of RCP were significantly lower than those of cement. The increased porosity and the presence of the interface transition zone due to RCP incorporation led to reduced compactness of the SHCC, which consequently led to decreased compressive strength and fracture toughness of the cement matrix. While the fracture toughness of the cement matrix was reduced, the SHCC still exhibited remarkable bending toughness and tensile ductility. The developed low-carbon and lightweight SHCC containing 45% RCP showed a density of 1482.5 kg/m3, a tensile strength of 3.94 MPa, and a tensile strain capacity of 6.80%, which successfully pushed the performance of low-carbon and lightweight SHCC. The replacement of cement with high-volume RCP in the low-carbon and lightweight SHCC resulted in a significant reduction in embodied carbon compared to conventional SHCC. Therefore, SHCC combines the advantages of lightweight, low-carbon, and highly ductile, making it a promising material for widespread utilization in concrete structures.

The prevalent overreliance on silica sand within strain-hardening cement-based composites (SHCC) underscores the urgency to address the depletion of natural resource. To address this concern, a novel approach involving the utilization of waste marine clay (WMC), an underutilized construction waste residue, is explored. This study marks the first application of high-volume calcined WMC as a substitute for silica sand within sustainable and cost-effective strain-hardening cement-based composites (SC-SHCC). The investigation encompasses a comprehensive analysis of SC-SHCC, covering mechanical properties, hydration, shrinkage, and cost. The results showed that the integration of calcined WMC instead of silica sand had noticeable improvements in the mechanical properties of SC-SHCC due to the notable pozzolanic activity and filling effect of calcined WMC. The developed SC-SHCC replacing two-thirds of the silica sand with calcined WMC exhibited a compressive strength of 76.34 MPa, a tensile strength of 14.63 MPa, and a tensile strain capacity of 5.99%, which successfully pushed the performance of conventional SHCC. Key indicators such as compressive strength, flexural strength, and tensile strength exhibited promising enhancements as calcined WMC dosage increased. The incorporation of calcined WMC contributed to heightened ettringite formation, thereby improving the tensile strength, and tensile strain energy of SC-SHCC. Besides, SC-SHCC exhibited pronounced drying shrinkage, primarily attributable to the free water evaporation and capillary pore development associated with calcined WMC. Furthermore, substituting calcined WMC for silica sand led to reducing the costs within SC-SHCC production. Therefore, the findings of this study hold promise for advancing the field of SHCC while promoting the environmentally friendly utilization of waste materials.

With the evolution of integrated circuits, the transition from polycrystalline silicon to aluminum as the gate electrode has become prevalent due to its inherent advantages. This study considers the impacts of pH, H 2 O 2 and alanine on the aluminum removal rate and surface roughness during chemical mechanical polishing (CMP) with abrasive colloidal silica. Alanine was incorporated as a complexing agent in the polishing slurry in an acidic environment. The mechanistic role of alanine in the aluminum CMP process was investigated with various techniques, including electrochemical tests, scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), and UV–visible spectroscopy (UV–vis). Additionally, density functional theory (DFT) calculations were used to examine the quantum chemical parameters of alanine and elucidate the complexation mechanism. The experimental results indicated that at an alanine concentration of 1.5 wt%, the Al removal rate was 2124.07 Å min −1 with a surface roughness of 1.33 nm. The interactions between alanine and the aluminum ions (Al 3+ ) yielded soluble Al-alanine complexes, which facilitated corrosion on the Al and enhanced the removal rate.

Compared with synthetic materials, natural mineral materials have the advantages of low cost and easy availability. In the present study, magnetite was prepared by calcination of natural siderite under an N-2 atmosphere and utilized as a heterogeneous material for sulfamethazine (SMT) degradation via peroxydisulfate (PDS) activation. Various characterizations demonstrated that the S600 (siderite calcinated at 600 degrees C for 1 h) had a high specific surface area (57.18 m(2)/g) and high electron transfer ability. Under 1 g/L S600 and 1 mM PDS, 99.9% and 50% of SMT (5 mg/L) and TOC were eliminated in 2 h, with a kinetic constant of 0.026 min(-1). Increasing the S600 dosage and PDS concentration favored SMTdegradation, while inorganic anions and natural organicmatter had the opposite effect. Besides this, Electron spin resonance (ESR) analysis and scavenger experiment results demonstrated that hydroxyl radicals (about 62.3%) and sulfate radicals (about 20.2%) played a major role, while Fe(IV) (about 16.5%) played a minor role in SMT degradation. Moreover, various intermediates for SMT degradation were put forward based on the LC-MS/MS results and their toxicity was predicted to decrease. This work provides a vision for water treatment based on natural mineral materials and presents a new idea for the comprehensive utilization of siderite. (c) 2023 Society of Chemical Industry (SCI).

