Future collider experiments demand a new generation of tracking detectors with excellent spatial and temporal resolution, along with enhanced radiation hardness. Monolithic active pixel sensors (MAPS) based on silicon CMOS technology are proven to provide fine spatial and temporal resolution while being cost-effective. In terms of radiation hardness, however, wide band-gap semiconductors such as silicon carbide (SiC) promise superior performance. In this work, we make a first step towards MAPS development based on SiC-CMOS technology. We used the Fraunhofer IISB 2 mu m SiC-CMOS process to design the first stage in the electronic read-out chain of a MAPS, a charge-sensitive amplifier (CSA). Circuit simulations show that an equivalent noise charge of 95 e to 205 e is attainable for an input capacitance in the range of 0.5 pF to 4.5 pF at room temperature. The attained bandwidth of 31 kHz was primarily limited by the large size of the MOSFETs in the used SiC-CMOS technology. We believe that a further increase in integration density could make SiC-MAPS a compelling alternative to its silicon-based counterparts.
Recent clinical evidence shows a correlation between linear energy transfer (LET) and tumor control in carbon ion radiotherapy. This prompts the direct inclusion of LET into the treatment planning. Currently, LET is mainly extracted from simulations. Good clinical practice requires adopting measurement routines that correlate with LET, such as microdosimetry. In this work, we describe an application-specific integrated circuit (ASIC) for reading out microdosimeteric sensors. The ASIC is designed for input capacitances up to 3 pF. It contains four readout channels, each with a different saturation charge ranging from 75 fC to 3.2 pC. In the 75 fC range, at 1 pF input capacitance and a shaping time of 1 microseconds, the ASIC has an equivalent noise contribution (ENC) below 15 electrons at ambient temperature. This low noise level is expected to enable new measurement possibilities, including the assessment of microdosimetric proton spectra in the low-LET region of the entrance channel, as well as studying the contribution of delta electrons.
The former CERN RD50 collaboration develops monolithic active pixel high voltage (HV) CMOS sensors for future colliders with the aim of high radiation tolerance, good time resolution, and high granularity pixel detectors. The most recent prototype, the RD50-MPW4, was produced by LFoundry in December 2023 using a 150 nm CMOS process. It features a matrix of 64x64 pixels with a 62 μm pitch and employs a column-drain readout architecture. Compared to its predecessor, it now has separate analog and digital power domains and a new biasing scheme with a guard ring structure that supports bias voltages over 600 V. This contribution will discuss the design and latest results of the MPW4, where tests with unirradiated samples showed more than 99.9
A 512-channel beam monitor was developed to measure beam parameters at particle rates from single particles up to clinical rates (several GHz). The system is designed for silicon carbide (SiC) strip sensors for increased radiation tolerance. The sensor readout uses four 128-channel analog charge-integrators with on-chip multiplexers, complemented by ADCs and a SoC module (FPGA + CPUs). Gigabit Ethernet, an SFP+ interface, and electrical and optical links enable communication with auxiliary systems. The system operates from a single power supply and was implemented on a 426 & times;253 mm(2), 12-layer PCB. All components, except for the sensors, are commercially available.
Silicon carbide (SiC) planar PiN diodes from two different manufacturers were irradiated with 252.7 MeV protons from a medical synchrotron. Over the course of two 8h irradiation shifts, the samples were exposed to increasing fluences ranging from 1.4 & times; 10(11) to 3.5 & times; 10(13) p(+)/cm(2). Electrical characterizations, including IV and CV measurements, were performed both before and after irradiation using probe stations, and for selected samples even in-situ between fluence steps directly at the irradiation facility. The results show a gradual compensation of the effective epitaxial doping concentration with each incremental fluence step, observed as a reduction in capacitance before full depletion and confirmed by the extracted effective doping concentration. From these measurements, linear donor removal rates are determined for all sample groups, with values ranging from 4.2 cm(-1) to 6.4 cm(-1). These findings provide a quantitative basis for understanding radiation-induced charge carrier removal in 4H-SiC devices and are relevant for predicting the performance and lifetime of future radiation-hard detector technologies, including 4H-SiC LGADs.
Medical synchrotrons are often used for testing instrumentation in high-energy physics or non-clinical research in medical physics. In many applications of medical synchrotrons, such as microdosimetry and ion imaging, precise knowledge of the spill structure and instantaneous particle rate is crucial. Conventional ionization chambers, while omnipresent in clinical settings, suffer from limitations in charge resolution and integration time, making single-particle detection at high dose rates unfeasible. To address these limitations, we present a beam detection setup based on a silicon carbide (SiC) sensor and a monolithic microwave integrated circuit (MMIC), capable of detecting single particles with a full width at half maximum (FWHM) pulse duration of 500 ps. At the MedAustron ion therapy center, we characterized the spill structure of proton and carbon-ion beams delivered to the irradiation room beyond the timescale of the maximum ion revolution frequency in the synchrotron. The resulting data offer valuable insights into the beam intensity at small time scales and demonstrate the capabilities of SiC-based systems for high-flux beam monitoring.
