Journal Article Expanding the Role of Atom Probe Tomography in Semiconductor Manufacturing and R&D – The Initiation of a Project Between CAMECA Instruments Inc. and imec Get access Robert M Ulfig, Robert M Ulfig CAMECA Instruments Inc, Madison WI, United States Corresponding author: Robert.Ulfig@ametek.com Search for other works by this author on: Oxford Academic Google Scholar David A Reinhard, David A Reinhard CAMECA Instruments Inc, Madison WI, United States Search for other works by this author on: Oxford Academic Google Scholar David J Larson, David J Larson CAMECA Instruments Inc, Madison WI, United States Search for other works by this author on: Oxford Academic Google Scholar Peter Clifton, Peter Clifton CAMECA Instruments Inc, Madison WI, United States Search for other works by this author on: Oxford Academic Google Scholar Olivier Dulac, Olivier Dulac CAMECA SAS Gennevilliers, Cedex, France Search for other works by this author on: Oxford Academic Google Scholar Claudia Fleischmann, Claudia Fleischmann Interuniversitair Microelectronica Centrum, Leuven, BelgiumQuantum-Solid-State Physics, Department of Physics and Astronomy, KU Leuven, Belgium Search for other works by this author on: Oxford Academic Google Scholar Paul van der Heide Paul van der Heide Interuniversitair Microelectronica Centrum, Leuven, Belgium Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 29, Issue Supplement_1, 1 August 2023, Pages 2079–2080, https://doi.org/10.1093/micmic/ozad067.1076 Published: 22 July 2023

Journal Article Improving Analytical Capability via Simultaneous Voltage and Laser Pulsing in Atom Probe Tomography Get access David J Larson, David J Larson CAMECA Instruments Inc., Madison WI, USA Corresponding author: David.larson@ametek.com Search for other works by this author on: Oxford Academic Google Scholar Ty J Prosa, Ty J Prosa CAMECA Instruments Inc., Madison WI, USA Search for other works by this author on: Oxford Academic Google Scholar Yimeng Chen, Yimeng Chen CAMECA Instruments Inc., Madison WI, USA Search for other works by this author on: Oxford Academic Google Scholar David A Reinhard, David A Reinhard CAMECA Instruments Inc., Madison WI, USA Search for other works by this author on: Oxford Academic Google Scholar Isabelle Martin, Isabelle Martin CAMECA Instruments Inc., Madison WI, USA Search for other works by this author on: Oxford Academic Google Scholar Robert M Ulfig, Robert M Ulfig CAMECA Instruments Inc., Madison WI, USA Search for other works by this author on: Oxford Academic Google Scholar Michael Holman, Michael Holman CAMECA Instruments Inc., Madison WI, USA Search for other works by this author on: Oxford Academic Google Scholar Jesse Robinson, Jesse Robinson CAMECA Instruments Inc., Madison WI, USA Search for other works by this author on: Oxford Academic Google Scholar Dan Lenz Dan Lenz CAMECA Instruments Inc., Madison WI, USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 29, Issue Supplement_1, 1 August 2023, Pages 609–610, https://doi.org/10.1093/micmic/ozad067.295 Published: 22 July 2023

