physica status solidi (a)Volume 64, Issue 1 p. K27-K30 Short Note The mean kinetic energy of sputtered atoms as a function of the angle of emission D. H. Ildebrandt, D. H. Ildebrandt Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte Massenspektrometrie Search for more papers by this authorR. Manns, R. Manns Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte Massenspektrometrie Search for more papers by this authorH. Düsterhöft, H. Düsterhöft Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte Massenspektrometrie Search for more papers by this author D. H. Ildebrandt, D. H. Ildebrandt Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte Massenspektrometrie Search for more papers by this authorR. Manns, R. Manns Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte Massenspektrometrie Search for more papers by this authorH. Düsterhöft, H. Düsterhöft Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte Massenspektrometrie Search for more papers by this author First published: 16 March 1981 https://doi.org/10.1002/pssa.2210640154Citations: 1 Invalidenstr. 42, DDR-104 Berlin, DDR. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinkedInRedditWechat Citing Literature Volume64, Issue116 March 1981Pages K27-K30 RelatedInformation

physica status solidi (a)Volume 51, Issue 2 p. K151-K154 Short Note Angular distribution in sputtering of metals by 10 keV inert-gas ions D. Hildebrandt, D. Hildebrandt Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte Massenspektrometrie Search for more papers by this authorR. Manns, R. Manns Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte Massenspektrometrie Search for more papers by this author D. Hildebrandt, D. Hildebrandt Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte Massenspektrometrie Search for more papers by this authorR. Manns, R. Manns Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte Massenspektrometrie Search for more papers by this author First published: 16 February 1979 https://doi.org/10.1002/pssa.2210510256 Invalidenstr. 42, DDR-104, Berlin, DDR. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat References 1 H. H. Andersen and H. L. Bay, J. appl. Phys. 46, 2416 (1975). 2 E. P. Eernisse, Appl. Phys. Letters 29, 14 (1976). 3 P. Sigmund, J. Mater. Sci. 8, 1545 (1973). 4 J. J. Ph. Elich, H. E. Rosendaal, H. H. Kersten, D. Onderlinden, J. Kistemaker, and J. Elen, Radiat. Effects 8, 1 (1971). 5 Sh. G. Askerov and D. M. Nasrullayev, VII. Internat. Conf. Atomic Collisions, Moscow 1977. 6 D. Hildebrandt and R. Manns, Radiat. Effects 31, 153 (1977). 7 D. Hildebrandt and R. Manns, to be published. 8 G. Betz, R. Dobrozemsky, and F. P. Viehböck, Ned. Tijdschrift Vacuumtechn. 8, 203 (1970). 9 K. Rödersperger and A. Scharmann, Nuclear Instrum. Methods 132, 355 (1976). 10 B. Emmoth, Th. Fried, and M. Braun, III. Internat. Conf. Plasma Surface Interactions in Controlled Fusion Devices, Culham 1978. Volume51, Issue216 February 1979Pages K151-K154 ReferencesRelatedInformation

Results are given of investigations concerning the angular distribution of sputtering efficiency, obtained at perpendicular bombardment of Cu, Zn and Pb targets with Ne+, Ar+ and Kr+ ions in the energy range 5 to 14 keV. The measurements were carried out using a thermal particle detector. The form of the normalized distributions turned out to be independent of the bombardment energy. For lead targets the distributions are cos-like and for copper and zinc targets they they are broader than the cos distribution. The sputtering efficiencies obtained by integration of the angular distributions show good agreement with other measurements.

When the surface of a solid is bombarded with ions a fraction of the primary energy is reemitted by ion reflection and sputtering. The contribution of ion reflection or sputtering to energy reflection is determined by the mass ratio of the bombarding ions to the target atoms.1,2 In the case of light ions the contribution of reflected ions is dominant. Results for He+ and Ne+ bombardment were described in a previous paper.3 The present paper deals with results for Ar+, Kr+, and Xe+ bombardment of the same targets as investigated before.3 The energies of the mass selected bombarding ions range from 9 to 16 keV. The measurements were carried out by means of the thermic detector described in a separate paper.4 For the given mass ratios most of the reemitted energy is related to sputtering.