Particle therapy using light ions like protons, helium ions or carbon ions enables precise tumor targeting with enhanced biological effectiveness while minimizing damage to healthy tissue. Successful treatment planning depends not only on the absorbed dose but also on quality of the radiation, as quantified by the linear energy transfer (LET). Microdosimetry provides a direct experimental determination of such quantities by measuring the energy deposited per incoming particle in micrometer-sized solid-state detectors representing the relevant biological scales. However, the small signal amplitudes and high particle rates in therapeutic ion beams challenge existing readout systems, which are not sufficiently optimized for reliable operation with respect to pileup and signal-to-noise ratio (SNR). To address this, a modular data acquisition (DAQ) system was developed to accelerate the design of custom readout electronics and sensor characterization in microdosimetry and related spectroscopic applications. Centered around a Xilinx Zynq system-on-chip, it combines real-time processing, high-bandwidth streaming, and high-resolution digitization (16 bit at 100 MSas^-1) to enable advanced digital signal processing. The platform integrates programmable power supplies, a bias-voltage filter, test-pulse generators, and flexible I/O. Detector and preamplifier front-ends are hosted on interchangeable daugtherboards connected via a standardized interface, allowing different hardware configurations and readout algorithms to be evaluated on the same platform. The Spectacular DAQ system was successfully tested at the MedAustron ion therapy facility with custom charge-sensitive amplifiers and a diamond microdosimeter. By enabling optimization fast testing of different readout electronics and sensors, it supports and advances the integration of microdosimetry into routine clinical practice.
Detector characterization and instrumentation testing are often performed at cyclotron and synchrotron facilities, many of which were originally developed for medical applications in cancer therapy. For particle physics experiments requiring a single-particle resolution, pileup can significantly degrade data quality, making precise knowledge of the beam time structure essential for selecting appropriate readout parameters. However, such information is often unavailable from the facilities and challenging to determine experimentally. Here, we report measurements of the spill time structure at two medical accelerator facilities using a silicon carbide (SiC) particle sensor coupled to a high-frequency readout system. Owing to its high carrier saturation velocity and the tolerance to large bias voltages, SiC is well suited for fast readout and measurements requiring precise timing. Using a 6 GHz readout with custom SiC diodes, we characterize the micro-spill structure of both cyclotron and synchrotron beams on a sub-nanosecond timescale. The measured arrival-time distributions exhibit modulation with the accelerator RF frequencies, reflecting features of the extraction process. The resolved micro-spill structure enables quantitative estimation of pileup contributions and provides design constraints for future readout electronics. The presented results emphasize the importance of the characterization of the beam time-structure characterization for the development of precise readout systems.
Silicon carbide is a promising material for radiation-hard detectors due to its wide bandgap, low leakage current, high critical electric field, and high saturation velocity. A key obstacle for its use in high-radiation environments is the incomplete understanding of surface damage at the 4H-SiC/SiO_2 interface.In this work, we present a combined experimental and TCAD simulation study of X-ray radiation-induced surface damage on n-type 4H-SiC MOS capacitors fabricated at CNM (Centro Nacional de Microelectronica, Barcelona), irradiated up to 10 Mrad. High-frequency (100 kHz) and quasi-static capacitance-voltage (C–V) measurements are used to evaluate the evolution of fixed oxide charge density and interface trap density as a function of dose.A dose-dependent TCAD surface model is developed and validated against the full set of measurements. The optimized model reproduces the measured C–V characteristics across the entire irradiation range and provides a physically grounded baseline for simulations of n-type 4H-SiC-based detectors. It can be used as a starting point for predictive modeling of irradiated detectors.
Metal-oxide-semiconductor field-effect transistor (MOSFET) test structures are investigated to characterize p-stop isolation implants between n-type electrodes in p-type silicon sensors. The device transfer characteristics are measured as a function of the voltage applied to the backside to extract the threshold voltage, which quantifies inter-electrode isolation, and the field-dependent mobility parameters. We present a methodology to reconstruct depth-dependent doping profiles from the threshold voltage characteristics, accounting for the localized space-charge effects and electric-field screening induced by the p-stop implants. The study evaluates the sensitivity of this technique to various p-stop geometries and doping concentrations across different wafer types. The results demonstrate the potential of MOSFET-based structures as a non-destructive diagnostic for monitoring p-stop consistency and inter-electrode isolation properties in silicon detectors.
