The handling and characterization of nanoobjects has gained in importance in recent years. The scanning electron microscope (SEM) in combination with a focus ion beam (FIB) is commonly used. These applications often need the positions of involved objects. The position calculation must be precise and able to offer results in real time. This paper introduces a new 3D position detection approach for FIB-SEM dual beam systems. FIB and SEM are combined to a powerful stereo system with accuracy in the lower nm range. The FIB is used with low powers to avoid unintended abrasion. In addition to results and the proof of concept an overview of future challenges is given.

In this paper, the semi-automated AFM-based nanomanipulation of silica spheres with a radius of 550 nm is presented. A combined AFM/HRSEM/FIB system is used to facilitate the SEM vision-based pick-and-place handling with haptic feedback. Object recognition and tracking algorithms are described supporting the automated localization of micro-and nanospheres. Automated alignment of source and target sample positions is realized to support fast exchange of different substrates and to speed up the pick-and-place procedure. The integration of a haptic feedback device allows for intuitive AFM-based nanomanipulation with force feedback. The silica spheres are assembled into 2 × 2 μm arrays for applications in infrared spectroscopy.

This paper reports the remote handling of microscale objects, between two sites approximately 630 km distant. To manipulate objects less than 10 mu m, specific equipments such as AFM (Atomic Force Microscope) cantilevers integrated into a SEM (Scanning Electron Microscope) are generally required. Enabling remote access to such a system would benefit any micro/nanoresearcher. However, vision feedback and sensor data of a micromanipulation system are generally limited, hence the implementation of a teleoperation scenario is not straightforward. Specific tools are proposed here for an intuitive manipulation in a wide range of applications. To ensure ease of manipulation, both a 3D virtual representation of the scene and haptic feedback are provided. Force sensor feedback is limited since only two measures are available. In order to extend this information, vision algorithms are developed to estimate the respective positions of the tool and objects, which are then used to calculate the haptic feedback. The stability of the overall scheme is very sensitive to time delays. This requirement is taken into account in vision algorithms and the communication module which transfers the data between the two remote sites. In addition, the proposed robotic control architecture is modular so that the platform can be used for a wide range of applications. First results are obtained on a teleoperation between Paris, France, and Oldenburg, Germany.

The Waratah Fault is a northeast trending, high angle, reverse fault in the Late Paleozoic Lachlan Fold Belt at Cape Liptrap on the Southeastern Australian Coast. It is susceptible to reactivation in the modern intraplate stress field in Southeast Australia and exhibits Late Pliocene to Late Pleistocene reactivation. Radiocarbon, optically stimulated luminescence (OSL), and cosmogenic radionuclide (CRN) dating of marine terraces on Cape Liptrap are used to constrain rates of displacement across the reactivated Waratah Fault. Six marine terraces, numbered Qt(6)-Tt(1) (youngest to oldest), are well developed at Cape Liptrap with altitudes ranging from similar to 1.5 m to similar to 170 m amsl, respectively. On the lowest terrace, Qt(6). barnacles in wave-cut notches similar to 1.5 m amsl, yielded a radiocarbon age of 6090-5880 Cal BP, and reflect the local mid-Holocene sea level highstand. Qt(5) yielded four OSL ages from scattered locations around the cape ranging from similar to 80 ka to similar to 130 ka. It formed during the Last Interglacial sea level highstand (MIS 5e) at similar to 125 ka. Inner edge elevations (approximate paleo high tide line) for Qt(5) occur at distinctly different elevations on opposite sides of the Waratah Fault. Offsets of the inner edges across the fault range from 1.3 m to 5.1 m with displacement rates ranging from 0.01 mm/a to 0.04 mm/a. The most extensive terrace, Tt(4), yielded four Early Pleistocene cosmogenic radionuclide (CRN) ages: two apparent burial ages of 0.858 Ma +/- 0.16 Ma and 1.25 +/- Ma 0.265 Ma, and two apparent exposure ages of 1.071 Ma +/- 0.071 Ma (Be-10) and 0.798 +/- Ma 0.066 Ma (Al-26). Allowing for muonic production effects from insufficient burial depths, the depth corrected CRN burial ages are 1.8 Ma +/- 0.56 Ma and 2.52 Ma +/- 0.88 Ma, or Late Pliocene. A Late Pliocene age is our preferred age. Offsets of Tt(4) across the Waratah Fault range from a minimum of similar to 20 m for terrace surface treads to a maximum of similar to 70 m for terrace bedrock straths. Calculated displacement rates for Tt(4) range from 0.01 mm/a to 0.04 mm/a (using a Late Pliocene age, similar to 2 Ma), identical to the rates calculated for the Last Interglacial terrace, Qt(5). This indicates that deformation at Cape Liptrap has been ongoing at similar time-averaged rates at least since the Late Pliocene. The upper terraces in the sequence, Tt(3) (similar to 110 m amsl), Tt(2) (similar to 140 m) and Tt(1) (similar to 180 m) are undated, but most likely correlate to sea level highstands in the Neogene. Terraces Tt1-Tt4 show an increasing northward tilt with age.The Waratah Fault forms a prominent structural boundary in the Lachlan Fold Belt discernible from airborne magnetic and bouger gravity anomalies. Seismicity and deformation are episodic. Episodic movement on the Waratah Fault may be coincident with sea level highstands since the Late Pliocene, possibly from increased loading and elevated pore pressure within the fault zone. This suggests that intervals between major seismic events Could be on the order of 100 ka. (C) 2008 Elsevier Ltd. All rights reserved.

The handling of nanoscale objects is a field with high prospects and good perspectives. This paper presents different necessary image processing methods and algorithms, which are needed to enable the reliable automation of nanohandling processes. The imaging sensor used to gain access to the nanoscale world is the scanning electron microscope (SEM). Tasks to be fulfilled on image data from the SEM include object recognition, object tracking and depth estimation. All these algorithms are discussed and validated.

This paper presents different image processing methods and algorithms, which are needed to enable the reliable automation of nanohandling processes. These applications use the scanning electron microscope (SEM) as a visual sensor. SEMs are widespread and powerful tools for manipulations on the nanoscale. Due to the timing constraints in automated setups, the trade-off between SEM scanning speed and image quality is a concern for algorithm development. Tasks to be fulfilled on image data provided by the SEM include object recognition, object tracking and depth estimation. A selection of algorithms that have been applied in automated setups for nanomanipulation is discussed and validated.

This article presents a software architecture for image processing applications. Its intended use is in the automation of manipulation processes at the microand nanoscale. The main requirements for this architecture are the capability for real-time processing, the flexibility to cover a wide range of different applications and simplicity of usage. Some of the biggest challenges include online changes of control- and data-flow, integration of a large number of devices for microscopy and the need for high-speed result forwarding. The architecture has been implemented and tested extensively. Three key applications are presented: object tracking, classification of biological cells and 3D image reconstruction for scanning electron microscopes.

This paper describes an approach to depth detection in scanning electron microscope images which aims at the automation of nanohandling procedures. It incorporates simultaneous tracking of an object in a stereo image pair, generated using a self-built magnetic lens for tilting the electron beam. Object depth is concluded from the object displacement. The tracking procedure is based on the active contours method, adjusted by a region based energy function. An automatic contour initialization is presented that makes use of edge detection. All methods described have been implemented and tested extensively in the designated automation environment. The approach is found to provide very accurate depth estimates even at a small level of magnification.