When the characteristic size of integrated circuits developed to 28 nm and below according to Moore’s Law, aluminum was widely used as a gate material in HKMG structures, and the CMP technology of aluminum gates was a breakthrough in the upgrading of HKMG post-gate process technology. Aluminum gate CMP requirements are much higher than aluminum wiring and Damascus wiring, the key to aluminum gate CMP is to achieve high material removal selectivity and high perfect surface. At home and abroad, the research on aluminum gate CMP is mostly concentrated on removal rate and Al–Co galvanic corrosion. This paper will explore the influence of the rate selection ratio of aluminum and polysilicon under glycine hydrogen peroxide system with different pH conditions via CMP experiments, electrochemical experiments, UV and XPS spectroscopy experiments, etc.

A system of Cu2+/calcite/PDS was constructed to degrade sulfadiazine (SDZ). Different from the traditional Cumediated activation, a low concentration of Cu2+ that met drinking water standards (<= 1 mg/L) transformed into Cu(II) solid in the presence of calcite, and then enhanced the degradation of SDZ via PDS activation over a pH range from 3 to 9. According to scavenger and chemical probe experiments, Cu(III), rather than radicals (hydroxyl radicals and sulfate radicals) and singlet oxygen, was the predominant reactive species, which was responsible for the degradation of SDZ. Based on the results of XRD, ATR-FTIR, and CV curves et al., CuCO3 was the main complex with high reactivity for PDS activation to form Cu(III). Moreover, detailed degradation pathways of sulfadiazine were proposed according to the UPLC-ESI-MS/MS and their toxicity was predicted by ECOSAR. Besides, the real water matrix would not seriously affect the degradation of SDZ in the Cu2+/calcite/ PDS system. In summary, this study reveals a new insight into the synergistic effect of Cu2+ and calcite on the SDZ degradation, and promotes an understanding of the environmental benefits of natural calcite.

Molybdenum (Mo), as a barrier layer material, has great potential in integrated circuit (IC) manufacturing in-dustries. The selection of suitable corrosion inhibitors to control the galvanic corrosion between Mo and the wiring metal is crucial in the Mo chemical mechanical polishing (CMP). In the current study, the inhibition effect of 3-amino-1, 2, 4-triazole (ATA), and benzotriazole (BTA) on Mo was investigated by experimental and theo-retical methods. Static etching test found that the addition of ATA decreased the static etching rate of Mo (from 330 angstrom/min to 36 angstrom/min) more significantly than adding BTA (from 330 angstrom/min to 136 angstrom/min). Potentiodynamic polarization test indicated that ATA or low concentration (lower than 300 ppm) of BTA can improve the anti-corrosion ability of Mo. The smaller contact angle indicated that ATA (39 degrees) was more hydrophilic than BTA (45 degrees) in the formation of films covering the Mo surface. Scanning electron microscopy measurement observed that ATA-absorbed film was more compact and thinner, thus improving the surface morphology of Mo. The electronic properties and reactive sites of ATA were analyzed by quantum chemical calculation. Based on the simulation result, an adsorption model of ATA bonding with Mo basement was built. A large amount of ATA molecules coordinated with Mo atoms with its 4th N atom and formed a passivation film. The film is compact thus exhibits an excellent inhibition performance. Apart from this, the addition of ATA or BTA can improve the stability of solutions. The optimal dosage of ATA or BTA can keep the solution stable for 7 days. This paper combined with experimental techniques and theoretical calculations to further understand the mechanism of novel barrier layer material.

