基本信息
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Career Trajectory
Bio
Tetsuya Tatsumi received the B.S. and M.S. degrees from Waseda University in 1987 and 1989, respectively, and the Ph.D. degree from Keio University in 2000.
He joined Sony Corporation in 1989 and was engaged in the development of plasma technology for various semiconductor devices. He was a member of the Association for Super Advanced Electronics Technology from 1997 to 2001, where he led basic research on dry etching plasma. He is currently a Distinguished Engineer with Sony Semiconductor Solutions Corporation and a specially appointed Professor with the Tokyo Institute of Technology. He was awarded a Fellow of the Japanese Society of Applied Physics in 2015.
Research Interests
Papers共 17 篇Author StatisticsCo-AuthorSimilar Experts
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2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)pp.1-3, (2024)
Tatsuya Kitazawa,Yuta Inaba,Shunsuke Yamashita,Shinya Imai, Keita Kurohara,Tetsuya Tatsumi,Hitoshi Wakabayashi,Shigetaka Tomiya
Japanese Journal of Applied Physicsno. 5 (2024)
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)pp.1-3, (2023)
2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM (2023)
2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM (2023)
JAPANESE JOURNAL OF APPLIED PHYSICSno. SC (2022)
IEEE Journal of the Electron Devices Society (2021): 1117-1124
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Author Statistics
#Papers: 18
#Citation: 31
H-Index: 4
G-Index: 5
Sociability: 3
Diversity: 0
Activity: 1
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