Charge-sensitive readout chains are widely used to measure single-particle energy spectra in a variety of scientific fields. Such readout chains are used in microdosimetry, a discipline focused on measuring the energy deposition of ionizing radiation in microscopic sites. This information is particularly relevant in ion therapy, which utilizes ions to treat various types of cancer. The direct measurement of the radiation quality has been shown to exceed the capabilities of macroscopic dosimeters in clinical dosimetry and holds potential for enhancing treatment planning. Spectroscopic front-end electronics consist of a charge-sensitive preamplifier and a shaping network, which collectively generate well-defined pulses for digitization and pulse height measurement using a multichannel analyzer. Achieving a high amplitude resolution typically requires shaping times on the order of mu s. In microdosimetric measurements at clinical ion beams it is challenging to measure the amplitude with sufficient resolution and simultaneously be fast enough to manage pulse pileup at high dose rates. This work introduces an innovative pileup rejection algorithm based on the deconvolution method. By matching a custom filter to the analog front end, the timestamps of individual events can be reconstructed from severely piled-up signals with high accuracy. This approach allows the use of extended shaping times while maintaining pileup-rejection capabilities without requiring a secondary fast amplifier. Filters like this can be readily implemented in digital signal processing or potentially realized on chip. Beyond microdosimetric measurements, potential applications include high-throughput X-ray and gamma spectroscopy or scintillation counting. The method has been successfully demonstrated offline, using different signal sources.
4H silicon carbide (SiC) has several advantageous properties compared to silicon (Si) making it an appealing detector material, such as a larger charge carrier saturation velocity, bandgap, and thermal conductivity. While the current understanding of material and model parameters suffices to simulate unirradiated 4H-SiC using TCAD software, configurations accurately predicting performance degradation after high levels of irradiation due to induced traps and recombination centers do not exist. Despite increasing efforts to characterize the introduction and nature of such defects, published results are often contradictory. This work presents a bulk radiation damage model for TCAD simulation based on existing literature and optimized on measurement results of neutron-irradiated 4H-SiC pad diodes. Experimentally observed effects, such as flattening of the detector capacitance, loss of rectification properties, and degradation in charge collection efficiency, are reproduced. The EH4 center is suggested as a major lifetime killer in 4H-SiC, while the still controversial assumption of the EH6,7 deep-level being of donor type is reinforced.
In this paper we present simulation based radiation damage modeling of 4H silicon carbide (SiC) using the technology computer aided design (TCAD) tools for up to 1 kV forward and backward bias. After verifying the TCAD framework from Global TCAD Solutions (G TS) against Sentaurus simulations for silicon we use it to approximate measurements of neutron-irradiated 4H-SiC particle detectors, i.e., p-i-n diodes. Based on our simulations we are not only able to evaluate the accuracy of the predictions but also to provide an explanation for the almost negligible current of radiated devices under high forward bias.
Objective. Microdosimetry investigates the energy deposition of ionizing radiation at microscopic scales, beyond the assessment capabilities of macroscopic dosimetry. This contributes to an understanding of the biological response in radiobiology, radiation protection and radiotherapy. Microdosimetric pulse height spectra are usually measured using an ionization detector in pulsed readout mode. This incorporates a charge-sensitive amplifier followed by a shaping network. At high particle rates, the pileup of multiple pulses leads to distortions in the recorded spectra. Especially for gas-based detectors, this is a significant issue, that can be reduced by using solid-state detectors with smaller cross-sectional areas and faster readout speeds. At particle rates typical for ion therapy, however, such devices will also experience pileup. Mitigation techniques often focus on avoiding pileup altogether, while post-processing approaches are rarely investigated.Approach. This work explores pileup effects in microdosimetric measurements and presents a stochastic resampling algorithm, allowing for offline simulation and correction of spectra. Initially it was developed for measuring neutron spectra with tissue equivalent proportional counters and is adapted for the use with solid-state microdosimeters in a clinical radiotherapy setting.Main results. The algorithm was tested on data acquired with solid-state microdosimeters at the MedAustron ion therapy facility. The successful simulation and reduction of pileup counts is achieved by establishing a limited number of parameters for a given setup.Significance. The presented results illustrate the potential of offline correction methods in situations where a direct pileup-free measurement is currently not practicable.