A radar component is made of high-temperature-resistant composite materials. For long-term use at a temperature of 200°C, and to withstand certain temperature impacts, it should have a dielectric constant that is not greater than 3.5 at a certain frequency, a dielectric loss not greater than 0.03, an emissivity not greater than 0.085, and a thickness of no more than 0.15 mm. Aiming at the requirements, the properties of three kinds of organosilicon-modified coating systems were studied, and the optimal coating system that meets the needs of radar are selected. According to the actual situation of the component and the characteristics of the selected coating system, the construction process of the rapid volatilization coating was completed. The coating has effectively resisted the high-temperature effect and played a functional role, providing reliable technical support for the development of the radar.

In this study, a new low-cost carbon-based material was prepared via the carbonization of methylene blue adsorbed halloysite (CMH) at different temperatures in a nitrogen atmosphere, which was named CMH-T (T Temperature). The performance of CMH-T was explored and the effects of initial pH values, catalyst dosage, phenol (PE) concentrations, peroxymonosulfate (PMS) concentrations, and water background compounds on PE degradation were investigated systematically. The results indicated that CMH800 exhibited the best performance to activate PMS for degrading PE. Specifically, 92% PE was degraded within 30 min with a constant rate (kobs) of 0.1186 min-1 in the CMH800/PMS system. Furthermore, CMH800 was efficient over a wide pH range (pH 3-9) and showed a slight inhibition to inorganic anions. Quenching experiments, electron spin resonance (ESR) analysis, and electrochemical analysis confirmed that PE was degraded through non-radical pathways dominated by single oxygen (1O2) and mediated electron transfer processes in the CMH800/PMS system. In addition, the predicted toxicity of intermediates through ECOSAR software based on QSAR (Quantitative Structure Activity Relationship) model indicated that most of the intermediates had a low risk to water environment. Therefore, the CMH800 has a good potential for wastewater treatment applications.

The Internet of Things (IoT) has a significant effect on the development of manufacturing technology. Therefore, according to the analysis of the challenges and opportunities faced by manufacturing industry, this study uses the assembly process of mechanical products as the research object and analyzes the characteristics of IoT-based manufacturing systems. To improve the interconnection, perception, efficiency, and intelligence of the assembly system, this study proposes the concept of IoT-enabled intelligent assembly system for mechanical products (IIASMP). The IIASMP framework, which is based on advanced techniques such as information and communication technology, sensor network, and radio-frequency identification, is then presented. Key technologies under this framework, including assembly resources identification, information interaction technology, multi-source data perception and fusion, intelligent assembly agent, and value-added data and dynamic self-adaptive optimization, are described. Finally, the current results of IIASMP are described in the case study. The proposed framework and methods aims to have an important reference value for applying the key technologies and be used widely in the intelligent manufacturing field.

For the ever-growing demand of advanced lithium-ion batteries, it is highly desirable to grow self-supported micro-/nanostructured arrays on metal substrates as electrodes directly. Thein-situgrowth of electrode materials on the conducting substrates greatly simplifies the electrode fabrication process without using any binders or conductive additives. Moreover, the well-ordered arrays closely connected to the current collectors can provide direct electron transport pathways and enhanced accommodation of strains arisen from lithium ion lithiation/delithiation. This article summarizes our recent work on design and construction of lithium-ion battery electrodes on metal substrates. An aqueous solution-based process and a microemulsion-mediated process have been respectively presented to control the kinetic and thermodynamic processes for the micro-/nanostructured array growth on metal substrates, with particular attention to CuO nanorod arrays and micro-cog arrays successfully prepared on Cu foil substrates. They can be directly used as binder-free electrodes to build advanced lithium-ion batteries with high energy, high safety and high stability.

In real discrete manufacturing industry, task urgency, plan variation and other uncertainties make it difficult to communicate process information. The information gap between the enterprise management level and the process control level in workshop cause low productivity, unsmooth process flow, uncontrollable Work In Process (WIP) quantity and overstocked products. Aiming at this problem, a new RFID-enabled real-time manufacturing operation management system (RT-MOMS) is designed in this paper. In this system, RFID tags are used to mark assembly resources and monitor their status, RFID technology is employed to collect the real-time production information (e.g. equipment, material, WIP, operator, etc.), which can enhance the visibility, track ability and traceability of items of interest. Work-station and zone controller are united via the system integration interface to guarantee the information communication. Meanwhile, intelligent manufacturing resource is introduced to achieve the logical integration of management operation system and the real-time visual management during the assembly process. The interaction process among RT-MOMS, system topology structure and main functional modules are also addressed. The result of RT-MOMS system's application on XinRui automotive gearbox assembly line shows that the proposed system can improve the productivity and quality and promote the application of RFID technology.