Journal Article Wide Field of View Versus High Spatial Resolution and High Sensitivity – the Advantage of Correlative Microscopies (APT, SIMS, EBSD, μXRF) for the Analysis of Minerals Get access Robert Ulfig, Robert Ulfig CAMECA Instruments Inc., Madison, WI, United States Corresponding author: Robert.Ulfig@ametek.com Search for other works by this author on: Oxford Academic Google Scholar Steven Reddy, Steven Reddy Geoscience Atom Probe Facility, John de Laeter Centre, School of Earth and Planetary Sciences, Curtin University, Perth, Australia Search for other works by this author on: Oxford Academic Google Scholar David Saxey, David Saxey Geoscience Atom Probe Facility, John de Laeter Centre, School of Earth and Planetary Sciences, Curtin University, Perth, Australia Search for other works by this author on: Oxford Academic Google Scholar Will Rickard, Will Rickard Geoscience Atom Probe Facility, John de Laeter Centre, School of Earth and Planetary Sciences, Curtin University, Perth, Australia Search for other works by this author on: Oxford Academic Google Scholar Denis Fougerouse, Denis Fougerouse Geoscience Atom Probe Facility, John de Laeter Centre, School of Earth and Planetary Sciences, Curtin University, Perth, Australia Search for other works by this author on: Oxford Academic Google Scholar Mark Pearce, Mark Pearce CSIRO, Kensington, Perth, Australia Search for other works by this author on: Oxford Academic Google Scholar Louise Fisher, Louise Fisher CSIRO, Kensington, Perth, Australia Search for other works by this author on: Oxford Academic Google Scholar Matt Kilburn, Matt Kilburn Centre for Microscopy, Characterization and Analysis, University of Western Australia, Perth, Australia Search for other works by this author on: Oxford Academic Google Scholar Paul Gagliardo, Paul Gagliardo Centre for Microscopy, Characterization and Analysis, University of Western Australia, Perth, Australia Search for other works by this author on: Oxford Academic Google Scholar Peter H Clifton, Peter H Clifton CAMECA Instruments Inc., Madison, WI, United States Search for other works by this author on: Oxford Academic Google Scholar ... Show more David A Reinhard, David A Reinhard CAMECA Instruments Inc., Madison, WI, United States Search for other works by this author on: Oxford Academic Google Scholar David J Larson David J Larson CAMECA Instruments Inc., Madison, WI, United States Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 29, Issue Supplement_1, 1 August 2023, Pages 790–791, https://doi.org/10.1093/micmic/ozad067.393 Published: 22 July 2023

is a viable technique for atom probe tomography (APT) specimen preparation, and it has the potential to broaden the applications space to specimens which are not conducive to traditional sample preparation techniques. This method offers an alternative to the standard lift-out method of preparing APT specimens, and it provides advantages in time-to-knowledge, large area sampling, and potentially cryogenic applications.

Journal Article Yield Assessment of Protective Coatings for Atom Probe Analysis Get access Yimeng Chen, Yimeng Chen CAMECA Instruments Inc., Madison, WI USA Corresponding author: Yimeng.Chen@ametek.com Search for other works by this author on: Oxford Academic Google Scholar Katherine P Rice, Katherine P Rice CAMECA Instruments Inc., Madison, WI USA Search for other works by this author on: Oxford Academic Google Scholar Robert M Ulfig Robert M Ulfig CAMECA Instruments Inc., Madison, WI USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 28, Issue S1, 1 August 2022, Pages 72–73, https://doi.org/10.1017/S1431927622001192 Published: 01 August 2022

Journal Article Benefits of a Full Field of View in Atom Probe Tomography Get access David A Reinhard, David A Reinhard CAMECA Instruments Inc., Madison, WI, USA Corresponding author: David.Reinhard@AMETEK.com Search for other works by this author on: Oxford Academic Google Scholar Katherine P Rice, Katherine P Rice CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Robert M Ulfig, Robert M Ulfig CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Isabelle Martin, Isabelle Martin CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Brian P Geiser, Brian P Geiser CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar David J Larson David J Larson CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 28, Issue S1, 1 August 2022, Pages 706–708, https://doi.org/10.1017/S1431927622003294 Published: 01 August 2022

Reliable spatially resolved compositional analysis through atom probe tomography requires an accurate placement of the detected ions within the three-dimensional reconstruction. Unfortunately, for heterogeneous systems, traditional reconstruction protocols are prone to position some ions incorrectly. This stems from the use of simplified projection laws which treat the emitter apex as a spherical cap, although the actual shape may be far more complex. For instance, sampled materials with compositional heterogeneities are known to develop local variations in curvature across the emitter due to their material phase specific evaporation fields. This work provides three pivotal precursors to improve the spatial accuracy of the reconstructed volume in such cases. First, we show scanning probe microscopy enables the determination of the local curvature of heterogeneous emitters, thus providing the essential information for a more advanced reconstruction considering the actual shape. Second, we demonstrate the cyclability between scanning probe characterization and atom probe analysis. This is a key ingredient of more advanced reconstruction protocols whereby the characterization of the emitter topography is executed at multiple stages of the atom probe analysis. Third, we show advances in the development of an electrostatically driven reconstruction protocol which are expected to enable reconstruction based on experimental tip shapes.

