In this paper, the semi-automated AFM-based nanomanipulation of silica spheres with a radius of 550 nm is presented. A combined AFM/HRSEM/FIB system is used to facilitate the SEM vision-based pick-and-place handling with haptic feedback. Object recognition and tracking algorithms are described supporting the automated localization of micro-and nanospheres. Automated alignment of source and target sample positions is realized to support fast exchange of different substrates and to speed up the pick-and-place procedure. The integration of a haptic feedback device allows for intuitive AFM-based nanomanipulation with force feedback. The silica spheres are assembled into 2 × 2 μm arrays for applications in infrared spectroscopy.

Combining the SEM as a visual sensor with the force control of an AFM promises to provide a unique tool for automated robotic nanomanipulations. This article presents the development of a nanorobotic workstation that can use AFM capabilities for robotic nanomanipulations inside an SEM. The hardware architecture for the AFM setup inside the SEM is described in detail. The AFM capabilities are demonstrated by in-situ acquired AFM and SEM images of identical sample locations. Initial AFM-based manipulation experiments on manipulating a graphene sheet and on pushing nanosized polymer beads are presented. The integration of the system with haptic feedback for teleoperation and into a robotic automation and visual control framework is discussed.

In this paper, the concept and first results of a novel toolbox for nanoscale characterization are presented. A nanorobotic AFM system is being developed and integrated into a high resolution SEM/FIB system allowing nanoanalysis, -manipulation and -structuring. The compact and modular AFM setup enables probe- as well as sample-scanning and uses self-sensing AFM cantilevers. Image fusion algorithms are developed to merge SEM and AFM information for hybrid analysis of nanoscale objects. A commercial AFM controller is embedded into a special control system architecture that allows for automation of nanomanipulation sequences.

Efficient and reliable handling and characterization of objects at the nanoscale is highly important for various types of application ranging from prototypical fabrication of nanoelectronical circuits to the investigation of mechanical or electrical properties of biological objects like bacteria. Theoretically, the atomic force microscope (AFM) constitutes an adequate instrument for performing such manipulations and characterizations. However, complex and automated tasks are dificult or even impossible to perform solely using the AFM. To compensate for the drawbacks of AFM-based manipulation, several advanced techniques are being developed. Current research work on some key components for the development of a modular and versatile AFM-based nanorobotic setup is presented here. This includes a flexible thermal drift measuring technique, the integration of an AFM to the vacuum chamber of a scanning electron microscope to provide additional visual feedback, and a novel manipulation mode using lateral cantilever vibrations and oscillations. Finally first experiments on handling DNA are presented.