In most existed researches on architecture-based software reliability, parameters are mostly assumed as constants. But such an assumption is inconsistent with the practical situation for ignoring the impact on system reliability caused by statistical deviations of parameter estimation. For solving this problem, a judgment method for key parameters in software reliability analysis is proposed in this paper, which is based on the moment estimation theory. In this method, the characteristics of architecture-based software reliability models are analyzed, and the relationships between the system reliability prediction result and the moment estimation values of the parameters are given explicitly, then the impacts of the different parameters on system reliability can be analyzed quantitatively and the key elements can be judged simultaneously. The method can give some new theoretical supports for system reliability controlling, system architecture optimization and optimal allocation of software test resource. In the end of this paper, two actual examples of software system reliability analysis are given to illustrate the effectiveness of the method.

In comparison with conventional lead-acid, nickelcadmium, and even nickel-metal hydride batteries, rechargeable lithium-ion batteries (LIBs) with a hi g er energy density and lower toxicity as promising ener gy storage system become more and more demanding because of the rapid development of sustainable ene rgy, smart grid management, and electric and hybrid vehicles. However, current lithium-ion battery technologies are still far from satisfactory to mee t the increasingly diverse ranges of applications. They s uffer from high cost, intrinsic safety concern, low power density and poor stable performance. To advance bat t ry technologies, it is of great importance to explore novel cathode and anode materials to overcome the problem s. Transition metal oxides such as CuO, NiO and FeO, have received much attention given their high capac ities and reliable safety as conversion-type transition m etal oxide anode materials in lithium-ion batteries , but they still face drawbacks related with a high level of irreversibility and poor cycling life. Here we report a bulk aqueous reaction route to the fabrication of one dimensional (1D) nanostructured array films and a confined microemulsion reaction approach to the fabrication of hierarchical nanostructured arra y films on the surface of metal substrates respectively and demonstrate that they can be used directly as elect rodes for lithium-ion batteries. Compared with powder-for m materials, the nanostructured films grown on metal substrate as electrodes not only simplify electrode preparation, but also reduce the contact resistance . Especially micro-nano hierarchical structured films on metal substrates can more effectively enhance struc ture stability with appropriate surface and interface, a nd thus improve electrochemical properties of the electrode s greatly.

The component reliabilities,the system architecture and the system reliability could be associated and analyzed together with the architecture based software reliability models.Since the reliabilities of components were depicted as constants in most cases,the evaluation of the system reliability was impacted without considering the fault recovery process in the software testing phase.To this end,a simulation method of the software reliability analysis was proposed based on discrete event.Through simulating the component failure process,the system failure process and the fault recovery process,the method is able to reflect the influence of the reliability growth of component,and has both the advantages of SRGM and ABSRM.Finally,the effectiveness of the method was illustrated with two software reliabilities analysis.

A cosurfactant-mediated microemulsion synthesis of free-standing CuO arrays with hierarchical micro-cog architectures on copper substrates has been successfully established. The CuO cog-array films directly employed as anode electrodes derive from thermal dehydration of Cu(OH)(2) arrays grown from copper substrates in the presence of AOT-n-butanol-isooctane-water microemulsions. Introducing n-butanol as a cosurfactant into the ternary AOT-isooctane-water system increases the rigidity of the reverse micelles and it can be selectively adsorbed on particular crystal faces, leading to well-aligned arrays as well as enlarged aspect ratios with average heights of over 6 mm and diameters of 1-2 mu m. This result sharply contrasts with the multilayer film of micro-cog particles with a shortened aspect ratio prepared in the absence of n-butanol. The CuO film electrodes of free-standing micro-cog-arrays exhibit excellent electrochemical performance, including a long cycling life (with capacity retention of 91.6% at 1 C over 300 cycles) and outstanding rate capability even at high current rates (about 466 and 418 mA h g(-1) at high rates of 12 and 15 C) in lithium ion batteries.