Atom probe tomography (APT) has been an important technique for metallurgical research for more than 50 years, but only recently has there been substantial adoption in the semiconductor industry [1–3]. Maintaining this trend requires continuing advances in the areas of hardware (and software) related to APT. The field-of-view (FOV) / mass-spectral-quality tradeoff [4] along with laser wavelength [5,6] are two such areas of advancement. It is highly desirable for an atom probe to have a combination of a wide field of view and high mass resolving power (MRP), but historically, these two metrics are inherently at odds with each other, from a design perspective. Some efforts to overcome this difficulty employ reflectron energy compensating based solutions [7], while others use a straight flight path design [8,9]. In this work, we present the new CAMECA Invizo 6000 TM atom probe and introduce the primary benefits.

Journal Article New Product Announcement – LEAP 6000XR, New Applications, New Performance Get access Robert Ulfig, Robert Ulfig CAMECA Instruments Inc., Madison, WI, USA Corresponding author: Robert.Ulfig@AMETEK.com Search for other works by this author on: Oxford Academic Google Scholar Daniel Lenz, Daniel Lenz CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Gard Groth, Gard Groth CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Joseph H Bunton, Joseph H Bunton CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Isabel Martin, Isabel Martin CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Ty J Prosa, Ty J Prosa CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar David A Reinhard, David A Reinhard CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Peter H Clifton, Peter H Clifton CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Brian P Geiser, Brian P Geiser CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar David J Larson David J Larson CAMECA Instruments Inc., Madison, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 28, Issue S1, 1 August 2022, Pages 3190–3191, https://doi.org/10.1017/S1431927622011849 Published: 01 August 2022

Journal Article A Reconstruction Wizard for Electrostatic Reconstruction Get access Brian P Geiser, Brian P Geiser CAMECA Instruments Inc, Fitchburg, WI, USA Corresponding author: Brian.Geiser@ametek.com Search for other works by this author on: Oxford Academic Google Scholar David Reinhard, David Reinhard CAMECA Instruments Inc, Fitchburg, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Joseph Bunton, Joseph Bunton CAMECA Instruments Inc, Fitchburg, WI, USA Search for other works by this author on: Oxford Academic Google Scholar David Larson, David Larson CAMECA Instruments Inc, Fitchburg, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Robert Ulfig, Robert Ulfig CAMECA Instruments Inc, Fitchburg, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Katherine P Rice, Katherine P Rice CAMECA Instruments Inc, Fitchburg, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Isabelle Martin, Isabelle Martin CAMECA Instruments Inc, Fitchburg, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Yimeng Chen, Yimeng Chen CAMECA Instruments Inc, Fitchburg, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Ty Prosa, Ty Prosa CAMECA Instruments Inc, Fitchburg, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Tim Payne Tim Payne CAMECA Instruments Inc, Fitchburg, WI, USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 28, Issue S1, 1 August 2022, Pages 704–705, https://doi.org/10.1017/S1431927622003282 Published: 01 August 2022

Atom probe tomography (APT) has been incorporated into a wide variety of materials research applications over the course of the past twenty years as the installed base of atom probes has increased from single digits to over one hundred [1]. Despite this increase, and the corresponding technology advances, there are still challenges to further adoption. This abstract discusses some of the key challenges of yield and reconstruction and some of the avenues CAMECA ® is exploring to overcome them. A primary may

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In atom probe tomography (APT) a primary element of the instrument optics is the specimen itself. In order to correct artifacts in the data caused by an evolving apex shape, we are developing a numerical electrostatic model [1, 2] reflecting the physics of both the instrumental pieces as well as the specimen geometry. In this poster we report on some numerical accuracy metrics of this model and illustrate its use in the generation of simulated evaporation data.

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