physica status solidi (a)Volume 36, Issue 1 p. K93-K97 Short Note Experimental proof of a theoretical relation for the probability of positive ion excitation by bombardment of solid surfaces with 12 keV Ar+ ions H. Düsterhöft, H. Düsterhöft Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte MassenspektrometrieSearch for more papers by this authorR. Manns, R. Manns Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte MassenspektrometrieSearch for more papers by this authorD. Hildebrandt, D. Hildebrandt Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte MassenspektrometrieSearch for more papers by this author H. Düsterhöft, H. Düsterhöft Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte MassenspektrometrieSearch for more papers by this authorR. Manns, R. Manns Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte MassenspektrometrieSearch for more papers by this authorD. Hildebrandt, D. Hildebrandt Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte MassenspektrometrieSearch for more papers by this author First published: 16 July 1976 https://doi.org/10.1002/pssa.2210360169Citations: 10AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinked InRedditWechat Citing Literature Volume36, Issue116 July 1976Pages K93-K97 RelatedInformation

physica status solidi (a)Volume 38, Issue 2 p. K155-K157 Short Note Reflection of kinetic energy during the bombardment of polycrystalline solids with He and Ne ions D. Hildebrandt, D. Hildebrandt Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte MassenspektrometrieSearch for more papers by this authorR. Manns, R. Manns Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte MassenspektrometrieSearch for more papers by this author D. Hildebrandt, D. Hildebrandt Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte MassenspektrometrieSearch for more papers by this authorR. Manns, R. Manns Sektion Physik der Humboldt-Universität zu Berlin, Bereich Angewandte MassenspektrometrieSearch for more papers by this author First published: 16 December 1976 https://doi.org/10.1002/pssa.2210380255Citations: 21AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat Reference 1 H. H. Andersen, Radiat. Effects 3, 51 (1970). 10.1080/00337577008235616 CASGoogle Scholar 2 G. Sidenius, Phys. Letters A 49, 409 (1974). 10.1016/0375-9601(74)90292-8 Web of Science®Google Scholar 3 H. H. Andersen, T. Lenskjaer, G. Sidenius, and H. Sorensen, J. appl. Phys. 47, 13 (1976). 10.1063/1.322360 CASWeb of Science®Google Scholar 4 R. Weissmann and P. Sigmund, Radiat. Effects 19, 7 (1973). 10.1080/00337577308232208 CASGoogle Scholar 5 O. S. Oen and M. T. Robinson, Nucl. Instr. Methods 132, 547 (1976). 10.1016/0029-554X(76)90790-4 Web of Science®Google Scholar 6 J. E. Robinson, Radiat. Effects 23, 29 (1974). 10.1080/00337577408232041 CASWeb of Science®Google Scholar 7 D. Hildebrandt and R. Manns, to be published. Google Scholar 8 W. Pietsch, U. Hauser, and W. Neuwirth, VIth Internat. Conf. Atomic Collisions in Solids, Amsterdam 1975. Google Scholar 9 H. Verbeek, J. appl. Phys. 46, 2981 (1975). 10.1063/1.322038 CASWeb of Science®Google Scholar 10 A. J. Summers, N. J. Freeman, and N. R. Daly, J. appl. Phys. 42, 4774 (1971). 10.1063/1.1659854 CASWeb of Science®Google Scholar 11 W. Eckstein, B. M. U. Scherzer, and H. Verbeek, Internat. Conf. Ion-Surface Interaction, Garching 1972. Google Scholar 12 B. Emmoth, M. Braun, R. Buchta, and H. P. Palenius, Annual Report of Research Institute for Physics, Stockholm 1975. Google Scholar 13 O. S. Oen and M. T. Robinson, to be published. Google Scholar 14 D. Hildebrandt and R. Manns, to be published. Google Scholar Citing Literature Volume38, Issue216 December 1976Pages K155-K157 ReferencesRelatedInformation

Some new experimental results are reported on multiple scattering of H-, He-, Li-, Ne-, Ar-, and Kr-ions in the energy range between 100 and 1000 keV. The scattering foils of carbon and germanium, with thicknesses between 300 and 1100 Å, were self-supporting. The results of the scattering measurements werecompared with the theories of Meyer and Molière, respectively. Absolute deviations from the theory are always less than 20 per cent for the half-widths. A substantially better correspondence between theory and experiment is achieved by fitting the screening parameter of the interaction potential.