Surface protective films for hard disk media were studied. Whereas sputtered carbon films are not sufficiently wear-resistant for use with CaTiO3 and Al2O3. TiC head sliders, tests using plasma-CVD films prepared in acetylene gas under RF or dc discharge have lubricating properties and sufficient wear resistance, but are so soft that disk surfaces are easily damaged. By combining the two in a doub...

The characteristics of two very common targets (TbFeCo and TbCo alloys) were evaluated and it was learned that sputtering such alloy targets varies the sample composition, but target oxygen content has no effect on the magnetic characteristics.