Due to the increased commercial availability, wide-bandgap semiconductors and their radiation hardness have recently received increased interest from the particle physics community. 4H-Silicon Carbide (SiC), especially, is an attractive candidate for future radiation-hard detectors which do not require cooling. This paper investigates the radiation hardness of 4H-SiC p-in-n detectors irradiated up to 5× 10^15 n_eq./cm^2 using UV-TCT. The samples have been operated in reverse and forward bias, which is possible due to the heavily decreased forward current after irradiation. Previous studies have already hinted at an excessive charge collection in forward bias, even exceeding a charge collection efficiency (CCE) of 100 this work, the excessive CCE in forward bias was shown to correlate heavily with the spatial profile of injected charge. For a sufficiently focused laser, the CCE starts to increase at high forward bias and even surpasses 100 of saturating as it does for a defocused laser beam. In reverse bias, the CCE was found to be independent of the beam spot size. For samples irradiated to high fluences (≥ 1× 10^15 n_eq./cm^2) the excessive CCE in forward bias is smaller and negligible at the highest fluences. Additionally, the CCE was observed to correlate to the rate of charge injection (laser pulses per second), with a logarithmic increase of the collected charge if a threshold of injected carrier density is exceeded. The mechanism of these effects is still an ongoing topic of study, however, the observations already pose implications for the accurate experimental characterization of irradiated SiC detectors.
Access to high-energy particle beams is key for testing high-energy physics (HEP) instruments. Accelerators for cancer treatment can serve as such a testing ground. However, HEP instrument tests typically require particle fluxes significantly lower than cancer treatment. Thus, facilities need adaptations to fulfill both the requirements for cancer treatment and the requirements for HEP instrument testing. We report on the progress made in developing a beam monitor with a sufficient dynamic range to allow for the detection of single particles, while still being able to act as a monitor at the clinical particle rates of the MedAustron treatment facility. The beam monitor is designed for integration into existing accelerators.
The Belle II experiment at the SuperKEKB e+e− collider is preparing for an upgrade of its vertex detector to cope with an increased luminosity of up to 6 × 1035 cm−2s−1. The new vertex detector (VTX) will consist of six layers of depleted monolithic active pixel sensors (DMAPS), with a total material budget of about 3% of X0. The OBELIX chip, developed for this upgrade, is derived from the TJ-Monopix2 sensor and manufactured using the Tower Semiconductor 180 nm CMOS technology. It features a 33 µm pixel pitch, time-stamping capability with 50 ns resolution, and a dedicated digital periphery compatible with the Belle II trigger system, supporting rates up to 30 kHz. The sensor is designed to operate under the expected background hit rate at the target luminosity, with high radiation tolerance, up to 5 × 1014 neq/cm2 and 1 MGy, while maintaining a power density in the range of 200-300 mW/cm2, corresponding to hit rates from a few MHz/cm2 up to 120 MHz/cm2. This paper presents results from laboratory measurements and beam tests performed on TJ-Monopix2 chips, including both not-irradiated and irradiated devices. Particular focus is given to the performance of irradiated sensors as a function of temperature, a key aspect for defining the maximum allowable operating temperature for OBELIX. These studies provide essential input for the thermal design of the VTX cooling system, especially for the innermost layers where power density and hit rates are highest.
We present the design and simulation of a 30 mu m thick 4H-SiC Low Gain Avalanche Diode (LGAD) optimized for high-voltage operation. A 2.4 mu m thick epitaxially grown gain layer enables controlled internal amplification up to 1 kV reverse bias, while maintaining full depletion below 500 V. Electrical characteristics, including I-V, C-V, and gain behavior, were simulated in Synopsys Sentaurus Technology Computer-Aided Design (TCAD) using a quasi-1D geometry and verified across process-related variations in gain layer parameters. To ensure high-voltage stability and proper edge termination, a guard structure combining deep etched trenches and deep p+ junction termination extension (JTE) implants was designed. TCAD simulations varying the guard structure dimensions yielded an optimized design with a breakdown voltage above 2.4 kV. A corresponding wafer run is currently processed at IMB-CNM, Barcelona.
The low relative charge-to-mass ratio offset of 0.065% between fully ionized helium-4 and carbon-12 ions enables simultaneous acceleration in hadron therapy synchrotrons. At the same energy per mass, helium ions exhibit a stopping range approximately 3 times greater than carbon ions. They can therefore be exploited for online range verification downstream of the patient during carbon ion beam irradiation. One possibility for creating this mixed beam is accelerating the two ion species sequentially through the LINAC and subsequently “mixing” them at injection energy in the synchrotron with a double multiturn injection scheme. This work reports the first successful generation, acceleration, and extraction of a mixed helium and carbon ion beam using this double multiturn injection scheme, which was achieved at the MedAustron therapy accelerator in Austria. A description of the double multiturn injection scheme, particle tracking simulations, and details on the implementation at the MedAustron accelerator facility are presented and discussed. Finally, measurements of the mixed beam at delivery in the irradiation room using a radiochromic film and a low-gain avalanche diode detector are presented.